公开(公告)号：US20220091182A1

公开(公告)日：2022-03-24

申请号：US17417190

申请日：2019-10-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Hirotaka NONAKA ,  Hiroyuki MATSUURA ,  Hirotoshi TERADA

IPC: G01R31/28 ,  G01R31/26 ,  H01L23/473

Abstract: Provided is a cooling unit to be used in an inspection of a semiconductor device. The cooling unit includes a jacket for dissipating heat of the semiconductor device. The jacket is provided with a light passing portion for passing light from the semiconductor device. The jacket has a space defining surface that faces the semiconductor device and defines a space between the space defining surface and the semiconductor device in a state where the light passing portion faces the semiconductor device. The jacket is provided with a supply flow path through which a fluid to be supplied to the space flows.

公开(公告)号：US20200241054A1

公开(公告)日：2020-07-30

申请号：US16841782

申请日：2020-04-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akihiro OTAKA ,  Tomonori NAKAMURA

IPC: G01R19/14 ,  G01R31/311 ,  G01N27/72 ,  G01N21/41 ,  G01R31/26

Abstract: An image generating device is an apparatus for acquiring an image which shows a direction of an electric current flowing through a semiconductor device. The image generating device comprises a signal application unit configured to apply a stimulation signal to the semiconductor device, a magnetic detection unit configured to output a detection signal based on a magnetism generated by an application of the stimulation signal, and an image generation unit configured to generate phase image data comprising a phase component which indicates a phase difference based on the phase difference between the detection signal and a reference signal which is generated based on the stimulation signal and generate an electric current direction image which shows the direction of the electric current based on the phase image data.

公开(公告)号：US20190101492A1

公开(公告)日：2019-04-04

申请号：US16083044

申请日：2017-03-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA

IPC: G01N21/55 ,  G01B11/26

Abstract: The present invention relates to a measuring device having a structure for adjusting inclination of an observation surface of a sample with respect to a reference surface which is orthogonal to an optical axis of an objective lens, and the like. The measuring device includes a scanner, arranged on a propagation path of illumination light traveling from a light source toward the sample, configured to change an emission angle of the illumination light, and inclination information of the sample is obtained by associating a signal value of a detection signal for reflected light from the sample and the emission angle of the illumination light, while changing the emission angle of the illumination light by the scanner.

公开(公告)号：US20180348165A1

公开(公告)日：2018-12-06

申请号：US15780293

申请日：2016-11-15

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA

IPC: G01N27/72 ,  G01R31/302 ,  G02B27/28 ,  G01R33/032

CPC classification number: G01N27/72 ,  G01R31/302 ,  G01R31/311 ,  G01R33/032 ,  G01R33/0322 ,  G02B21/0016 ,  G02B21/0092 ,  G02B21/361 ,  G02B26/0816 ,  G02B27/28

Abstract: An inspection apparatus comprises a light output unit configured to output first light having a first wavelength and second light having a second wavelength, a magneto-optical crystal arranged so that a reflection film faces a measurement target, a light detection unit configured to detect the first light and the second light, and a light guide optical system configured to guide the first light and the second light toward the magneto-optical crystal and the measurement target, and guide the first light reflected by the magneto-optical crystal and the second light reflected by the measurement target toward the light detection unit. The light guide optical system comprises an optical path switching element configured to perform switching between optical paths of a plurality of optical elements so that the first light and the second light are selectively incident on the light detection unit.

公开(公告)号：US20180156860A1

公开(公告)日：2018-06-07

申请号：US15576389

申请日：2016-05-10

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/265 ,  G01R31/26 ,  G01R31/311 ,  H01S5/50

CPC classification number: G01R31/2656 ,  G01R31/2601 ,  G01R31/302 ,  G01R31/311 ,  H01S5/50 ,  H01S5/5027 ,  H01S5/5045

Abstract: A light source device includes a light source that generates incoherent light, and an optical amplifier having gain characteristics indicating a gain at each wavelength, which receives the incoherent light output by the light source as input light, and outputs amplified light obtained by amplifying the input light, and a central wavelength of an intensity distribution indicating an intensity at each wavelength of the input light is a wavelength longer than a central wavelength of the gain characteristics indicating a gain at each wavelength of the optical amplifier.

