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公开(公告)号：US20170167922A1
公开(公告)日：2017-06-15
申请号：US15355835
申请日：2016-11-18
Applicant: ULIS
Inventor： Sébastien Cortial , Michel Vilain
IPC: G01J5/10
CPC classification number: G01J5/10 , G01J5/024 , G01J5/045 , G01J5/20 , G01J2005/103
Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
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公开(公告)号：US11359971B2
公开(公告)日：2022-06-14
申请号：US16468537
申请日：2017-12-29
Inventor： Sébastien Cortial , Marc Guillaumont , Denis Pelenc , Xavier Zucchi
IPC: G01J5/20 , G01J5/04 , G01N21/3504
Abstract: An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.
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3.发明申请公开(公告)号：US20200088585A1
公开(公告)日：2020-03-19
申请号：US16468537
申请日：2017-12-29
Inventor： Sébastien Cortial , Marc Guillaumont , Denis Pelenc , Xavier Zucchi
IPC: G01J5/04 , G01N21/3504 , G01J5/20
Abstract: An infrared radiation detector includes an array of elementary imaging bolometric detectors, each of the elementary bolometric detectors being formed of a bolometric membrane including a film made of vanadium oxide VOx, having a resistivity in the range from 6 ohm·cm to 50 ohm·cm, said membrane being suspended above a substrate integrating a signal for reading out the signal generated by said elementary detectors and for sequentially addressing the elementary detectors. The detector includes at least one getter intended to ensure the trapping of residual gas during and after the forming of the detector, and includes a hermetically-sealed cavity having said array and said at least one getter housed therein, having an upper cap including a window transparent to infrared radiation, said cap being sealed by means of a seal on a chip supporting the array of elementary detectors or on a package at the bottom of which the chip supporting the array of elementary detectors has been attached, said cavity being under vacuum or a low pressure.
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公开(公告)号：US09869593B2
公开(公告)日：2018-01-16
申请号：US15355835
申请日：2016-11-18
Applicant: ULIS
Inventor： Sébastien Cortial , Michel Vilain
CPC classification number: G01J5/10 , G01J5/024 , G01J5/045 , G01J5/20 , G01J2005/103
Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
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