公开(公告)号：US07714514B1

公开(公告)日：2010-05-11

申请号：US11744246

申请日：2007-05-04

Applicant: James C. Rutherford

Inventor： James C. Rutherford

IPC: G09G3/10

CPC classification number: G09G3/3225 ,  B81B7/04 ,  B81B2201/014 ,  B81B2201/032 ,  B81B2207/053 ,  G09G3/2014 ,  G09G3/3266 ,  G09G3/3283 ,  G09G2300/08 ,  G09G2300/0809 ,  G09G2310/0256 ,  G09G2310/0259 ,  G09G2310/066 ,  G09G2330/04

Abstract: An active matrix organic LED display having a matrix of multiple light emitting pixels and electronic drive circuitry for selectively addressing the pixels, each pixel containing an organic LED. The electronic drive circuitry includes row scan electrodes and column data electrodes that interconnect the matrix of pixels. The circuitry also includes a MEMS switching device and a memory capacitor for each pixel, the MEMS switching device connecting the memory capacitor to a column data electrode during addressing of a pixel and connecting the memory capacitor to the organic LED of each pixel during light emission.

Abstract translation: 一种具有多个发光像素矩阵的有源矩阵有机LED显示器和用于选择性寻址像素的电子驱动电路，每个像素包含有机LED。 电子驱动电路包括互连像素矩阵的行扫描电极和列数据电极。 电路还包括用于每个像素的MEMS开关器件和存储器电容器，MEMS开关器件在寻址像素期间将存储器电容器连接到列数据电极，并且在发光期间将存储器电容器连接到每个像素的有机LED。

公开(公告)号：US20090206702A1

公开(公告)日：2009-08-20

申请号：US12369828

申请日：2009-02-12

Applicant: Takashi KAWAKUBO ,  Toshihiko Nagano ,  Michihiko Nishigaki

Inventor： Takashi KAWAKUBO ,  Toshihiko Nagano ,  Michihiko Nishigaki

IPC: H01L41/04

CPC classification number: B81B3/0008 ,  B81B2201/032 ,  H01G5/16 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094

Abstract: An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.

Abstract translation: 致动器包括：基板; 设置在所述基板的主表面上的固定电极; 设置在固定电极上并由结晶材料制成的第一电介质膜; 与主表面相对的可移动光束，并且与基板间隔开间隔地保持; 可动电极; 和第二电介质膜。 可动电极设置在与固定电极相对的可动光束的表面上，并且在固定电极和可动电极之间施加交替电压。 第二电介质膜设置在面向固定电极的可动光束的表面上，并且由结晶材料制成。

公开(公告)号：US20070205473A1

公开(公告)日：2007-09-06

申请号：US11276538

申请日：2006-03-03

Applicant: Dan Youngner ,  Lisa Lust

Inventor： Dan Youngner ,  Lisa Lust

IPC: H01L29/82

CPC classification number: B81B7/0087 ,  B81B2201/032 ,  F28F13/00 ,  F28F2270/00 ,  G05D23/024

Abstract: A thermal isolation structure for use in passively regulating the temperature of a microdevice is disclosed. The thermal isolation structure can include a substrate wafer and a cap wafer defining an interior cavity, and a number of double-ended or single-ended thermal bimorphs coupled to the substrate wafer and thermally actuatable between an initial position and a deformed position. The thermal bimorphs can be configured to deform and make contact with the cap wafer at different temperatures, creating various thermal shorts depending on the temperature of the substrate wafer. When attached to a microdevice such as a MEMS device, the thermal isolation structure can be configured to maintain the attached device at a constant temperature or within a particular temperature range.

Abstract translation: 公开了一种用于被动调节微型设备的温度的隔热结构。 热隔离结构可以包括限定内腔的衬底晶片和盖晶片，以及耦合到衬底晶片并可在初始位置和变形位置之间热激活的多个双端或单端热双压电晶片。 热双晶体可以被配置为在不同温度下变形并与盖晶片接触，根据基板晶片的温度产生各种热短路。 当附接到诸如MEMS器件的微设备时，热隔离结构可以被配置为将附接的器件保持在恒定温度或特定温度范围内。

公开(公告)号：US07249856B2

公开(公告)日：2007-07-31

申请号：US10868603

申请日：2004-06-14

Applicant: Michael J. Sinclair

Inventor： Michael J. Sinclair

IPC: G03B21/28 ,  G03B21/00 ,  G02F1/00 ,  G02B26/00

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

公开(公告)号：US20060197413A9

公开(公告)日：2006-09-07

申请号：US10896769

申请日：2004-07-22

Applicant: Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

Inventor： Yukihisa Takeuchi ,  Tsutomu Nanataki ,  Koji Kimura ,  Natsumi Shimogawa ,  Takayoshi Akao

IPC: H01L41/04

CPC classification number: B81B3/0018 ,  B81B2201/032 ,  G02B26/0841 ,  G02B26/0858 ,  H01L41/0474 ,  H01L41/0973 ,  H04R17/005 ,  H04R2201/003

Abstract: An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

Abstract translation: 致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。 多个间隔件设置在第一板构件和基板之间，形成m个单元。 每个致动器具有形成在基板上的空腔，振动部分和固定部分。 第一板构件的刚性大于致动器的振动部的刚性。

公开(公告)号：US20060138573A1

公开(公告)日：2006-06-29

申请号：US11024192

申请日：2004-12-28

Applicant: Joseph McAlexander

Inventor： Joseph McAlexander

IPC: H01L21/00 ,  H01L29/84 ,  H01L23/48

CPC classification number: H01H35/14 ,  B81B2201/0235 ,  B81B2201/032 ,  B81C1/0015 ,  B81C2201/019 ,  G01P15/125 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.