公开(公告)号：US20180106680A1

公开(公告)日：2018-04-19

申请号：US15568869

申请日：2016-05-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA

IPC: G01J5/06 ,  G01J5/52 ,  G01J5/48 ,  G01J5/46 ,  G01K15/00

CPC classification number: G01J5/06 ,  G01J5/0003 ,  G01J5/0096 ,  G01J5/061 ,  G01J5/0831 ,  G01J5/46 ,  G01J5/48 ,  G01J5/522 ,  G01J5/524 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/065 ,  G01K15/002

Abstract: A shield plate is a shield plate related to non-contact measurement of temperature of a semiconductor apparatus, and includes a base of which temperature is adjustable, in which the amount of thermal radiation of a blackbody surface located on one side of the base is larger than the amount of thermal radiation of a reflective surface located on a side opposite to the blackbody surface, and the blackbody surface is a blackbody surface that emits infrared rays.

公开(公告)号：US20180031614A1

公开(公告)日：2018-02-01

申请号：US15548860

申请日：2016-02-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA

IPC: G01R15/24 ,  G01R31/265 ,  G01R31/311

Abstract: An inspection apparatus includes a tester unit that applies a stimulus signal to a semiconductor apparatus, an MO crystal arranged to face a semiconductor apparatus, a light source that outputs light, an optical scanner that irradiates the MO crystal with light output from light source, a light detector that detects light reflected from the MO crystal arranged to face the semiconductor apparatus D and outputs a detection signal, and a computer that generate phase image data based on a phase difference between a reference signal generated based on a stimulus signal and the detection signal, the phase image data including a phase component indicating the phase difference, and generates an image indicating a path of a current from the phase image data.

公开(公告)号：US20170123003A1

公开(公告)日：2017-05-04

申请号：US15400064

申请日：2017-01-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA

IPC: G01R31/311 ,  G01R31/26

CPC classification number: G01R31/311 ,  G01N21/95607 ,  G01R1/071 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2851 ,  G01R31/308

Abstract: A semiconductor device inspection system (1) includes a laser beam source (2), for emitting light, an optical sensor (12) for detecting the light reflected by the semiconductor device (10) from the light and outputting a detection signal, a frequency band setting unit (16) for setting a measurement frequency band and a reference frequency band with respect to the detection signal, a spectrum analyzer (15) for generating a measurement signal and a reference signal from the detection signals in the measurement frequency band and the reference frequency band, and a signal acquisition unit (17) for calculating a difference between the measurement signal and the reference signal to acquire an analysis signal. The frequency band setting unit (16) sets the reference frequency band to a frequency domain in which a level of the detection signal is lower than a level obtained by adding 3 decibels to a white noise level serving as a reference.

公开(公告)号：US20150130474A1

公开(公告)日：2015-05-14

申请号：US14535709

申请日：2014-11-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA ,  Mitsunori NISHIZAWA

IPC: G01R23/17 ,  G01R31/311 ,  G01N21/95

CPC classification number: G01R23/17 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/08 ,  G01R31/311

Abstract: A semiconductor device testing apparatus 1A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal. acquired by the spectrum analyzer 14.

Abstract translation: 半导体器件测试装置1A包括产生操作脉冲信号的测试器单元16，作为对操作脉冲信号的响应输出检测信号的光学传感器10，产生包含多个谐波的参考信号的脉冲发生器17 用于与操作脉冲信号同步的操作脉冲信号;频谱分析器13，其接收检测信号，并以检测频率获取检测信号的相位和幅度;频谱分析器14，其接收参考信号并获取相位 以及分析控制单元18，其基于由频谱分析器13获取的检测信号的相位和振幅以及参考信号的相位来获取检测信号的时间波形。 由频谱分析仪14采集。

公开(公告)号：US20250155374A1

公开(公告)日：2025-05-15

申请号：US19021878

申请日：2025-01-15

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA

IPC: G01N21/64 ,  G06T7/00

Abstract: An inspection apparatus is an inspection apparatus for inspecting a sample in which a plurality of light-emitting elements including a first light-emitting element and a second light-emitting element arranged around the first light-emitting element is formed, the inspection apparatus including an excitation light source that generates excitation light to irradiate the sample, a camera that images fluorescence from the sample, and a determining unit that calculates a relative luminance of fluorescence from the first light-emitting element based on the fluorescence from the first light-emitting element and fluorescence from the second light-emitting element imaged by the camera, and compares a calculated value based on an absolute luminance and the relative luminance of the fluorescence from the first light-emitting element with a predetermined threshold value, thereby determining a quality of the first light-emitting element.