USE OF ACID WASHING TO PROVIDE PURIFIED SILICON CRYSTALS
    21.
    发明申请
    USE OF ACID WASHING TO PROVIDE PURIFIED SILICON CRYSTALS 有权
    使用酸洗提供纯化硅水晶

    公开(公告)号:US20100329959A1

    公开(公告)日:2010-12-30

    申请号:US12670263

    申请日:2008-07-23

    CPC分类号: C30B9/10 C01B33/037 C30B29/06

    摘要: A method for purifying silicon wherein silicon is crystallized from a solvent metal. The method comprises the steps of providing a molten liquid containing silicon, a solvent metal and impurities, cooling the molten liquid to form first silicon crystals and a first mother liquor, separating the first silicon crystals from the first mother liquor, contacting the first silicon crystals with compound which will dissolve the first mother liquor and separating the washed crystals from the wash solution.

    摘要翻译: 一种纯化硅的方法,其中硅从溶剂金属中结晶。 该方法包括以下步骤:提供含有硅,溶剂金属和杂质的熔融液体,冷却熔融液体以形成第一硅晶体和第一母液,将第一硅晶体与第一母液分离,使第一硅晶体 用化合物溶解第一母液并将洗涤的晶体与洗涤溶液分离。

    Variable optical attenuator
    22.
    发明授权
    Variable optical attenuator 失效
    可变光衰减器

    公开(公告)号:US06714716B2

    公开(公告)日:2004-03-30

    申请号:US10184553

    申请日:2002-06-28

    IPC分类号: G02B600

    CPC分类号: G02B26/02 G02B6/266

    摘要: A mechanically-adjustable variable optical attenuator includes an azimuthally-tapering, rotatable beam attenuator. In a plane perpendicular to the light beam to be attenuated, the projection of the beam attenuator comprises a sharp distal tip, a proximal region, and a concave curved light-blocking surface narrowing from the proximal region to the distal tip. The extent of the beam attenuator obstructing the light beam is varied by rotating the beam attenuator about a rotation axis perpendicular to the light beam direction. The beam attenuator geometry allows achieving high resolutions while limiting the beam attenuator size. The attenuated light beam can be a single-mode or multi-mode light beam.

    摘要翻译: 机械可调可变光衰减器包括方位锥形的可旋转光束衰减器。 在垂直于待衰减的光束的平面中,光束衰减器的突出部包括尖锐的远端,近端区域和从近端区域向远端尖端变窄的凹形弧形遮光表面。 通过围绕垂直于光束方向的旋转轴旋转光束衰减器来改变阻挡光束的光束衰减器的程度。 光束衰减器几何形状允许在限制光束衰减器尺寸的同时实现高分辨率。 衰减的光束可以是单模或多模光束。

    Multiple coil antenna for inductively-coupled plasma generation systems
    24.
    发明授权
    Multiple coil antenna for inductively-coupled plasma generation systems 有权
    用于电感耦合等离子体发生系统的多线圈天线

    公开(公告)号:US06463875B1

    公开(公告)日:2002-10-15

    申请号:US09711935

    申请日:2000-11-15

    IPC分类号: H05H146

    CPC分类号: H01J37/321

    摘要: A radio frequency plasma multiple-coil antenna allows for controllable, uniform inductive coupling within a plasma reactor. According to exemplary embodiments, multiple coils are positioned on a dielectric window of a plasma chamber, and are powered by a single radio frequency generator and tuned by a single matching network. Each coil is either planar or a combination of a planar coil and a vertically stacked helical coil. The input end of each coil is connected to an input tuning capacitor and the output end is terminated to the ground through an output tuning capacitor. The location of the maximum inductive coupling of the radio frequency to the plasma is mainly determined by the output capacitor, while the input capacitor is mainly used to adjust current magnitude into each coil. By adjusting the current magnitude and the location of the maximum inductive coupling within each coil, the plasma density in different radial and azimuthal regions can be varied and controlled, and therefore, radially and azimuthally uniform plasma can be achieved.

    摘要翻译: 射频等离子体多线圈天线允许等离子体反应器内的可控的,均匀的电感耦合。 根据示例性实施例,多个线圈位于等离子体室的电介质窗口上,并且由单个射频发生器供电并由单个匹配网络调谐。 每个线圈是平面的或平面线圈和垂直堆叠的螺旋线圈的组合。 每个线圈的输入端连接到输入调谐电容器,输出端通过输出调谐电容端接到地。 射频对等离子体的最大感应耦合的位置主要由输出电容决定,而输入电容主要用于调整每个线圈的电流幅值。 通过调整每个线圈内的最大电感耦合的电流大小和位置,可以改变和控制不同径向和方位区域中的等离子体密度,因此可以实现径向和方位均匀的等离子体。

    Hot relight system for electrodeless high intensity discharge lamps
    25.
    发明授权
    Hot relight system for electrodeless high intensity discharge lamps 失效
    无极高强度放电灯的热重系统

    公开(公告)号:US5990627A

    公开(公告)日:1999-11-23

    申请号:US728571

    申请日:1996-10-10

    摘要: An electrodeless high intensity discharge lamp includes an electrodeless lamp capsule having an enclosed volume containing a mixture of starting gas and chemical dopant material excitable by high frequency power to a state of luminous emission, an applicator for coupling high frequency power to the lamp capsule, a gas nozzle directed toward the lamp capsule and a gas controller coupled to the gas nozzle. The gas controller receives gas from a gas source and supplies a gas puff of limited duration to the lamp capsule through the gas nozzle in response to termination of the state of luminous emission. The lamp capsule is rapidly cooled by the gas puff to a temperature required for restart.

    摘要翻译: 无电极高强度放电灯包括无电极灯胶囊,其具有包含起始气体和通过高频功率激发的化学掺杂剂材料与发光状态的混合物的封闭体积,用于将高频功率耦合到灯泡的施加器, 指向灯壳的气体喷嘴和连接到气体喷嘴的气体控制器。 气体控制器从气体源接收气体,并响应于发光状态的终止,通过气体喷嘴将有限持续时间的气体吹送到灯泡。 灯泡通过气泡快速冷却至重新启动所需的温度。