POLISHING OR GRINDING PAD WITH MULTILAYER REINFORCEMENT

    公开(公告)号:US20190210192A1

    公开(公告)日:2019-07-11

    申请号:US15867908

    申请日:2018-01-11

    IPC分类号: B24D7/14 B24D13/14 B24D18/00

    摘要: A polishing or grinding pad with a multilayer reinforcement is provided. In one aspect, a floor polishing or grinding pad assembly employs a flexible pad, at least two reinforcement layers or rings with different characteristics, and multiple floor-contacting tools such as abrasive disks. In another aspect, a workpiece polishing or grinding pad assembly includes a flexible and rotatable pad, a polymeric reinforcement layer coupled to the pad and a metallic reinforcement layer to which are coupled abrasive tools. In yet another aspect, a floor-facing reinforcement is more flexible than a pad-facing reinforcement which is more rigid.

    TOOL FOR SANDING AND BUFFING AND METHOD OF USE

    公开(公告)号:US20190210179A1

    公开(公告)日:2019-07-11

    申请号:US16240169

    申请日:2019-01-04

    申请人: Michael Yager

    发明人: Michael Yager

    摘要: The present disclosure relates to a tool for sanding and buffing an irregularly shaped surface that includes a head having a rounded surface, a first abrasive material adapted for sanding or buffing, the first abrasive material attached to the rounded surface via an adhesive substance or other attaching means and at least partially covering the rounded surface, and a handle attached to the head. The tool may further include a second abrasive material attached to the rounded surface via the adhesive substance or other attaching means that at least partially covers a portion of the rounded surface not covered by the first abrasive material. If the first and second abrasive materials have varying properties such as their coarseness, the user may find each material to be especially efficient for use in separate sanding, buffing, or polishing processes.

    Customized polishing pads for CMP and methods of fabrication and use thereof

    公开(公告)号:US09278424B2

    公开(公告)日:2016-03-08

    申请号:US14489177

    申请日:2014-09-17

    CPC分类号: B24B37/26 B24D7/14 B24D11/04

    摘要: The present application relates to polishing pads for chemical mechanical planarization (CMP) of substrates, and methods of fabrication and use thereof. The pads described in this invention are customized to polishing specifications where specifications include (but not limited to) to the material being polished, chip design and architecture, chip density and pattern density, equipment platform and type of slurry used. These pads can be designed with a specialized polymeric nano-structure with a long or short range order which allows for molecular level tuning achieving superior themo-mechanical characteristics. More particularly, the pads can be designed and fabricated so that there is both uniform and nonuniform spatial distribution of chemical and physical properties within the pads. In addition, these pads can be designed to tune the coefficient of friction by surface engineering, through the addition of solid lubricants, and creating low shear integral pads having multiple layers of polymeric material which form an interface parallel to the polishing surface. The pads can also have controlled porosity, embedded abrasive, novel grooves on the polishing surface, for slurry transport, which are produced in situ, and a transparent region for endpoint detection.

    Grinding stone, manufacturing method of grinding stone, and manufacturing apparatus of grinding stone
    7.
    发明授权
    Grinding stone, manufacturing method of grinding stone, and manufacturing apparatus of grinding stone 有权
    研磨石,研磨石的制造方法和研磨石的制造装置

    公开(公告)号:US09233454B2

    公开(公告)日:2016-01-12

    申请号:US13257737

    申请日:2010-03-31

    摘要: A manufacturing apparatus, of a grinding stone which is manufactured by attaching abrasive grains respectively having polyhedral shapes in which mutually opposed surfaces are parallel to each other to a base member, is provided with: an abrasive grains classifying apparatus adapted to classify the abrasive grains based on sizes of the abrasive grains defined by face-to-face distances between the mutually opposed surfaces; and an attaching apparatus adapted to attach the abrasive grains classified by the abrasive grains classifying apparatus to the base member. The attaching apparatus is provided with: a template which is disposed above the base member to be movable with respect to the base member and formed with a guide hole through which the classified abrasive grains pass; a vibration generator connected to the template or the base member and adapted to apply a vibration to the abrasive grains passing through the template; and an electrolytic deposition bath adapted to electrolytic deposit the abrasive grains passing through the template.

    摘要翻译: 一种研磨石的制造装置,其特征在于,具有:通过将分别具有相互相对的面相互平行的多面体形状的磨粒附着于基材而制造的磨石,所述磨粒分选装置适于将所述磨粒基分类 在相互相对的表面之间由面对面距离限定的磨粒的尺寸; 以及适于将由磨粒分级装置分级的磨粒附着到基部构件的附接装置。 所述安装装置设置有模板,所述模板设置在所述基座部件的上方,能够相对于所述基座部件移动,并且形成有分割的磨粒通过的引导孔; 振动发生器,其连接到所述模板或所述基座构件,并且适于对通过所述模板的所述磨粒施加振动; 以及适于电解沉积通过模板的磨料颗粒的电解沉积浴。

    BLADE SHARPENING SYSTEM FOR A LOG SAW MACHINE
    8.
    发明申请
    BLADE SHARPENING SYSTEM FOR A LOG SAW MACHINE 审中-公开
    用于日志锯机的叶片摆放系统

