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公开(公告)号：US11183435B2
公开(公告)日：2021-11-23
申请号：US16397870
申请日：2019-04-29
IPC分类号： H01L21/66 , H01L21/67 , H01L21/306 , H01L21/3105 , H01L21/321 , B24B37/013 , B24D7/14 , B24B49/12 , B24B49/08 , B24B37/20
摘要： A method of detecting a polishing endpoint includes storing a plurality of library spectra, measuring a sequence of spectra from the substrate in-situ during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching library spectrum from the plurality of library spectra to generate a sequence of best matching library spectra. Each library spectrum has a stored associated value representing a degree of progress through a polishing process, and the stored associated value for the best matching library spectrum is determined for each best matching library spectrum to generate a sequence of values representing a progression of polishing of the substrate. The sequence of values is compared to a target value, and a polishing endpoint is triggered when the sequence of values reaches the target value.
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22.发明授权公开(公告)号：US11103975B2
公开(公告)日：2021-08-31
申请号：US16360659
申请日：2019-03-21
申请人： TU GLOBAL LTD.
发明人： Yong Bum Kim
摘要： The present invention relates to an abrasive disk that is excellent in workability and stability and has a low degree of fatigue applied to workers and tools, and a process for producing the same. The abrasive disc is excellent in stability by virtue of a high adhesive strength of each layer, has high flexibility, elasticity, and adhesiveness, and is lightweight per unit area. Thus, it has a low degree of fatigue applied to workers and expensive tools. In addition, according to the above production process, the abrasive disk can be continuously mass-produced.
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公开(公告)号：US20210138679A1
公开(公告)日：2021-05-13
申请号：US17009764
申请日：2020-09-01
申请人： LAWRENCE E BAKER
发明人： LAWRENCE E BAKER
摘要： A blade sharpening system for log saw machines is provided. An example multiphase grinding wheel has a grinding face with one or more abrasive concentric rings for sharpening the cutting blade of the log saw machine, and one or more padded concentric rings consisting of fiber padding. Sharpening with the multiphase grinding wheel improves cut quality, increases blade life, removes glues and varnishes from the cutting blade, reduces blade deformation, and hones the edge of the cutting blade. A pneumatic tensioning system uses air bladders to apply a dynamically cushioned pressure between the grinding wheels and the cutting blade. The fiber-padded grinding wheels and the air bladder tensioner provide improved sharpness of the cutting blade and longer life for the mechanical components. The padded grinding wheels decrease fire risk, and the tensioner can be operated remotely, decreasing human injuries common with conventional setup actions near the sharp cutting blade.
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公开(公告)号：US10926431B2
公开(公告)日：2021-02-23
申请号：US14314428
申请日：2014-06-25
申请人： Schott AG
摘要： A tool head capable of introducing deep recesses into hard and brittle material such as glass and glass ceramics is provided. The tool head includes a hollow cylindrical abrasive body merging into a hollow shank. The hollow cylindrical abrasive body has an end face with a central abrasive area at the location of a cylinder axis. The central abrasive area is connected with the inner wall surface of the hollow cylindrical abrasive body by at least one web. The end face of the abrasive body, the web, and at least a portion of the outer wall surface of the abrasive body are covered with abrasive. The hollow shank has at least one opening to the interior between the at least one web and the inner wall surface of the abrasive body.
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公开(公告)号：US09120194B2
公开(公告)日：2015-09-01
申请号：US13188028
申请日：2011-07-21
申请人： Kuo-Hsiu Wei , Kei-Wei Chen , Ying-Lang Wang , Chun-Ting Kuo
发明人： Kuo-Hsiu Wei , Kei-Wei Chen , Ying-Lang Wang , Chun-Ting Kuo
摘要： A grinding wheel comprises an outer base with a first attached grain pad; and an inner frame with a second attached grain pad; and a spindle axis shared by the outer base and the inner frame, wherein at least one of the outer base and the inner frame can move independently along the shared spindle axis; and wherein the outer base, the inner frame, and the shared spindle axis all have a same center. A grinding system comprises an above said grinding wheel, and a wheel head attached to the shared spindle axis, capable of moving vertically, in addition to a motor driving the grinding wheel to spin; and a chuck table for fixing a wafer on top of the chuck table; wherein the grinding wheel overlaps a portion of the chuck table, each capable of spinning to the opposite direction of another.
