EVAPORATION DEVICE AND EVAPORATION SYSTEM
    239.
    发明申请

    公开(公告)号:US20170198389A1

    公开(公告)日:2017-07-13

    申请号:US15321014

    申请日:2016-03-11

    CPC classification number: C23C14/26 C23C14/243 C23C14/54 C23C14/542

    Abstract: An evaporation device and an evaporation system are provided. The evaporation device comprises a first heating part; a heat transfer part comprising a first and second heat transfer member, wherein the second heat transfer member surrounds the first heat transfer member and is spaced apart from the first heat transfer member by a predefined distance, a space between the first and second heat transfer member is configured to accommodate an evaporation material, and the heat transfer part is configured to transfer heat from the first heating part to the evaporation material for sublimating the evaporation material; and an ejection part for ejecting the evaporation material which has been heated and sublimated by the heat transfer part. The evaporation system comprises the evaporation device.

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