RF MEMS switch having asymmetrical spring rigidity
    21.
    发明授权
    RF MEMS switch having asymmetrical spring rigidity 失效
    RF MEMS开关具有不对称的弹簧刚度

    公开(公告)号:US07420444B2

    公开(公告)日:2008-09-02

    申请号:US11385700

    申请日:2006-03-22

    IPC分类号: H01P1/10

    摘要: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

    摘要翻译: 具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件,膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件,底电极是位于膜的上表面上的接触表面 衬底面向膜的底表面,其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性,并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离 已关闭 本发明的优点在于,当开关断开时,由于位于膜侧面的弹簧的刚度不同,开关与接触表面容易分离。

    Vertical comb actuator radio frequency micro-electro-mechanical system switch
    23.
    发明申请
    Vertical comb actuator radio frequency micro-electro-mechanical system switch 有权
    立式梳子执行器射频微机电系统开关

    公开(公告)号:US20070024390A1

    公开(公告)日:2007-02-01

    申请号:US11417242

    申请日:2006-05-04

    IPC分类号: H01P1/10

    CPC分类号: H01H59/0009

    摘要: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

    摘要翻译: 立式梳子致动器射频(RF)微机电系统(MEMS)开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时,所述致动器位于所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分,其中当施加预定的驱动电压时,固定部分允许致动器与第一和第二信号线接触。 因此,可以防止致动器粘附到基板。 此外,RF MEMS开关可以在低电压和插入损耗下工作,并且可以降低功率损耗。

    MEMS switch and manufacturing method thereof
    24.
    发明申请
    MEMS switch and manufacturing method thereof 有权
    MEMS开关及其制造方法

    公开(公告)号:US20070018760A1

    公开(公告)日:2007-01-25

    申请号:US11429364

    申请日:2006-05-08

    IPC分类号: H01H51/22

    CPC分类号: H01H59/0009 H01H2059/0054

    摘要: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

    摘要翻译: 一种MEMS开关,其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接,以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件,用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

    Electrostatic RF MEMS switches
    25.
    发明授权
    Electrostatic RF MEMS switches 有权
    静电RF MEMS开关

    公开(公告)号:US07122942B2

    公开(公告)日:2006-10-17

    申请号:US10951612

    申请日:2004-09-29

    IPC分类号: H01L41/08

    摘要: A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.

    摘要翻译: 一种具有介电层的微型开关,具有形成在基板上的移动区域,形成在所述移动区域的预定部分上的导电层,形成在所述导电层上的电介质膜,在所述电介质上形成预定距离的第一和第二导电体 膜,形成在移动区域上的一个或两个下电极,以及在两个下电极之上形成预定距离的一个或两个上电极,一个或两个上电极在静电力发生时向上移动导电层和电介质膜 上电极和下电极,并且与第一和第二电导体电容耦合以允许电流在第一和第二电导体之间流动。 这种微型开关具有高的开/关比和隔离度和简单的结构,并且可以在非常容易的过程中制造。

    Electrostatic RF MEMS switches
    26.
    发明申请
    Electrostatic RF MEMS switches 有权
    静电RF MEMS开关

    公开(公告)号:US20050040486A1

    公开(公告)日:2005-02-24

    申请号:US10951612

    申请日:2004-09-29

    摘要: A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.

    摘要翻译: 一种具有介电层的微型开关,具有形成在基板上的移动区域,形成在所述移动区域的预定部分上的导电层,形成在所述导电层上的电介质膜,在所述电介质上形成预定距离的第一和第二导电体 膜,形成在移动区域上的一个或两个下电极,以及在两个下电极之上形成预定距离的一个或两个上电极,一个或两个上电极在静电力发生时向上移动导电层和电介质膜 上电极和下电极,并且与第一和第二电导体电容耦合以允许电流在第一和第二电导体之间流动。 这种微型开关具有高的开/关比和隔离度和简单的结构,并且可以在非常容易的过程中制造。