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    DUAL BEAM MICROSCOPE SYSTEM FOR IMAGING DURING SAMPLE PROCESSING
    21.
    发明申请
    DUAL BEAM MICROSCOPE SYSTEM FOR IMAGING DURING SAMPLE PROCESSING 有权

    公开(公告)号：US20210391145A1

    公开(公告)日：2021-12-16

    申请号：US16900749

    申请日：2020-06-12

    Applicant: FEI Company

    Inventor： Yuchen Deng ,  Petrus Hubertus Franciscus Trompenaars ,  Bart Buijsse ,  Alexander Henstra

    IPC: H01J37/30 ,  H01J37/28 ,  H01J37/21

    Abstract: Methods for using a dual beam microscope system to simultaneously process a sample and image the processed portions of the sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, splitting the plurality of electrons into two electron beams, and then modifying the focal properties of at least one of the electron beams such that the two electron beams have different focal planes. Once the two beams have different focal planes, the first electron beam is focused such that it acts as a STEM beam. The STEM beam is then used to process a region of the sample to induce a physical change (e.g., perform milling, deposition, charge adjustment, phase change, etc.). The second electron beam is focused to act as a TEM beam to perform imaging of the region of the sample being processed

    Laser-based phase plate image contrast manipulation
    23.
    发明授权
    Laser-based phase plate image contrast manipulation 有权

    公开(公告)号：US11101101B2

    公开(公告)日：2021-08-24

    申请号：US16855536

    申请日：2020-04-22

    Applicant: FEI Company

    Inventor： Bart Buijsse ,  Bas Hendriksen ,  Pleun Dona

    IPC: H01J37/22 ,  H01J37/147 ,  H01J37/28 ,  H01J37/26

    Abstract: Methods and systems for implementing laser-based phase plate image contrast enhancement are disclosed herein. An example method at least includes forming at least one optical peak in a diffraction plane of an electron microscope, and directing an electron beam through the at least one optical peak at a first location, where the first location determines an amount of phase manipulation the optical peak imparts to an electron of the electron beam.

    CORRELATIVE OPTICAL AND CHARGED PARTICLE MICROSCOPE
    25.
    发明申请
    CORRELATIVE OPTICAL AND CHARGED PARTICLE MICROSCOPE 有权
    相关光学和充电粒子显微镜

    公开(公告)号：US20150214001A1

    公开(公告)日：2015-07-30

    申请号：US14606850

    申请日：2015-01-27

    Applicant: FEI Company

    Inventor： Bart Buijsse

    IPC: H01J37/22 ,  H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/14 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/223 ,  H01J2237/2602

    Abstract: A Correlative Light and Electron Microscope (CLEM) is equipped with a TEM column and a light microscope fitted between the pole shoes of the objective lens of the TEM. To enlarge the acceptance solid angle for enhanced sensitivity a truncated lens is used. It is noted that this does not imply that the lens shows astigmatism (it is not a cylindrical lens).Using the light microscope, a first image is made with the sample in a first direction. This image will show in one direction a higher (diffraction limited) resolution than in the direction perpendicular thereto, due to the different NA of the lens in the two directions. By rotating the sample and making a second image, a combined image can be formed showing a better resolution than either of the images in the direction where they show a low NA.

    Abstract translation: 相关的光电子显微镜（CLEM）配有TEM柱和光学显微镜，装在TEM的物镜的极靴之间。 为了增加灵敏度的接受立体角，使用截头透镜。 应注意，这并不意味着透镜显示散光（它不是柱面透镜）。 使用光学显微镜，在第一方向上用样品制作第一图像。 由于透镜在两个方向上的NA不同，该图像将在一个方向上显示比垂直于其方向更高（衍射受限）的分辨率。 通过旋转样品并制作第二图像，可以形成组合图像，其显示出比它们显示低NA的方向中的任一个图像更好的分辨率。

    Imaging a sample in a TEM equipped with a phase plate
    26.
    发明授权
    Imaging a sample in a TEM equipped with a phase plate 有权
    在装有相位板的TEM中成像样品

    公开(公告)号：US08835846B2

    公开(公告)日：2014-09-16

    申请号：US14015658

    申请日：2013-08-30

    Applicant: FEI Company ,  Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.

    Inventor： Bart Buijsse ,  Marco Hugo Petrus Moers ,  Radostin Stoyanov Danev

    IPC: H01J37/26

    CPC classification number: H01J31/283 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2614

    Abstract: The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.

    Abstract translation: 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些假象是由于衍射平面中相位板的锋利边缘引起的傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。

    Phase plate for a TEM
    27.
    发明授权
    Phase plate for a TEM 有权
    TEM相片

    公开(公告)号：US08772716B2

    公开(公告)日：2014-07-08

    申请号：US13896103

    申请日：2013-05-16

    Applicant: FEI Company

    Inventor： Bart Buijsse

    IPC: G21K7/00 ,  G01N23/00

    CPC classification number: H01J37/263 ,  H01J2237/2614 ,  H01J2237/2802

    Abstract: A phase plate, specifically a Zernike type phase plate, for use in an electron microscope comprises a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function.The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.

    Abstract translation: 在电子显微镜中使用的相位板，特别是Zernike型相位板包括中心孔和引起通过所述膜的电子的相移的薄膜。 该相移会导致对比度传递函数（CTF）从正弦函数变为余弦函数。 相板配备有由较薄的膜承载的环形形式的膜。 因此，仅在较小的空间频率范围（对于低频），相位发生变化（因而CTF），而对于其他空间频率，相移可忽略不计，因此CTF保持不变。 由于载体膜的厚度小得多，所以电子的散射也是可忽略的。

    IMAGING A SAMPLE IN A TEM EQUIPPED WITH A PHASE PLATE
    28.
    发明申请
    IMAGING A SAMPLE IN A TEM EQUIPPED WITH A PHASE PLATE 有权
    在具有相位板的TEM中成像样品

    公开(公告)号：US20140061463A1

    公开(公告)日：2014-03-06

    申请号：US14015658

    申请日：2013-08-30

    Applicant: Max-Planck-Gesellschaft zur Gorderung der Wissenschaften e.V. ,  FEI Company

    Inventor： Bart Buijsse ,  Marco Hugo Petrus Moers ,  Radostin Stoyanov Danev

    IPC: H01J37/26

    CPC classification number: H01J31/283 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2614

    Abstract: The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.

    Abstract translation: 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些伪像是由于衍射平面中相位板的锋利边缘由于傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。

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