Invention Application
- Patent Title: BI-DIRECTIONAL RELEASED-BEAM SENSOR
- Patent Title (中): 双向释放光束传感器
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Application No.: US11024192Application Date: 2004-12-28
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Publication No.: US20060138573A1Publication Date: 2006-06-29
- Inventor: Joseph McAlexander
- Applicant: Joseph McAlexander
- Applicant Address: US TX Carrollton
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Carrollton
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/84 ; H01L23/48

Abstract:
An acceleration sensor includes a semiconductor substrate, a first layer formed on the substrate, a first aperture within the first layer, and a beam coupled at a first end to the substrate and suspended above the first layer for a portion of the length thereof. The beam includes a first boss coupled to a lower surface thereof and suspended within the first aperture, and a second boss coupled to an upper surface of the second end of the beam. A second layer is positioned on the first layer over the beam and includes a second aperture within which the second boss is suspended by the beam. Contact surfaces are positioned within the apertures such that acceleration of the substrate exceeding a selected threshold in either direction along a selected axis will cause the beam to flex counter to the direction of acceleration and make contact through one of the bosses with one of the contact surfaces.
Public/Granted literature
- US07179674B2 Bi-directional released-beam sensor Public/Granted day:2007-02-20
Information query
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