公开(公告)号：US20030210115A1

公开(公告)日：2003-11-13

申请号：US10063762

申请日：2002-05-10

Applicant: XEROX CORPORATION

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01H051/22

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.

Abstract translation: 基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。 系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。

公开(公告)号：US20040118481A1

公开(公告)日：2004-06-24

申请号：US10727191

申请日：2003-12-03

Applicant: Xerox Corporation.

Inventor： Joel A. Kubby ,  Fuqian Yang ,  Jun Ma ,  Kristine A. German ,  Peter M. Gulvin

IPC: H01F001/03

CPC classification number: G02B6/3508 ,  B81B3/0054 ,  B81B2201/032 ,  G02B6/3546 ,  G02B6/3568 ,  G02B6/3582 ,  G02B6/3596 ,  H01H2001/0042

Abstract: A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.