摘要翻译： 砂轮包括具有第一附接谷物垫的外基部; 以及具有第二附着谷物垫的内框架; 以及由所述外基座和所述内框架共享的主轴，其中所述外基座和所述内框架中的至少一个可以沿着所述共享主轴轴线独立地移动; 并且其中所述外基座，所述内框架和所述共享主轴轴线都具有相同的中心。 研磨系统包括上述砂轮和附接到共享主轴轴线的能够垂直移动的砂轮头，除了驱动砂轮旋转的马达之外， 以及用于将晶片固定在卡盘台顶部的卡盘台; 其中所述砂轮与所述卡盘台的一部分重叠，所述卡盘台的每一个能够沿相反方向旋转。
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26.发明授权公开(公告)号：US09117751B2
公开(公告)日：2015-08-25
申请号：US14010193
申请日：2013-08-26
IPC分类号： H01L21/302 , H01L21/66 , B24B37/013 , B24B37/20 , B24B49/08 , B24B49/12 , B24D7/14 , H01L21/3105 , H01L21/321
CPC分类号： H01L22/26 , B24B37/013 , B24B37/205 , B24B49/08 , B24B49/12 , B24D7/14 , H01L21/30625 , H01L21/31053 , H01L21/31055 , H01L21/3212 , H01L21/67075 , H01L21/67092 , H01L21/67253
摘要： Methods and apparatus for spectrum-based endpointing. An endpointing method includes selecting a reference spectrum. The reference spectrum is a spectrum of white light reflected from a film of interest on a first substrate and has a thickness greater than a target thickness. The reference spectrum is empirically selected for particular spectrum-based endpoint determination logic so that the target thickness is achieved when endpoint is called by applying the particular spectrum-based endpoint logic. The method includes obtaining a current spectrum. The current spectrum is a spectrum of white light reflected from a film of interest on a second substrate when the film of interest is being subjected to a polishing step and has a current thickness that is greater than the target thickness. The method includes determining, for the second substrate, when an endpoint of the polishing step has been achieved. The determining is based on the reference and current spectra.
摘要翻译： 用于基于频谱的终点的方法和装置。 终点方法包括选择参考频谱。 参考光谱是在第一衬底上从感兴趣的膜反射的白光的光谱，并且具有大于目标厚度的厚度。 对于特定的基于频谱的端点确定逻辑，经验地选择参考频谱，使得当通过应用特定的基于频谱的端点逻辑来调用端点时实现目标厚度。 该方法包括获得当前频谱。 目前的光谱是当感兴趣的薄膜经受抛光步骤并且具有大于目标厚度的电流厚度时，在第二基板上从感兴趣的薄膜反射的白光的光谱。 该方法包括为第二基底确定何时已经实现了抛光步骤的终点。 该确定基于参考和当前光谱。
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公开(公告)号：US20150000204A1
公开(公告)日：2015-01-01
申请号：US14317117
申请日：2014-06-27
摘要： An abrasive article has an abrasive portion and chopped strand fibers (CSF) with enhanced strength and/or fracture of toughness. The CSF may be coated with a thermoplastic having a loss on ignition of at least about 2 wt %. The CSF can have a primary coating and a secondary coating on the primary coating. At least some of the CSF can have a length of at least about 6.3 mm.
