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公开(公告)号：US10208382B2
公开(公告)日：2019-02-19
申请号：US15465172
申请日：2017-03-21
Applicant: General Electric Company
Inventor： Christopher James Kapusta , Marco Francesco Aimi
IPC: B23K35/00 , B23K1/00 , C23C28/02 , B81C1/00 , B23K35/02 , B23K35/26 , B23K35/30 , C23C14/02 , C23C14/16 , C23C14/34 , C23C14/58 , C23F1/00 , C23F4/00 , C25D3/50 , C25D7/12 , B23K101/40
Abstract: A non-magnetic lid for sealing a hermetic package. The lid includes a molybdenum substrate having a sputtered adhesion layer and a copper seed layer. The lid also includes a plated palladium solder base layer, and has a gold/tin solder preform attached to a sealing surface of the lid.
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公开(公告)号：US09845235B2
公开(公告)日：2017-12-19
申请号：US14844132
申请日：2015-09-03
Applicant: General Electric Company
Inventor： Joleyn Eileen Brewer , Christopher Fred Keimel , Marco Francesco Aimi , Andrew Minnick , Renner Stephen Ruffalo
CPC classification number: B81B3/0027 , B81B3/0075 , B81B7/0003 , B81B7/008 , B81B2201/01 , B81B2201/014 , B81B2201/0228 , B81B2203/0118 , B81B2203/0127 , B81B2203/0315 , B81B2203/053 , B81B2207/015 , B81B2207/115 , B81C1/00134 , B81C1/0015 , B81C1/00158 , B81C1/00182 , B81C1/00373 , B81C2201/0107 , G01L9/0042 , G01L9/0044
Abstract: A system and method for a micro-electrical-mechanical system (MEMS) device including a substrate and a free-standing and suspended electroplated metal MEMS structure formed on the substrate. The free-standing and suspended electroplated metal MEMS structure includes a metal mechanical element mechanically coupled to the substrate and a seed layer mechanically coupled to and in electrical communication with the mechanical element, the seed layer comprising at least one of a refractory metal and a refractory metal alloy, wherein a thickness of the mechanical element is substantially greater than a thickness of the seed layer such that the mechanical and electrical properties of the free-standing and suspended electroplated metal MEMS structure are defined by the material properties of the mechanical element.
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公开(公告)号：US09663347B2
公开(公告)日：2017-05-30
申请号：US14634981
申请日：2015-03-02
Applicant: General Electric Company
Inventor： Marco Francesco Aimi , Yizhen Lin
CPC classification number: B81B3/0059 , B81B3/0072 , B81B2203/053 , H01H59/0009 , H01H2001/0084
Abstract: A MEMS switch includes a substrate and a switch structure formed on the substrate, with the switch structure further including a conductive contact formed on the substrate, a self-compensating anchor structure coupled to the substrate, and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact. The cantilevered portion of the beam undergoes deformation during periods of strain mismatch between the substrate and the switch structure so as to have a takeoff angle relative to the substrate, and the self-compensating anchor structure directs a portion of the strain mismatch orthogonally to the cantilevered portion so as to warp the anchor and compensate for the takeoff angle of the cantilevered portion.
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24.发明申请公开(公告)号：US20160257558A1
公开(公告)日：2016-09-08
申请号：US14634981
申请日：2015-03-02
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Marco Francesco Aimi , Yizhen Lin
CPC classification number: B81B3/0059 , B81B3/0072 , B81B2203/053 , H01H59/0009 , H01H2001/0084
Abstract: A MEMS switch includes a substrate and a switch structure formed on the substrate, with the switch structure further including a conductive contact formed on the substrate, a self-compensating anchor structure coupled to the substrate, and a beam comprising a first end and a second end, the beam integrated with the self-compensating anchor structure at the first end and extending out orthogonally from the self-compensating anchor structure and suspended over the substrate such that the second end comprises a cantilevered portion positioned above the conductive contact. The cantilevered portion of the beam undergoes deformation during periods of strain mismatch between the substrate and the switch structure so as to have a takeoff angle relative to the substrate, and the self-compensating anchor structure directs a portion of the strain mismatch orthogonally to the cantilevered portion so as to warp the anchor and compensate for the takeoff angle of the cantilevered portion.
Abstract translation: MEMS开关包括衬底和形成在衬底上的开关结构，开关结构还包括形成在衬底上的导电接触，耦合到衬底的自补偿锚结构，以及包括第一端和第二端的梁 所述梁与第一端处的自补偿锚结构一体化并且从自补偿锚结构垂直延伸并悬挂在基板上，使得第二端包括位于导电触头上方的悬臂部分。 梁的悬臂部分在基片和开关结构之间的应变不匹配期间经历变形，以便相对于基片具有起飞角，并且自补偿锚固结构将应变失配的一部分正交地与悬臂 以便使锚固件弯曲并补偿悬臂部分的起飞角度。
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公开(公告)号：US11854958B2
公开(公告)日：2023-12-26
申请号：US17875205
申请日：2022-07-27
Applicant: General Electric Company
Inventor： Marco Francesco Aimi , Joseph Alfred Iannotti , Joleyn Eileen Brewer
IPC: H01L21/48 , B81C1/00 , B81C3/00 , H01L21/60 , H01L23/522 , B81B7/02 , B81B7/00 , H01L49/02 , H01L23/64
CPC classification number: H01L23/5222 , B81B7/0074 , B81B7/02 , B81C1/0015 , B81C1/00269 , B81C3/001 , B81C3/008 , H01L21/486 , H01L21/4807 , H01L28/40 , B81B2201/01 , H01L23/642 , H01L2021/60015
Abstract: A method includes obtaining an active feature layer having a first surface bearing one or more active feature areas. A first capacitor plate of a first capacitor is formed on an interior surface of a cap. A second capacitor plate of the first capacitor is formed on an exterior surface of the cap. The first capacitor plate of the first capacitor overlays and is spaced apart from the second capacitor plate of the first capacitor along a direction that is orthogonal to the exterior surface of the cap to form the first capacitor. The cap is coupled with the first surface of the active feature layer such that the second capacitor plate of the first capacitor is in electrical communication with at least a first active feature of the active feature layer. The cap is bonded with the passive layer substrate.