Abstract translation: 加速度传感器包括半导体衬底，形成在衬底上的第一层，第一层内的第一孔，以及在第一端处耦合到衬底并在其长度的一部分上悬浮在第一层上方的梁。 梁包括联接到其下表面并悬挂在第一孔内的第一凸起，以及联接到梁的第二端的上表面的第二凸台。 第二层位于梁上的第一层上，并且包括第二孔，第二凸起由梁悬挂在该第二孔内。 接触表面定位在孔内，使得沿着所选择的轴线在任一方向超过选定阈值的基底的加速度将导致梁相对于加速方向弯曲并且通过一个凸起与其中一个接触表面 。

公开(公告)号：US07049806B2

公开(公告)日：2006-05-23

申请号：US10950886

申请日：2004-09-27

Applicant: Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

Inventor： Patrick C. Herbert ,  Jeffrey R. Annis ,  Jun J. Yao ,  Winfred L. Morris ,  Henric Larsson ,  Richard D. Harris ,  Robert J. Kretschmann

IPC: G01R33/02

CPC classification number: H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

Abstract: In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

Abstract translation: 在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。 或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

公开(公告)号：US20050046541A1

公开(公告)日：2005-03-03

申请号：US10949800

申请日：2004-09-24

Applicant: Yves Fouillet

Inventor： Yves Fouillet

IPC: H01H1/00 ,  G02F1/1339

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2201/032 ,  H01G5/16 ,  H01H2001/0042 ,  H01H2037/008 ,  Y10T29/42 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49128 ,  Y10T29/49155

Abstract: The invention involves a microsystem which can be used in particular for making microswitches or microvalves, composed of a substrate (50) and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect thermal sensor. The sensor includes a deformable element (51) attached, at opposite ends, to the substrate (50) so that there is a natural deflection without stress with respect to a surface of the substrate opposite it, this natural deflection determining the first state of functioning, the second state of functioning being caused by the thermal sensor which, under the influence of temperature variation, induces a deformation of the deformable element (51) which diminishes the deflection by subjecting it to a compressive force which shifts it in a direction opposite to its natural deflection by buckling.

Abstract translation: 本发明涉及一种微系统，其特别可用于制造由基板（50）组成的微型开关或微型阀，并用于通过双金属效应热传感器在第一功能状态和第二功能状态之间移动。 所述传感器包括可变形元件（51），所述可变形元件（51）在相对端附接到所述基板（50），使得相对于与其相对的所述基板的表面具有无应力的自然变形，所述自然偏转确定所述第一功能状态 由热传感器引起的第二功能状态是在温度变化的影响下引起可变形元件（51）的变形，该变形元件（51）的变形通过使其沿与 其屈曲的自然偏转。

公开(公告)号：US20040118481A1

公开(公告)日：2004-06-24

申请号：US10727191

申请日：2003-12-03

Applicant: Xerox Corporation.

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01F001/03

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

公开(公告)号：US20040075881A1

公开(公告)日：2004-04-22

申请号：US10464663

申请日：2003-06-19

Inventor： Hiroichi Ishikawa ,  Kanji Yokomizo

IPC: G02B026/08

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/058

Abstract: A thermally actuated micro mirror includes a mirror surface, and a support structure section having a multilayer structure to support the mirror surface. The support structure section generates heat by the application of electricity thereto, and is deflected by a difference in coefficient of thermal expansion in the multilayer structure, thereby tilting the mirror surface at an arbitrary angle. The support structure section is disposed between the mirror surface and an electrode section for applying electricity. A longitudinal axis of the support structure section is perpendicular to the center axis of the mirror surface, and the longitudinal center of the support structure section is substantially placed on the center axis of the mirror surface. Therefore, the turning axis of the mirror surface is not displaced, and the light reflecting position does not move on the mirror surface.

Abstract translation: 热致动微反射镜包括镜面，以及支撑结构部分，其具有支撑镜面的多层结构。 支撑结构部分通过施加电力而产生热量，并且由于多层结构中的热膨胀系数的差异而偏转，从而以任意的角度倾斜镜面。 支撑结构部分设置在镜面和用于施加电力的电极部分之间。 支撑结构部分的纵向轴线垂直于镜面的中心轴线，并且支撑结构部分的纵向中心基本上位于镜面的中心轴线上。 因此，镜面的旋转轴线不会发生位移，反射镜位置不会在镜面上移动。