公开(公告)号：US20150153408A1

公开(公告)日：2015-06-04

申请号：US14552926

申请日：2014-11-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akihiro OTAKA ,  Mitsunori NISHIZAWA ,  Nobuyuki HIRAI ,  Tomonori NAKAMURA

IPC: G01R31/311

CPC classification number: G01R31/311

Abstract: A semiconductor device measurement apparatus 1A includes a tester 2 that generates an operational pulse signal to be input to a semiconductor device 3, a light source 5 that generates light, a light branch optical system 6 that irradiates the semiconductor device with the light, a light detector 7 that detects reflected light obtained by the semiconductor device 3 reflecting the light, and outputs a detection signal, an analog signal amplifier 8 that amplifies the detection signal and outputs an amplified signal, and an analysis apparatus 10 that analyzes an operation of the semiconductor device 3 based on the amplified signal and a predetermined correction value, wherein the predetermined correction value is obtained based on a signal obtained by the analog signal amplifier 8 amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational pulse signal.

Abstract translation: 半导体器件测量装置1A包括产生要输入到半导体器件3的操作脉冲信号的测试器2，产生光的光源5，用光照射半导体器件的光分支光学系统6，光 检测器7，其检测由反射光的半导体器件3获得的反射光，并输出检测信号;放大检测信号并输出​​放大信号的模拟信号放大器8;以及分析半导体的运算的分析装置10 基于放大信号和预定校正值的装置3，其中基于由模拟信号放大器8获得的信号来获得预定校正值，该信号放大对应于操作脉冲信号的基频的谐波的信号。

公开(公告)号：US20220198644A1

公开(公告)日：2022-06-23

申请号：US17441711

申请日：2020-01-29

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Kenichiro IKEMURA ,  Akihiro OTAKA

IPC: G06T7/00 ,  G06T7/90 ,  H04N5/235 ,  G06T7/66 ,  G01N21/64

Abstract: An inspection apparatus is an inspection apparatus includes an excitation light source that generates excitation light to irradiate the object, a dichroic mirror that separates fluorescence from the sample by transmitting or reflecting the fluorescence according to a wavelength, a camera that images fluorescence reflected by the dichroic mirror, a camera that images fluorescence transmitted through the dichroic mirror, and a control apparatus that derives color irregularity information of a light-emitting element based on a first fluorescence image acquired by the camera and a second fluorescence image acquired by the camera, and an edge shift width corresponding to a width of a wavelength band in which transmittance and reflectance change according to a change in wavelength in the dichroic mirror is wider than a full width at half maximum of a normal fluorescence spectrum of the light-emitting element.

公开(公告)号：US20190212252A1

公开(公告)日：2019-07-11

申请号：US16336238

申请日：2017-07-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA

IPC: G01N21/17 ,  G01R31/311 ,  H01L21/66

CPC classification number: G01N21/1717 ,  G01N21/00 ,  G01N21/17 ,  G01R31/302 ,  G01R31/311 ,  H01L22/10

Abstract: A semiconductor device inspection method of inspecting a semiconductor device which is an inspection object includes: a step of inputting a stimulation signal to the semiconductor device; a step of acquiring a detection signal based on a reaction of the semiconductor device to which the stimulation signal has been input; a step of generating a first in-phase image and a first quadrature image including amplitude information and phase information in the detection signal based on the detection signal and a reference signal generated based on the stimulation signal; and a step of performing, a filtering process of reducing noise on at least one of the first in-phase image and the first quadrature image and then generating a first amplitude image based on the first in-phase image and the first quadrature image.

公开(公告)号：US20190064228A1

公开(公告)日：2019-02-28

申请号：US15770536

申请日：2016-09-05

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akihiro OTAKA ,  Tomonori NAKAMURA

IPC: G01R19/14 ,  G01N27/72 ,  G01N21/41 ,  G01R31/26

Abstract: An image generating device is an apparatus for acquiring an image which shows a direction of an electric current flowing through a semiconductor device. The image generating device comprises a signal application unit configured to apply a stimulation signal to the semiconductor device, a magnetic detection unit configured to output a detection signal based on a magnetism generated by an application of the stimulation signal, and an image generation unit configured to generate phase image data comprising a phase component which indicates a phase difference based on the phase difference between the detection signal and a reference signal which is generated based on the stimulation signal and generate an electric current direction image which shows the direction of the electric current based on the phase image data.

公开(公告)号：US20200241054A1

公开(公告)日：2020-07-30

申请号：US16841782

申请日：2020-04-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Akihiro OTAKA ,  Tomonori NAKAMURA

IPC: G01R19/14 ,  G01R31/311 ,  G01N27/72 ,  G01N21/41 ,  G01R31/26

Abstract: An image generating device is an apparatus for acquiring an image which shows a direction of an electric current flowing through a semiconductor device. The image generating device comprises a signal application unit configured to apply a stimulation signal to the semiconductor device, a magnetic detection unit configured to output a detection signal based on a magnetism generated by an application of the stimulation signal, and an image generation unit configured to generate phase image data comprising a phase component which indicates a phase difference based on the phase difference between the detection signal and a reference signal which is generated based on the stimulation signal and generate an electric current direction image which shows the direction of the electric current based on the phase image data.

公开(公告)号：US20180031614A1

公开(公告)日：2018-02-01

申请号：US15548860

申请日：2016-02-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA

IPC: G01R15/24 ,  G01R31/265 ,  G01R31/311

Abstract: An inspection apparatus includes a tester unit that applies a stimulus signal to a semiconductor apparatus, an MO crystal arranged to face a semiconductor apparatus, a light source that outputs light, an optical scanner that irradiates the MO crystal with light output from light source, a light detector that detects light reflected from the MO crystal arranged to face the semiconductor apparatus D and outputs a detection signal, and a computer that generate phase image data based on a phase difference between a reference signal generated based on a stimulus signal and the detection signal, the phase image data including a phase component indicating the phase difference, and generates an image indicating a path of a current from the phase image data.

公开(公告)号：US20150130474A1

公开(公告)日：2015-05-14

申请号：US14535709

申请日：2014-11-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Akihiro OTAKA ,  Mitsunori NISHIZAWA

IPC: G01R23/17 ,  G01R31/311 ,  G01N21/95

CPC classification number: G01R23/17 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/08 ,  G01R31/311

Abstract: A semiconductor device testing apparatus 1A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal. acquired by the spectrum analyzer 14.

Abstract translation: 半导体器件测试装置1A包括产生操作脉冲信号的测试器单元16，作为对操作脉冲信号的响应输出检测信号的光学传感器10，产生包含多个谐波的参考信号的脉冲发生器17 用于与操作脉冲信号同步的操作脉冲信号;频谱分析器13，其接收检测信号，并以检测频率获取检测信号的相位和幅度;频谱分析器14，其接收参考信号并获取相位 以及分析控制单元18，其基于由频谱分析器13获取的检测信号的相位和振幅以及参考信号的相位来获取检测信号的时间波形。 由频谱分析仪14采集。