公开(公告)号：US20150153408A1

公开(公告)日：2015-06-04

申请号：US14552926

申请日：2014-11-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akihiro OTAKA ,  Mitsunori NISHIZAWA ,  Nobuyuki HIRAI ,  Tomonori NAKAMURA

IPC: G01R31/311

CPC classification number: G01R31/311

Abstract: A semiconductor device measurement apparatus 1A includes a tester 2 that generates an operational pulse signal to be input to a semiconductor device 3, a light source 5 that generates light, a light branch optical system 6 that irradiates the semiconductor device with the light, a light detector 7 that detects reflected light obtained by the semiconductor device 3 reflecting the light, and outputs a detection signal, an analog signal amplifier 8 that amplifies the detection signal and outputs an amplified signal, and an analysis apparatus 10 that analyzes an operation of the semiconductor device 3 based on the amplified signal and a predetermined correction value, wherein the predetermined correction value is obtained based on a signal obtained by the analog signal amplifier 8 amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational pulse signal.

Abstract translation: 半导体器件测量装置1A包括产生要输入到半导体器件3的操作脉冲信号的测试器2，产生光的光源5，用光照射半导体器件的光分支光学系统6，光 检测器7，其检测由反射光的半导体器件3获得的反射光，并输出检测信号;放大检测信号并输出​​放大信号的模拟信号放大器8;以及分析半导体的运算的分析装置10 基于放大信号和预定校正值的装置3，其中基于由模拟信号放大器8获得的信号来获得预定校正值，该信号放大对应于操作脉冲信号的基频的谐波的信号。

公开(公告)号：US20170285579A1

公开(公告)日：2017-10-05

申请号：US15508195

申请日：2015-07-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Ken KITAZAWA ,  Mitsunori NISHIZAWA ,  Takashi ITO

IPC: G04F10/00 ,  G01N15/14 ,  G01N21/64 ,  H03L7/081

CPC classification number: G04F10/005 ,  G01N15/1431 ,  G01N21/64 ,  G01N21/6408 ,  G04F10/06 ,  H03L7/0818

Abstract: A time measurement device for calculating a time from an input of a first trigger signal to an input of a second trigger signal as a measured time includes a start gate configured to generate a start signal, a stop gate configured to generate a stop signal, a TDC circuit configured to generate a digital code corresponding to the time from an input of a start signal to an input of a stop signal, a delay circuit configured to delay an input of at least one of the start signal and the stop signal to the TDC circuit by a predetermined delay time, and a control unit configured to calculate a measured time on the basis of a plurality of digital codes generated by the TDC circuit, wherein the time delay unit selects at least two delay times.

公开(公告)号：US20150377959A1

公开(公告)日：2015-12-31

申请号：US14764246

申请日：2014-01-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/311

CPC classification number: G01R31/2656 ,  G01N21/9501 ,  G01N2201/12 ,  G01R23/16 ,  G01R31/311 ,  H01L22/12

Abstract: A semiconductor device inspection system includes a laser beam source, a tester, an optical sensor, a first spectrum analyzer for measuring first phase information serving as phase information of the detection signal, a reference signal generating unit for generating a reference signal of a predetermined frequency, a second spectrum analyzer for measuring second phase information serving as phase information of a reference signal, and an analysis unit for deriving phase information of the detection signal at the predetermined frequency, wherein the first spectrum analyzer measures the first phase information with respect to the reference frequency, the second spectrum analyzer measures the second phase information with respect to the reference frequency, and the frequency of the base signal of the first spectrum analyzer and the phase thereof are synchronized with the frequency of the base signal of the second spectrum analyzer and the phase thereof.

Abstract translation: 半导体器件检查系统包括激光束源，测试器，光学传感器，用于测量用作检测信号的相位信息的第一相位信息的第一频谱分析仪，用于产生预定频率的参考信号的参考信号产生单元 用于测量用作参考信号的相位信息的第二相位信息的第二频谱分析器和用于以预定频率导出检测信号的相位信息的分析单元，其中第一频谱分析仪测量关于第一相位信息的第一相位信息， 参考频率，第二频谱分析仪测量相对于参考频率的第二相位信息，并且第一频谱分析仪的基本信号的频率及其相位与第二频谱分析仪的基本信号的频率同步， 其相位。

公开(公告)号：US20170176521A1

公开(公告)日：2017-06-22

申请号：US15447525

申请日：2017-03-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/311 ,  G01R31/265 ,  G01N21/95 ,  G01R23/16

CPC classification number: G01R31/2656 ,  G01N21/9501 ,  G01N2201/12 ,  G01R23/16 ,  G01R31/311 ,  H01L22/12

Abstract: A semiconductor device inspection system includes a laser light source for generating light to be irradiated a semiconductor device, an optical sensor for detecting the light reflected by the semiconductor device and outputting the detection signal, a tester unit for applying a operating signal to the semiconductor device, an electricity measurement unit to which the detection signal is input, an electricity measurement unit to which the detection signal and the operating signal are selectively input, and a switching unit having a detection signal terminal and a operating signal terminal. The switching unit inputs the detection signal to the electricity measurement unit by connecting a connection section to the detection signal terminal and inputs the operating signal by connecting the connection section to the operating signal terminal.

公开(公告)号：US20150309115A1

公开(公告)日：2015-10-29

申请号：US14692019

申请日：2015-04-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/308 ,  G01R19/00

CPC classification number: G01R31/311 ,  G01R31/308

Abstract: An image generation apparatus is an image generation apparatus that generates an image based on measurement light from the semiconductor device, and the image generation apparatus includes an optical sensor that detects the measurement light, an optical sensor power supply that applies a constant voltage to the optical sensor to supply a current to the optical sensor, a current detector that generates a pattern signal according to magnitude of the current supplied to the optical sensor by the optical sensor power supply, and a control device that generates a pattern image based on the pattern signal.

