公开(公告)号：US11837468B2

公开(公告)日：2023-12-05

申请号：US17469279

申请日：2021-09-08

Applicant: Samsung Display Co., LTD. ,  Industry-Academic Cooperation Foundation, Yonsei University

Inventor： Mann Ho Cho ,  Kwang Sik Jeong ,  Hyeon Sik Kim ,  Hyun Eok Shin ,  Byung Soo So ,  Ju Hyun Lee

IPC: H01L21/02

CPC classification number: H01L21/02491 ,  H01L21/0254 ,  H01L21/02422 ,  H01L21/02502

Abstract: A method of manufacturing a stacked structure includes forming a first metal buffer layer including crystal grains on a base substrate, forming a second metal buffer material layer on the first metal buffer layer, and crystallizing the second metal buffer material layer to form a second metal buffer layer, wherein the second metal buffer material layer includes crystal grains, and a density of the crystal grains of the second metal buffer material layer is lower than a density of the crystal grains of the first metal buffer layer.

公开(公告)号：US11407061B2

公开(公告)日：2022-08-09

申请号：US16698842

申请日：2019-11-27

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Sung Lee ,  Dong-min Lee ,  Jongoh Seo ,  Byung Soo So

IPC: B23K26/04 ,  B23K26/0622 ,  H01L21/02 ,  H01L21/20 ,  B23K101/40

Abstract: A laser crystallizing apparatus may include a laser light source, an optical system, and an optical module. The laser light source may generate a laser beam. The optical system may convert the laser beam into a line laser beam. The optical module may disperse energy of the line laser beam in a first direction for generating a dispersed line laser beam. The first direction may be perpendicular to a lengthwise direction of the optical module.

公开(公告)号：US11335561B2

公开(公告)日：2022-05-17

申请号：US16907029

申请日：2020-06-19

Applicant: Samsung Display Co., Ltd.

Inventor： Hiroshi Okumura ,  Jong Jun Baek ,  Byung Soo So

IPC: H01L21/20 ,  H01L21/268 ,  H01L21/02 ,  B23K26/06

Abstract: A laser irradiation apparatus includes: a laser module configured to emit a laser beam; a first optical system configured to scan the laser beam emitted from the laser module along a first direction; an optical element configured to refract the laser beam emitted from the first optical system; and a substrate supporter on which a base substrate to which the laser beam refracted through the optical element reaches is arranged.

公开(公告)号：US11282872B2

公开(公告)日：2022-03-22

申请号：US16808157

申请日：2020-03-03

Applicant: Samsung Display Co., Ltd.

Inventor： Dong-Min Lee ,  Ji-Hwan Kim ,  Jongoh Seo ,  Byung Soo So ,  Dong-Sung Lee ,  Jonghoon Choi

IPC: G02B27/14 ,  H01L27/12 ,  H01L21/02 ,  B23K26/53 ,  H01S3/00 ,  G02B27/12

Abstract: A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.

公开(公告)号：US20200161389A1

公开(公告)日：2020-05-21

申请号：US16679656

申请日：2019-11-11

Applicant: Samsung Display Co., LTD.

Inventor： Dong-Sung Lee ,  Seo Jong Oh ,  Byung Soo So ,  Dong-min Lee

IPC: H01L27/32 ,  H01L21/02 ,  H01L29/786 ,  H01L29/66

Abstract: A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.

公开(公告)号：US10446638B2

公开(公告)日：2019-10-15

申请号：US16041968

申请日：2018-07-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong Oh Seo ,  Byung Soo So ,  Dong-Min Lee ,  Dong-Sung Lee

IPC: H01L27/32 ,  H01L51/56 ,  H01L51/52 ,  G09G3/3266 ,  G09G3/3291

Abstract: An organic light emitting diode display includes a substrate, a scan line on the substrate to transfer a scan signal, a data line on the substrate to transfer a data signal, a switching transistor connected with the scan line and the data line, a driving transistor connected with the switching transistor, and an organic light emitting diode electrically connected to the driving transistor. The driving transistor may include a first semiconductor layer, the switching transistor may include a second semiconductor layer, and the first semiconductor layer may have a surface roughness that is greater than that of the second semiconductor layer.

公开(公告)号：US20170358449A1

公开(公告)日：2017-12-14

申请号：US15466330

申请日：2017-03-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byung Soo So ,  Mee Jae Kang ,  Ho Seok Lee ,  Jae Gyun Lim ,  Sang Ho Jeon ,  Yeon Hee Jeon

IPC: H01L21/02 ,  H01L21/67 ,  H01S3/03 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/00 ,  H01L27/12 ,  H01S3/038

CPC classification number: H01L21/02675 ,  H01L21/67115 ,  H01L27/1274 ,  H01S3/005 ,  H01S3/03 ,  H01S3/0346 ,  H01S3/038 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

Abstract: A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.