摘要翻译： 研磨制品具有磨料部分和具有增强的韧性和/或韧性断裂的短切纤维纤维（CSF）。 CSF可以涂覆有至少约2重量％的点燃损失的热塑性塑料。 CSF可以在初级涂层上具有初级涂层和二次涂层。 CSF中的至少一些可具有至少约6.3mm的长度。
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28.发明申请TOOL HEAD AND GLASS OR GLASS CERAMIC ARTICLE PRODUCIBLE USING THE TOOL HEAD 审中-公开工具头和玻璃或玻璃陶瓷制品使用工具头公开(公告)号：US20140377505A1
公开(公告)日：2014-12-25
申请号：US14314428
申请日：2014-06-25
申请人： Schott AG
CPC分类号： B28D1/146 , B24D7/14 , B28D1/041 , B28D1/186 , Y10T428/24355 , Y10T428/24479
摘要： A tool head capable of introducing deep recesses into hard and brittle material such as glass and glass ceramics is provided. The tool head includes a hollow cylindrical abrasive body merging into a hollow shank. The hollow cylindrical abrasive body has an end face with a central abrasive area at the location of a cylinder axis. The central abrasive area is connected with the inner wall surface of the hollow cylindrical abrasive body by at least one web. The end face of the abrasive body, the web, and at least a portion of the outer wall surface of the abrasive body are covered with abrasive. The hollow shank has at least one opening to the interior between the at least one web and the inner wall surface of the abrasive body.
摘要翻译： 提供了能够将深度凹陷引入硬质脆性材料如玻璃和玻璃陶瓷的工具头。 该工具头包括一个中空的圆柱形研磨体，该中空的圆柱形研磨体合并成一个空心柄。 中空圆柱形研磨体具有在气缸轴线的位置处具有中心研磨区域的端面。 中心研磨区域通过至少一个腹板与中空圆柱形研磨体的内壁表面连接。 研磨体的端面，腹板以及研磨体的外壁表面的至少一部分被磨料覆盖。 空心柄在至少一个腹板和研磨体的内壁表面之间具有至少一个内部的开口。
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公开(公告)号：US20140256238A1
公开(公告)日：2014-09-11
申请号：US14353467
申请日：2012-11-06
发明人： Loc X. Van , Thu A. Nguyen
IPC分类号： B24D7/14
摘要： A composite abrasive wheel comprises primary and secondary abrasive portions. The primary abrasive portion comprises shaped ceramic abrasive particles retained in a first organic binder. The secondary abrasive portion is bonded to the primary abrasive portion, and comprises secondary crushed abrasive particles retained in a second organic binder. The primary abrasive portion comprises a larger volume percentage of the shaped ceramic abrasive particles than the secondary abrasive portion. A central aperture extends through the composite abrasive wheel.
摘要翻译： 复合砂轮包括初级和次级磨料部分。 初级研磨部分包括保留在第一有机粘合剂中的成形陶瓷研磨颗粒。 次级研磨部分结合到初级研磨部分，并且包括保留在第二有机粘合剂中的二次破碎的磨料颗粒。 主磨料部分包括比二次磨料部分更大体积百分比的成形陶瓷磨粒。 中心孔延伸穿过复合砂轮。
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公开(公告)号：US20090227186A1
公开(公告)日：2009-09-10
申请号：US11974192
申请日：2007-10-11
摘要： A polishing wheel including a lower polishing surface and defining a different color from a secondary portion of the polishing wheel, so as to indicate wear of the polishing surface. The polishing surface includes a plurality of main radial flutes extending from a central passage to an outer edge. A reduced profile for the main radial flutes is provided adjacent to the outer edge. A plurality of secondary radial flutes is provided extending from the outer edge, but not in communication with either the central passage or the main radial flutes.
摘要翻译： 一种抛光轮，包括下抛光表面并且限定与抛光轮的次级部分不同的颜色，以指示抛光表面的磨损。 抛光表面包括从中心通道延伸到外边缘的多个主径向槽纹。 主径向凹槽的缩小轮廓邻近外边缘设置。 多个次级径向槽纹被设置成从外边缘延伸，但不与中心通道或主径向槽纹连通。
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