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Patent Agency Ranking
公开(公告)号：US11525674B2
公开(公告)日：2022-12-13
申请号：US16665784
申请日：2019-10-28
Applicant: General Electric Company
Inventor： Marco Francesco Aimi , Joseph Alfred Iannotti
Abstract: A measuring system is disclosed. The measuring system includes a surface acoustic wave (SAW) device including a piezoelectric substrate and a first and second electrode disposed on a surface of the piezoelectric substrate, and a measuring device communicatively coupled to the first electrode via a first probe and the second electrode via a second probe and configured to apply an electrical signal to the first and second electrode to generate an incident bulk acoustic wave within the piezoelectric substrate, detect at least a first reflected bulk acoustic wave and a second reflected bulk acoustic wave at the first and second electrode, and calculate a thickness between a first interface corresponding to the first reflected bulk acoustic wave and a second interface corresponding to the second reflected bulk acoustic wave based on a time elapsed between detecting the first and second reflected bulk acoustic waves.
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公开(公告)号：US11499545B2
公开(公告)日：2022-11-15
申请号：US16517071
申请日：2019-07-19
Applicant: General Electric Company
Abstract: A sensor system for monitoring a condition of a piston rod includes an interrogator system having a first coil winding coupled to a housing and radially spaced from the piston rod such that a gap is defined between the first coil winding and the piston rod. A second coil winding is coupled to the piston rod and is inductively coupled to the first coil winding. The second coil winding is configured to communicate with the first coil winding through a range of linear movement of the piston rod relative to the housing. A sensor is coupled to the second coil winding. The sensor is configured to measure a characteristic associated with the piston rod and generate a current in the second coil winding to transmit, via the inductive coupling with the first coil winding, an electrical output signal associated with the characteristic to the interrogator system.
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公开(公告)号：US20210123730A1
公开(公告)日：2021-04-29
申请号：US16665784
申请日：2019-10-28
Applicant: General Electric Company
Inventor： Marco Francesco Aimi , Joseph Alfred Iannotti
IPC: G01B17/02
Abstract: A measuring system is disclosed. The measuring system includes a surface acoustic wave (SAW) device including a piezoelectric substrate and a first and second electrode disposed on a surface of the piezoelectric substrate, and a measuring device communicatively coupled to the first electrode via a first probe and the second electrode via a second probe and configured to apply an electrical signal to the first and second electrode to generate an incident bulk acoustic wave within the piezoelectric substrate, detect at least a first reflected bulk acoustic wave and a second reflected bulk acoustic wave at the first and second electrode, and calculate a thickness between a first interface corresponding to the first reflected bulk acoustic wave and a second interface corresponding to the second reflected bulk acoustic wave based on a time elapsed between detecting the first and second reflected bulk acoustic waves.
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公开(公告)号：US20210017979A1
公开(公告)日：2021-01-21
申请号：US16517071
申请日：2019-07-19
Applicant: General Electric Company
Abstract: A sensor system for monitoring a condition of a piston rod includes an interrogator system having a first coil winding coupled to a housing and radially spaced from the piston rod such that a gap is defined between the first coil winding and the piston rod. A second coil winding is coupled to the piston rod and is inductively coupled to the first coil winding. The second coil winding is configured to communicate with the first coil winding through a range of linear movement of the piston rod relative to the housing. A sensor is coupled to the second coil winding. The sensor is configured to measure a characteristic associated with the piston rod and generate a current in the second coil winding to transmit, via the inductive coupling with the first coil winding, an electrical output signal associated with the characteristic to the interrogator system.
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公开(公告)号：US20160164161A1
公开(公告)日：2016-06-09
申请号：US14558990
申请日：2014-12-03
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Yongjae Lee , Marco Francesco Aimi , Glenn Scott Claydon , Christopher Fred Keimel
CPC classification number: H01P1/127 , H01H59/0009 , H01H2001/0084
Abstract: An ohmic RF MEMS relay includes a substrate with a capacitive coupling, Csub; two actuating elements electrically coupled in series, so as to define a channel, wherein the actuating elements are configured to be independently actuated or simultaneously operated. The actuating elements have their own capacitive coupling, Cgap; a midpoint on the channel is in electrical communication with the actuating elements; and an anchor mechanically coupled to the substrate and supporting at least one of the actuating elements. Also, an ohmic RF MEMS relay that includes an input port; a plurality of first MEMS switches that make up a first switching group in electrical communication with the input port, thereby defining a plurality of channels each leading from each of the MEMS switches; and at least one outlet port along each of the channels distal from the first switching group and in electrical communication with the input port.
Abstract translation: 欧姆RF MEMS继电器包括具有电容耦合的衬底，Csub; 串联电耦合的两个致动元件，以便限定通道，其中所述致动元件构造成独立地致动或同时操作。 致动元件具有自己的电容耦合，Cgap; 通道上的中点与致动元件电连通; 以及锚固件，其机械地联接到所述基板并且支撑所述致动元件中的至少一个。 另外，包括输入端口的欧姆RF MEMS继电器; 多个第一MEMS开关，其构成与所述输入端口电连通的第一开关组，从而限定每个从所述MEMS开关导出的多个通道; 以及沿着远离第一开关组的每个通道的至少一个出口端口，并与输入端口电连通。
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