公开(公告)号：US09929196B2

公开(公告)日：2018-03-27

申请号：US15400278

申请日：2017-01-06

Applicant: Ulis ,  Commissariat A L'Energie Atomique Et Aux Energies Alternatives

Inventor： Michel Vilain ,  Jérôme Favier ,  Jean-Jacques Yon ,  Laurent Frey

IPC: G01J5/20 ,  G01J5/02 ,  H01L27/146 ,  G01J5/04

CPC classification number: H01L27/14618 ,  G01J5/024 ,  G01J5/045 ,  G01J5/20 ,  G01J2005/204 ,  H01L27/1462 ,  H01L27/14629 ,  H01L27/14649 ,  H01L27/14685 ,  H01L27/14687

Abstract: A method of manufacturing a detector capable of detecting a wavelength range [λ8; λ14] centered on a wavelength λ10, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [Δ8; λ14], the second and third optical structures having equivalent refraction indexes at wavelength λ10 respectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.

公开(公告)号：US20170167922A1

公开(公告)日：2017-06-15

申请号：US15355835

申请日：2016-11-18

Applicant: ULIS

Inventor： Sébastien Cortial ,  Michel Vilain

IPC: G01J5/10

CPC classification number: G01J5/10 ,  G01J5/024 ,  G01J5/045 ,  G01J5/20 ,  G01J2005/103

Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.

公开(公告)号：US09442020B2

公开(公告)日：2016-09-13

申请号：US13771950

申请日：2013-02-20

Applicant: ULIS

Inventor： Alain Durand ,  Michel Vilain ,  Christophe Minassian

IPC: H04N5/33 ,  G01J5/22 ,  G01J5/00 ,  G01J5/24

CPC classification number: G01J5/24 ,  G01J5/22 ,  G01J2005/0048 ,  H04N5/33

Abstract: A method for detecting infrared radiation includes the steps of: providing a resistive bolometer retina including a plurality of resistive bolometers suspended above a substrate of a bolometric detector; acquiring the infrared radiation by the resistive bolometer retina to produce a plurality of raw read signals provided by the bolometers; correcting a response dispersion of the resistive bolometers in the raw read signals using a gain table, each gain of the gain table being associated with a bolometer of the resistive bolometer retina.

Abstract translation: 一种检测红外线辐射的方法包括以下步骤：提供一种电阻式辐射热量计视网膜，其包括悬置在测温检测器基板上方的多个电阻辐射计; 通过电阻式辐射热量计视网膜获取红外辐射以产生由辐射热计提供的多个原始读取信号; 使用增益表校正原始读取信号中的电阻辐射计的响应色散，增益表的每个增益与电阻辐射热计视网膜的测辐射热谱相关联。

公开(公告)号：US08987668B2

公开(公告)日：2015-03-24

申请号：US14182927

申请日：2014-02-18

Applicant: ULIS

Inventor： Michel Vilain ,  Patrick Robert

IPC: G01J5/00 ,  H01L25/00 ,  G01T5/00 ,  G01J5/20 ,  G01J5/22

CPC classification number: G01J5/20 ,  G01J5/22 ,  H04N5/33 ,  H04N5/3655

Abstract: An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from −30° C.-90° C.

Abstract translation: 一种红外检测器，包括检测测辐射热表阵列，每个探测辐射计具有悬浮在基板上方的测温膜，并与每个测辐射热计相关联：检测分支，包括测辐射热计和根据电压设定点执行偏置的电路，补偿分支，包括 对基板进行热处理的补偿测辐射热器，根据电压设定点执行偏置的电路，通过积分流过所述分支的电流之间的差产生电压的积分器，产生取决于基板温度的量的电路，包括： 对基板进行热处理的测辐射热仪，以及用于偏置测辐射热计的电路，以及根据所述量产生电压设定点的电路。 当阵列暴露于均匀参考场景时，流经所述分支的电流之间的差异的平均值在-30°C-90°C的衬底温度范围内在积分器动态范围内。

公开(公告)号：US09869593B2

公开(公告)日：2018-01-16

申请号：US15355835

申请日：2016-11-18

Applicant: ULIS

Inventor： Sébastien Cortial ,  Michel Vilain

IPC: G01J5/02 ,  G01J5/10 ,  G01J5/04 ,  G01J5/20

CPC classification number: G01J5/10 ,  G01J5/024 ,  G01J5/045 ,  G01J5/20 ,  G01J2005/103

Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.

