公开(公告)号：US10825651B2

公开(公告)日：2020-11-03

申请号：US16410774

申请日：2019-05-13

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, Jr. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/31 ,  H01J37/304 ,  G01N1/28 ,  H01J37/28 ,  H01J37/285

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：US20190272975A1

公开(公告)日：2019-09-05

申请号：US16410774

申请日：2019-05-13

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, JR. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/285 ,  H01J37/31 ,  G01N1/28 ,  H01J37/28 ,  H01J37/304

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：US10340119B2

公开(公告)日：2019-07-02

申请号：US15464307

申请日：2017-03-20

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, Jr. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/31 ,  H01J37/28 ,  H01J37/304 ,  H01J37/285 ,  G01N1/28

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：US20180247793A1

公开(公告)日：2018-08-30

申请号：US15903370

申请日：2018-02-23

Applicant: FEI Company

Inventor： Michael Schmidt ,  Cliff Bugge

IPC: H01J37/305 ,  H01J37/30 ,  G01N1/28

CPC classification number: H01J37/3053 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/3005 ,  H01J2237/31745

Abstract: Embodiments are directed to a method and charged particle beam system for forming views for an electron microscope. Embodiments include milling a first surface at least in the local area of a feature of interest using an ion beam directed at a first angle to make the first surface at least in the local area of the feature of interest substantially planar, wherein the first angle between the ion beam and the first surface is equal to or less than ten degrees; subsequent to milling the first surface, milling the sample using the ion beam directed at a second angle to expose a second surface, the second surface comprising a cross-section of the feature of interest; and forming an image of the second surface by directing an electron beam to the second surface and detecting the interaction of the electron beam with the second surface.

公开(公告)号：US20170250055A1

公开(公告)日：2017-08-31

申请号：US15595773

申请日：2017-05-15

Applicant: FEI Company

Inventor： Paul Keady ,  Brennan Peterson ,  Guus Das ,  Craig Matthew Henry ,  Larry Dworkin ,  Jeff Blackwood ,  Stacey Stone ,  Michael Schmidt

IPC: H01J37/305 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/3056 ,  C23C14/5833 ,  C23F1/02 ,  G01N1/32 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/024 ,  H01J2237/20207 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for TEM sample preparation and analysis that can be used in a FIB-SEM system without re-welds, unloads, user handling of the lamella, or a motorized flip stage. The method allows a dual beam FIB-SEM system with a typical tilt stage to be used to extract a sample to from a substrate, mount the sample onto a TEM sample holder capable of tilting, thin the sample using FIB milling, and rotate the sample so that the sample face is perpendicular to an electron column for STEM imaging.

公开(公告)号：US09741536B2

公开(公告)日：2017-08-22

申请号：US14433354

申请日：2013-10-04

Applicant: FEI Company

Inventor： Sang Hoon Lee ,  Stacey Stone ,  Jeffrey Blackwood ,  Michael Schmidt

IPC: G01R23/02 ,  H01J37/305 ,  H01J37/28 ,  H01J37/317 ,  C23C14/46 ,  G01N1/32

CPC classification number: H01J37/3053 ,  C23C14/46 ,  G01N1/32 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Curtaining artifacts on high aspect ratio features are reduced by reducing the distance between a protective layer and feature of interest. For example, the ion beam can mill at an angle to the work piece surface to create a sloped surface. A protective layer is deposited onto the sloped surface, and the ion beam mills through the protective layer to expose the feature of interest for analysis. The sloped mill positions the protective layer close to the feature of interest to reduce curtaining.

公开(公告)号：US09735066B2

公开(公告)日：2017-08-15

申请号：US14169100

申请日：2014-01-30

Applicant: FEI Company

Inventor： Alexander Buxbaum ,  Michael Schmidt

IPC: H01L21/66 ,  H01L21/67 ,  B28D5/04 ,  G03F1/72 ,  G03F7/20 ,  H01L21/304 ,  G01N1/28 ,  B26D3/28 ,  G03F1/84

CPC classification number: H01L22/14 ,  B26D3/282 ,  B28D5/04 ,  G01N1/286 ,  G01N2001/2873 ,  G03F1/72 ,  G03F1/84 ,  G03F7/70608 ,  G03F7/7065 ,  H01L21/304 ,  Y10T156/1967

Abstract: A method and apparatus for use in surface delayering for fault isolation and defect localization of a sample work piece is provided. More particularly, a method and apparatus for mechanically peeling of one or more layers from the sample in a rapid, controlled, and accurate manner is provided. A programmable actuator includes a delayering probe tip with a cutting edge that is shaped to quickly and accurately peel away a layer of material from a sample. The cutting face of the delayering probe tip is configured so that each peeling step peels away an area of material having a linear dimension substantially equal to the linear dimension of the delayering probe tip cutting face. The surface delayering may take place inside a vacuum chamber so that the target area of the sample can be observed in-situ with FIB/SEM imaging.

公开(公告)号：US09488554B2

公开(公告)日：2016-11-08

申请号：US14432711

申请日：2013-10-07

Applicant: FEI Company

Inventor： Michael Schmidt ,  Hyun Hwa Kim ,  Sang Hoon Lee ,  Stacey Stone ,  Jeffrey Blackwood

IPC: H01J37/00 ,  G01N1/32 ,  G01N1/28 ,  H01J37/20 ,  H01J37/305

CPC classification number: G01N1/32 ,  G01N1/286 ,  H01J37/20 ,  H01J37/3053 ,  H01J2237/31745

Abstract: A method and system for exposing a portion of a structure in a sample for observation in a charged particle beam system, including extracting a sample from a bulk sample; determining an orientation of the sample that reduces curtaining; mounting the sample to a holder in the charged particle beam system so that the holder orients the sample in an orientation that reduces curtaining when the sample is milled to expose the structure; exposing the structure by milling the sample in a direction that reduces curtaining; and imaging the structure.

Abstract translation: 一种方法和系统，用于暴露用于在带电粒子束系统中观察的样品中的结构的一部分，包括从大量样品中提取样品; 确定减少绘制的样品的取向; 将样品安装到带电粒子束系统中的保持器上，使得保持器以样品取向使得当样品被研磨以暴露结构时减少绘制的取向; 通过在减少绘制的方向上研磨样品来暴露结构; 并对结构进行成像。

公开(公告)号：US20160141147A1

公开(公告)日：2016-05-19

申请号：US14934837

申请日：2015-11-06

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, JR. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/28 ,  H01J37/31 ,  H01J37/285

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

Abstract translation: 描述了促进薄片的自动提取并将薄片附着到样品网格以便在透射电子显微镜上观察的技术。 本发明的一些实施例涉及使用机器视觉来确定薄片，探针和/或TEM网格的位置，以将探针附着到薄片并将薄片附接到TEM网格。 便于使用机器视觉的技术包括成形探针尖端，使得其位置可以被图像识别软件容易地识别。 图像减法技术可用于确定附着到探针上的薄片的位置，以将薄片移动到TEM网格以进行附着。 在一些实施例中，参考结构在探针上或在薄片上研磨以便于图像识别。

公开(公告)号：US20150294834A1

公开(公告)日：2015-10-15

申请号：US14251739

申请日：2014-04-14

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR. ,  Valerie Brogden ,  Michael Schmidt

IPC: H01J37/20 ,  G01N1/44 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01N1/44 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/31745

Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.

Abstract translation: TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。 在一些实施例中，每个柱包括单面阶梯构造。 提取多个样品的方法包括提取样品并将样品附着到柱上的不同阶梯台阶上。