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公开(公告)号：US20170153145A1
公开(公告)日：2017-06-01
申请号：US15360722
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Anatoly Shchemelinin , Ilya Bezel , Kenneth P. Gross
CPC classification number: G01J5/10 , G01J5/0003 , G01J5/524 , G01J2005/0077 , G01J2005/103
Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.
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公开(公告)号：US20140374596A1
公开(公告)日：2014-12-25
申请号：US14375065
申请日：2013-01-29
Applicant: MITSUBISHI MATERIALS CORPORATION
Inventor： Kazuyoshi Tari , Mototaka Ishikawa , Keiji Shirata , Kenzo Nakamura
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.
Abstract translation: 提供一种能够即使在将引线连接到其一侧时也能够以高精度测量被测量物体的温度的红外线传感器。 红外线传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。
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Patent Agency Ranking
公开(公告)号：US20230314232A1
公开(公告)日：2023-10-05
申请号：US18110364
申请日：2023-02-15
Applicant: InnoLux Corporation
Inventor： Chin-Lung TING , Te-Yu LEE , Yu-Tsung LIU
CPC classification number: G01J5/20 , G01J5/0853 , G01J2005/103
Abstract: The present disclosure provides a sensing device including a substrate and a sensing pixel. The sensing pixel is disposed on the substrate and includes an electrode and a thermistor. The thermistor is electrically connected to the electrode and is separated from the substrate by an air gap. When the sensing pixel is operated in a period, the electrode receives a voltage, and a part of the thermistor moves toward the substrate, such that the thermistor is in thermal conduction with the substrate.
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公开(公告)号：US20230255114A1
公开(公告)日：2023-08-10
申请号：US18070505
申请日：2022-11-29
Applicant: Sumitomo Electric Industries, Ltd.
Inventor： Kyohei KAKUYAMA , Kotaro HIROSE , Masahiro ADACHI
CPC classification number: H01L35/32 , G01J5/14 , G01J2005/103
Abstract: An optical sensor includes a support film, a thermoelectric conversion material portion, a heat sink, a light absorption film, a first electrode, and a second electrode. The thermoelectric conversion material portion includes a plurality of first material layers and a plurality of second material layers. The support film includes a first layer arranged on the heat sink side in a thickness direction and configured with a phononic structure having a large number of holes, and an insulating second layer arranged on the first layer and in contact with the thermoelectric conversion material portion.
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15.发明申请公开(公告)号：US20170317137A1
公开(公告)日：2017-11-02
申请号：US15581022
申请日：2017-04-28
Inventor： Jean-Jacques YON
IPC: H01L27/146 , G01J5/10 , G01J5/08
CPC classification number: H01L27/14698 , G01J5/024 , G01J5/045 , G01J5/0853 , G01J5/10 , G01J5/20 , G01J2005/103 , H01L27/1462
Abstract: A method makes an electromagnetic radiation detecting device including at least one thermal detector with an absorbent membrane suspended above a substrate, intended to be located in a sealed cavity. The method includes depositing, on the substrate, a gettering metallic layer including a metallic material with a gettering effect; depositing a carbonaceous sacrificial layer of amorphous carbon on the gettering metallic layer; depositing at least one sacrificial mineral layer on the carbonaceous sacrificial layer; chemical-mechanical planarization of the sacrificial mineral layer; fabricating the thermal detector so that the absorbent membrane is produced on the sacrificial mineral layer; removing the sacrificial mineral layer; and removing the carbonaceous sacrificial layer.
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公开(公告)号：US20170167922A1
公开(公告)日：2017-06-15
申请号：US15355835
申请日：2016-11-18
Applicant: ULIS
Inventor： Sébastien Cortial , Michel Vilain
IPC: G01J5/10
CPC classification number: G01J5/10 , G01J5/024 , G01J5/045 , G01J5/20 , G01J2005/103
Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
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公开(公告)号：US09568371B2
公开(公告)日：2017-02-14
申请号：US14375065
申请日：2013-01-29
Applicant: MITSUBISHI MATERIALS CORPORATION
Inventor： Kazuyoshi Tari , Mototaka Ishikawa , Keiji Shirata , Kenzo Nakamura
IPC: G01J5/00 , G01J5/10 , G01J5/08 , G01J5/06 , H05K1/02 , H01L37/02 , G01J5/20 , H01L27/144 , G03G15/20 , H05K1/18
CPC classification number: G01J5/10 , G01J5/0022 , G01J5/06 , G01J5/0803 , G01J2005/103 , G01J2005/206 , G03G15/2039 , G03G2215/00772 , H01L27/144 , H01L37/02 , H05K1/0271 , H05K1/189 , H05K2201/068 , H05K2201/09136 , H05K2201/09781
Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.
Abstract translation: 提供一种能够即使在将引线连接到其一侧时也能够以高精度测量被测量物体的温度的红外线传感器。 红外线传感器包括绝缘膜; 第一和第二热敏元件，设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对，并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。
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