METHOD OF MANUFACTURING MRAM DEVICE WITH ENHANCED ETCH CONTROL

    公开(公告)号:US20240260479A1

    公开(公告)日:2024-08-01

    申请号:US18631813

    申请日:2024-04-10

    CPC classification number: H10N50/01 H10B61/22 H10N50/80

    Abstract: A method of manufacturing a semiconductor device includes: forming a substrate over the substrate, the substrate defining a logic region and a memory region; depositing a bottom electrode layer across the logic region and the memory region; depositing a magnetic tunnel junction (MTJ) layer over the bottom electrode layer; depositing a first conductive layer over the MTJ layer; depositing a sacrificial layer over the first conductive layer; etching the sacrificial layer in the memory region to expose the first conductive layer in the memory region while keeping the first conductive layer in the logic region covered; depositing a second conductive layer in the memory region and the logic region; patterning the second conductive layer to expose the MTJ layer in the memory region; and etching the patterned second conductive layer and the MTJ layer to form a top electrode and an MTJ, respectively, in the memory region.

    MAGNETIC MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240260477A1

    公开(公告)日:2024-08-01

    申请号:US18364619

    申请日:2023-08-03

    CPC classification number: H10N50/01 H10B61/22 H10N50/10

    Abstract: A method of manufacturing a magnetic memory device may include forming a bottom electrode layer on a substrate; forming a block structure on the bottom electrode layer; performing a first deposition process on the bottom electrode layer to form a pinned magnetic layer, a tunnel barrier layer, and a free magnetic layer on the bottom electrode layer; performing a second deposition process on the free magnetic layer to form a capping layer on the free magnetic layer; and performing an etching process after forming a hard mask on the capping layer to form magnetic tunnel junction patterns. The first deposition process may include irradiating a first beam toward the substrate. The second deposition process may include irradiating a second beam toward the substrate. The second beam may have a greater angle than the first beam with respect to a normal line perpendicular to an upper surface of the substrate.

    Variable resistance memory device
    14.
    发明授权

    公开(公告)号:US12051455B2

    公开(公告)日:2024-07-30

    申请号:US17845274

    申请日:2022-06-21

    Abstract: A variable resistance memory device includes active regions apart from each other, common bit line contacts in the active regions, first active source contacts on first active regions near one edge of each of the common bit line contacts, second active source contacts on second active regions near another edge of each of the common bit line contacts, word lines between the first active source contacts and the common bit line contacts and between the common bit line contacts and the second active source contacts, bit lines on the common bit line contacts, variable resistance layers connected to the second active source contacts, the word lines, and the bit lines, spin-orbit torque (SOT) layers connected to the first active source contacts on the variable resistance layers, the word lines, and the bit lines, source line contacts on the SOT layers, and source lines connected to the source line contacts.

    MAGNETIC RANDOM ACCESS MEMORY DEVICE AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:US20240251684A1

    公开(公告)日:2024-07-25

    申请号:US18626319

    申请日:2024-04-03

    CPC classification number: H10N50/01 G11C11/161 H10B61/22 H10N50/10 H10N50/80

    Abstract: Provided are a magnetic random access memory device and a manufacturing method therefor. The device comprises magnetic thin film structure bodies, and an electrode arranged around side surfaces of the magnetic thin film structure body. The method is: preparing a bottom electrode, preparing a magnetic thin film structure body on the bottom electrode; preparing a non-magnetic thin film structure body on the magnetic thin film structure body, and preparing another magnetic thin film structure body on the non-magnetic thin film structure body; etching the two magnetic thin film structure bodies and the non-magnetic thin film structure body to form a MTJ device, preparing an insulating layer thin film on the outer surface of the device, and preparing a VCMA electrode on the periphery of the side face of the magnetic thin film structure body requiring voltage application; and preparing a wire connecting the VCMA electrode to outside.

    Magnetic memory and reading/writing method thereof

    公开(公告)号:US12035539B2

    公开(公告)日:2024-07-09

    申请号:US17480357

    申请日:2021-09-21

    Abstract: The present application provides a magnetic memory and a reading/writing method thereof. The magnetic memory includes at least one cell layer, the cell layer including: a plurality of paralleled first conductors located in a first plane; a plurality of paralleled second conductors located in a second plane, the first plane being parallel to the second plane, a projection of the second conductor on the first plane intersecting with the first conductor; a plurality of memory elements arranged between the first plane and the second plane, the memory element including a magnetic tunnel junction and a bidirectional gating device arranged in series along a direction perpendicular to the first plane, the magnetic tunnel junction being connected to the first conductor, the bidirectional gating device being connected to the second conductor, and the bidirectional gating device being configured to be turned on when a threshold voltage and/or a threshold current are/is applied.

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