FET based humidity sensor with barrier layer protecting gate dielectric

    公开(公告)号:US10585058B2

    公开(公告)日:2020-03-10

    申请号:US15594184

    申请日:2017-05-12

    Abstract: An illustrative humidity sensor may include a substrate having a source and a drain, wherein the drain is laterally spaced from the source. A gate stack is provided in the space between the source and the drain to form a transistor. The gate stack may include a gate insulator situated on the substrate to form a gate insulator/substrate interface. The gate stack may further include a barrier layer above the gate insulator. The barrier layer may be configured to act as a barrier to mobile charge, humidity and/or other contaminates, and may help prevent such contaminates from reaching the gate insulator/substrate interface. The gate stack may further include a humidity sensing layer above the barrier layer. The humidity sensing layer, when exposed to humidity, may modulate the conduction channel in the substrate under the gate insulator and between the source and the drain. In some cases, the humidity level may be determined by monitoring the current flowing between the source and drain.

    RELATIVE HUMIDITY SENSOR AND METHOD
    27.
    发明申请

    公开(公告)号:US20170248537A1

    公开(公告)日:2017-08-31

    申请号:US15423349

    申请日:2017-02-02

    CPC classification number: G01N27/225 G01N27/226

    Abstract: A relative humidity sensor is disclosed. The relative humidity sensor includes a first electrode and a second electrode disposed above a dielectric substrate. A humidity sensitive layer is disposed above at least one of the first electrode and the second electrode, where the humidity sensitive layer comprises a curable composition comprising cellulose acetate butyrate and a hydrophobic filler. In some embodiments, a dust protection layer is disposed above the humidity sensitive layer.

Patent Agency Ranking