知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

167 records (took 0.022 seconds)

    THROUGH PROCESS FLOW INTRA-CHIP AND INTER-CHIP ELECTRICAL ANALYSIS AND PROCESS CONTROL USING IN-LINE NANOPROBING
    12.
    发明申请
    THROUGH PROCESS FLOW INTRA-CHIP AND INTER-CHIP ELECTRICAL ANALYSIS AND PROCESS CONTROL USING IN-LINE NANOPROBING 审中-公开
    通过过程流程内部芯片和片上电气分析和使用在线纳米技术的过程控制

    公开(公告)号：US20150377921A1

    公开(公告)日：2015-12-31

    申请号：US14751017

    申请日：2015-06-25

    Applicant: DCG Systems, Inc.

    Inventor： Vladimir Ukraintsev ,  Israel Niv ,  Ronen Benzion

    IPC: G01Q30/02 ,  G01R31/28 ,  G01R31/26

    CPC classification number: G01Q30/02 ,  G01R1/06744 ,  G01R31/26 ,  G01R31/2831 ,  G01R31/2891 ,  H01J37/28 ,  H01J2237/2008 ,  H01J2237/208 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/14

    Abstract: System for performing in-line nanoprobing on semiconductor wafer. A wafer support or vertical wafer positioner is attached to a wafer stage. An SEM column, an optical microscope and a plurality of nanoprobe positioners are all attached to the ceiling. The nanoprobe positioners have one nanoprobe configured for physically contacting selected points on the wafer. A force (or touch) sensor measures contact force applied by the probe to the wafer (or the moment) when the probe physically contacts the wafer. A plurality of drift sensors are provided for calculating probe vs. wafer alignment drift in real-time during measurements.

    Abstract translation: 用于在半导体晶片上进行在线纳米结构的系统。 将晶片支撑件或垂直晶片定位器附接到晶片台。 SEM柱，光学显微镜和多个纳米探针定位器都连接到天花板。 纳米探针定位器具有一个纳米探针，其被配置用于物理接触晶片上的选定点。 当探针物理接触晶片时，力（或触摸）传感器测量由探针施加到晶片的接触力（或瞬间）。 提供多个漂移传感器用于在测量期间实时地计算探针与晶片对准漂移。

    Scanning electron microscope
    14.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US08766184B2

    公开(公告)日：2014-07-01

    申请号：US13994811

    申请日：2011-11-02

    Applicant: Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

    Inventor： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

    IPC: H01J37/21 ,  H01J37/20

    CPC classification number: H01J37/21 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/20 ,  H01J2237/208 ,  H01J2237/2605

    Abstract: With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

    Abstract translation: 使用采用诸如涡轮分子泵，离子泵或旋转泵等通常可用的排气系统的扫描电子显微镜（SEM）等，实现了能够安全地执行观察或吸附的装置 目标物质很稀少。 此外，通过为设备提供探针，用于用预定气体替换样品室中的气氛的装置，通过检测到用于形成图像的装置，实现了具有放电风险的安全SEM低 离子电流和吸收电流的检测。 此外，提供了用于控制施加到探针的电压的极性的装置。 此外，提供了一种用于根据真空度来控制施加到探针的电压的值的控制装置。

    Focused ion beam system and sample processing method using the same
    16.
    发明授权
    Focused ion beam system and sample processing method using the same 有权
    聚焦离子束系统和样品处理方法使用相同

    公开(公告)号：US08581206B2

    公开(公告)日：2013-11-12

    申请号：US12707024

    申请日：2010-02-17

    Applicant: Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    Inventor： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    IPC: G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

    CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

    Abstract: A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

    Abstract translation: 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

    SCANNING ELECTRON MICROSCOPE
    17.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20130284923A1

    公开(公告)日：2013-10-31

    申请号：US13994811

    申请日：2011-11-02

    Applicant: Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

    Inventor： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

    IPC: H01J37/18

    CPC classification number: H01J37/21 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/20 ,  H01J2237/208 ,  H01J2237/2605

    Abstract: With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

    Abstract translation: 使用采用诸如涡轮分子泵，离子泵或旋转泵等通常可用的排气系统的扫描电子显微镜（SEM）等，实现了能够安全地执行观察或吸附的装置 目标物质很稀少。 此外，通过为设备提供探针，用于用预定气体替换样品室中的气氛的装置，通过检测到用于形成图像的装置，实现了具有放电风险的安全SEM低 离子电流和吸收电流的检测。 此外，提供了用于控制施加到探针的电压的极性的装置。 此外，提供了一种用于根据真空度来控制施加到探针的电压的值的控制装置。

    Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit
    19.
    发明申请
    Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit 有权
    使用金属针阵列进行样品提取和电路编辑的方法和设备

    公开(公告)号：US20130199034A1

    公开(公告)日：2013-08-08

    申请号：US13366316

    申请日：2012-02-04

    Applicant: Mehdi M. Yazdanpanah ,  Romaneh Jalilian

    Inventor： Mehdi M. Yazdanpanah ,  Romaneh Jalilian

    IPC: B23D81/00 ,  H05K3/10

    CPC classification number: H05K3/222 ,  G01N35/10 ,  H01J2237/208 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01L21/76892 ,  H05K2201/0248 ,  Y10T29/49117 ,  Y10T29/49155 ,  Y10T29/49718 ,  Y10T29/49721 ,  Y10T29/49726 ,  Y10T29/4973

    Abstract: Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.

    Abstract translation: 本发明的实施例提供了在控制环境（例如聚焦离子束的真空室）中恢复附接到操纵器的探针的方法和装置，而不需要打开真空室。 本发明的另一个实施方案教导了在FIB真空室内的纳米针阵列中构造和应用各种形状的纳摩耳。 在另一个实施例中，本发明通过使用包含在相同受控空间中的纳米针阵列（作为纳米线供应）的纳米针通过再纳米布线来教导完成的和氧化物涂覆的电路板的编辑和校正。 在该实施例中，纳米针阵列中的单个纳米针由操纵器操纵并且以这样的方式放置以在期望的点之间进行电接触。

Patent Agency Ranking