Abstract translation: 图像生成装置是根据来自半导体装置的测定光生成图像的图像生成装置，图像生成装置具备检测测定光的光学传感器，向光学系统施加恒定电压的光学传感器电源 传感器，用于向光学传感器提供电流;电流检测器，其根据由光学传感器电源提供给光学传感器的电流的幅度产生图案信号;以及控制装置，其基于图案信号产生图案图像 。

公开(公告)号：US20180156860A1

公开(公告)日：2018-06-07

申请号：US15576389

申请日：2016-05-10

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/265 ,  G01R31/26 ,  G01R31/311 ,  H01S5/50

CPC classification number: G01R31/2656 ,  G01R31/2601 ,  G01R31/302 ,  G01R31/311 ,  H01S5/50 ,  H01S5/5027 ,  H01S5/5045

Abstract: A light source device includes a light source that generates incoherent light, and an optical amplifier having gain characteristics indicating a gain at each wavelength, which receives the incoherent light output by the light source as input light, and outputs amplified light obtained by amplifying the input light, and a central wavelength of an intensity distribution indicating an intensity at each wavelength of the input light is a wavelength longer than a central wavelength of the gain characteristics indicating a gain at each wavelength of the optical amplifier.

公开(公告)号：US20150130474A1

公开(公告)日：2015-05-14

申请号：US14535709

申请日：2014-11-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA ,  Mitsunori NISHIZAWA

IPC: G01R23/17 ,  G01R31/311 ,  G01N21/95

CPC classification number: G01R23/17 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/08 ,  G01R31/311

Abstract: A semiconductor device testing apparatus 1A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal. acquired by the spectrum analyzer 14.

Abstract translation: 半导体器件测试装置1A包括产生操作脉冲信号的测试器单元16，作为对操作脉冲信号的响应输出检测信号的光学传感器10，产生包含多个谐波的参考信号的脉冲发生器17 用于与操作脉冲信号同步的操作脉冲信号;频谱分析器13，其接收检测信号，并以检测频率获取检测信号的相位和幅度;频谱分析器14，其接收参考信号并获取相位 以及分析控制单元18，其基于由频谱分析器13获取的检测信号的相位和振幅以及参考信号的相位来获取检测信号的时间波形。 由频谱分析仪14采集。

公开(公告)号：US20240012047A1

公开(公告)日：2024-01-11

申请号：US18020273

申请日：2021-06-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihito UCHIKADO ,  Mitsunori NISHIZAWA

IPC: G01R31/311 ,  G01R31/317

CPC classification number: G01R31/311 ,  G01R31/31709

Abstract: An inspection apparatus includes a light source that emits light, an optical amplifier that amplifies input light and outputs the amplified light, an optical system (an objective lens, an imaging optical system, and a scanning optical system) that irradiates a semiconductor device with the light from the light source and guides light from the semiconductor device to the optical amplifier, and a photodetector that detects the light output from the optical amplifier, and the optical amplifier amplifies the input light so that saturation does not occur.

公开(公告)号：US20160334459A1

公开(公告)日：2016-11-17

申请号：US15219946

申请日：2016-07-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/265

CPC classification number: G01R31/2656 ,  G01N21/9501 ,  G01N2201/12 ,  G01R23/16 ,  G01R31/311 ,  H01L22/12

Abstract: A semiconductor device inspection system includes a laser beam source, a tester, an optical sensor, a first spectrum analyzer for measuring first phase information serving as phase information of the detection signal, a reference signal generating unit for generating a reference signal of a predetermined frequency, a second spectrum analyzer for measuring second phase information serving as phase information of a reference signal, and an analysis unit for deriving phase information of the detection signal at the predetermined frequency, wherein the first spectrum analyzer measures the first phase information with respect to the reference frequency, the second spectrum analyzer measures the second phase information with respect to the reference frequency, and the frequency of the base signal of the first spectrum analyzer and the phase thereof are synchronized with the frequency of the base signal of the second spectrum analyzer and the phase thereof.

公开(公告)号：US20150369755A1

公开(公告)日：2015-12-24

申请号：US14764327

申请日：2014-01-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01N21/95 ,  G01R23/16

CPC classification number: G01R31/2656 ,  G01N21/9501 ,  G01N2201/12 ,  G01R23/16 ,  G01R31/311 ,  H01L22/12

Abstract: A semiconductor device inspection system includes a laser light source for generating light to be irradiated a semiconductor device, an optical sensor for detecting the light reflected by the semiconductor device and outputting the detection signal, a tester unit for applying a operating signal to the semiconductor device, an electricity measurement unit to which the detection signal is input, an electricity measurement unit to which the detection signal and the operating signal are selectively input, and a switching unit having a detection signal terminal and a operating signal terminal. The switching unit inputs the detection signal to the electricity measurement unit by connecting a connection section to the detection signal terminal and inputs the operating signal by connecting the connection section to the operating signal terminal.

Abstract translation: 半导体器件检查系统包括用于产生要照射半导体器件的光的激光源，用于检测由半导体器件反射的光并输出检测信号的光学传感器，用于向半导体器件施加操作信号的测试器单元 ，输入检测信号的电力测量单元，选择性地输入检测信号和操作信号的电力测量单元，以及具有检测信号端子和操作信号端子的开关单元。 开关单元通过将连接部连接到检测信号端子将检测信号输入到电测量单元，并通过将连接部连接到操作信号端来输入操作信号。