    公开(公告)号:US20140331838A1

    公开(公告)日:2014-11-13

    申请号:US14274561

    申请日:2014-05-09

    申请人: LAWRENCE E. BAKER

    发明人: LAWRENCE E. BAKER

    摘要: A blade sharpening system for log saw machines is provided. An example multiphase grinding wheel has a grinding face with one or more abrasive concentric rings for sharpening the cutting blade of the log saw machine, and one or more padded concentric rings consisting of fiber padding. Sharpening with the multiphase grinding wheel improves cut quality, increases blade life, removes glues and varnishes from the cutting blade, reduces blade deformation, and hones the edge of the cutting blade. A pneumatic tensioning system uses air bladders to apply a dynamically cushioned pressure between the grinding wheels and the cutting blade. The fiber-padded grinding wheels and the air bladder tensioner provide improved sharpness of the cutting blade and longer life for the mechanical components. The padded grinding wheels decrease fire risk, and the tensioner can be operated remotely, decreasing human injuries common with conventional setup actions near the sharp cutting blade.

    摘要翻译: 提供了锯木机的刀片磨边系统。 示例性多相砂轮具有带有一个或多个研磨同心圆的研磨面,用于磨削原木锯床的切割刀片以及由纤维填料组成的一个或多个填充的同心圆。 用多相砂轮磨削可提高切割质量,增加刀片寿命,从切割刀片上清除胶水和清漆,减少刀片变形,并磨平刀片边缘。 气动张紧系统使用空气囊在砂轮和切割刀片之间施加动态缓冲的压力。 纤维填充砂轮和气囊张紧器提供了改进的切割刀片的清晰度和更长的机械部件的使用寿命。 填充的砂轮减少了火灾风险,张紧器可以远程操作,减少锋利的切割刀片附近的常规设置动作常见的人身伤害。

    ABRASIVE ARTICLE WITH PRECONDITIONING AND PERSISTENT INDICATORS
    9.
    发明申请
    ABRASIVE ARTICLE WITH PRECONDITIONING AND PERSISTENT INDICATORS 审中-公开
    具有预处理和随机指示的磨料文章

    公开(公告)号:US20110021114A1

    公开(公告)日:2011-01-27

    申请号:US12509707

    申请日:2009-07-27

    IPC分类号: B24B49/00 B24D7/14

    摘要: An abrasive article with a backing having a first major surface and a second major surface opposed to the first major surface. A three-dimensional abrasive layer attached to the first major surface, the three-dimensional abrasive layer comprising a plurality of shaped abrasive composites spaced apart by a plurality of land areas between the shaped abrasive composites, each of the shaped abrasive composites comprising a top surface and a sidewall, and the plurality of shaped abrasive composites and the plurality of land areas both formed from abrasive particles dispersed within an organic binder. A preconditioning indicator located on the top surface of at least some of the plurality of shaped abrasive composites and a persistent indicator located on at least some of the plurality of land areas.

    摘要翻译: 具有背衬的磨料制品,其具有与第一主表面相对的第一主表面和第二主表面。 连接到第一主表面的三维研磨层,三维研磨层包括多个成形的研磨复合材料,所述多个成形的磨料复合物由成形的磨料复合材料之间的多个区域间隔开,每个成形磨料复合材料包括顶表面 和侧壁,并且所述多个成形磨料复合物和所述多个磨土区域均由分散在有机粘合剂中的磨料颗粒形成。 位于多个成形磨料复合物中的至少一些的顶表面上的预处理指示器和位于多个区域中的至少一些区域上的持久指示器。

    Multi-phase polishing pad
    10.
    发明申请
    Multi-phase polishing pad 失效
    多相抛光垫

    公开(公告)号:US20050189235A1

    公开(公告)日:2005-09-01

    申请号:US11063653

    申请日:2005-02-22

    CPC分类号: B24B37/24 B24D7/14

    摘要: An article of manufacture, a method, and an apparatus for use in a chemical mechanical polishing system is provided. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a polishing surface, the polishing surface including a first polishing portion having a first polishing material of a first hardness for polishing a first portion of the substrate, and a second polishing portion having a second polishing material of a second hardness for polishing a second portion of the substrate. The article of manufacturer may be disposed on a rotatable, stationary, or linear platen for processing a substrate. In another aspect, a method is provided for processing a substrate, including providing a platen containing the polishing article disposed on the rotatable platen, delivering a polishing composition to the polishing article, and contacting a substrate on the polishing article.

    摘要翻译: 提供了一种用于化学机械抛光系统的制品,方法和设备。 在一个方面,提供了一种用于抛光包括具有抛光表面的抛光制品的基底的制品,所述抛光表面包括具有用于抛光所述基底的第一部分的第一硬度的第一抛光材料的第一抛光部分,以及 第二抛光部分,具有第二硬度的第二抛光材料,用于抛光衬底的第二部分。 制造商可以设置在可旋转,静止或直线的压板上,用于处理衬底。 在另一方面,提供了一种用于处理基板的方法,包括提供包含设置在可旋转压板上的抛光制品的压板,将抛光组合物输送到抛光制品,以及使抛光制品上的基板接触。