公开(公告)号：US09243960B2

公开(公告)日：2016-01-26

申请号：US14167160

申请日：2014-01-29

Applicant: ULIS

Inventor： Benoît Dupont ,  Michel Vilain

IPC: G01J5/02 ,  G01J5/22 ,  G01J5/24 ,  H04N5/33 ,  H04N5/365

CPC classification number: G01J5/22 ,  G01J5/24 ,  H04N5/33 ,  H04N5/3651

Abstract: A method for detecting infrared radiation by using an array of bolometers. The following steps are used to read a bolometer of the array of bolometers: biasing the bolometer at a predetermined voltage in order to make current flow through the bolometer; subtracting a common-mode current from the current that flows through the bolometers; and producing a voltage by integrating the difference between the current that flows through the bolometers and the common-mode current.

Abstract translation: 一种利用辐射计阵列检测红外辐射的方法。 以下步骤用于读取辐射热量计阵列的测辐射热计：将测辐射热计偏置在预定电压，以使电流流过测辐射热计; 从流经测辐射热计的电流减去共模电流; 并通过积分流过测角热量的电流和共模电流之间的差来产生电压。

公开(公告)号：US20140239180A1

公开(公告)日：2014-08-28

申请号：US14182927

申请日：2014-02-18

Applicant: ULIS

Inventor： Michel Vilain ,  Patrick Robert

IPC: G01J5/20

CPC classification number: G01J5/20 ,  G01J5/22 ,  H04N5/33 ,  H04N5/3655

Abstract: An infrared detector including an array of detection bolometers each having a bolometric membrane suspended above a substrate, and associated with each bolometer: a detection branch, including the bolometer and a circuit performing a biasing according to a voltage set point, a compensation branch, including a compensation bolometer thermalized to the substrate, a circuit performing a biasing according to a voltage set point, an integrator for generating a voltage by integrating a difference between the currents flowing through said branches, a circuit generating a quantity depending on substrate temperature, including: a bolometer thermalized to the substrate, and a circuit for biasing the bolometer, and a circuit for generating the voltage set points according to said quantity. When the array is exposed to a uniform reference scene, the average of the differences between currents flowing through said branches is within the integrator dynamic range for a substrate temperature range from −30° C.-90° C.

Abstract translation: 一种红外检测器，包括检测测辐射热表阵列，每个探测辐射计具有悬浮在基板上方的测温膜，并与每个测辐射热计相关联：检测分支，包括测辐射热计和根据电压设定点执行偏置的电路，补偿分支，包括 对基板进行热处理的补偿测辐射热器，根据电压设定点执行偏置的电路，通过积分流过所述分支的电流之间的差产生电压的积分器，产生取决于基板温度的量的电路，包括： 对基板进行热处理的测辐射热仪，以及用于偏置测辐射热计的电路，以及根据所述量产生电压设定点的电路。 当阵列暴露于均匀参考场景时，流经所述分支的电流之间的差异的平均值在-30°C-90°C的衬底温度范围内在积分器动态范围内。

公开(公告)号：US20130218500A1

公开(公告)日：2013-08-22

申请号：US13771950

申请日：2013-02-20

Applicant: ULIS

Inventor： Alain Durand ,  Michel Vilain ,  Christophe Minassian

IPC: G01J5/24

CPC classification number: G01J5/24 ,  G01J5/22 ,  G01J2005/0048 ,  H04N5/33

Abstract: A method corrects a gain table by a correction of the response dispersion of resistive bolometers of a bolometric detector of a bolometer retina.The method includes: acquiring read signals from the retina corresponding to a substantially temperature-uniform scene; calculating a correction table g according to relation: g  ( i , j ) = R a   c   _   shut  ( i , j ) R  a   c   _   ref  ( i , j ) · TCR ref  ( i , j ) TCR shut  ( i , j ) and correcting the gain table according to relation: G shut  ( i , j ) = g  ( i , j ) · G ref  ( i , j ) N where: (i, j) represent the coordinates of the bolometers in the retina and the tables; Gref and Gshut respectively are the gain table before and after correction; Rac—shut(i, j) and Rac—ref(i, j) are the resistances of bolometer (i, j) at the time of acquisition of the signals and at a previous time; TCRshut(i, j) and TCRref(i, j) are the temperature variation coefficients of bolometer (i, j) at the time of acquisition of the signals and at a previous time; N is a scalar factor for normalizing gain table Gshut.

Abstract translation: 一种方法通过校正辐射热度计视网膜的测温检测器的电阻辐射热计的响应色散校正增益表。 该方法包括：从对应于基本上温度均匀的场景的视网膜获取读取信号; 根据关系式计算校正表g：g（i，j）= R（a，j）R（a，j） j）·TCR参考（i，j）TCR闭（i，j）并根据关系校正增益表：G shut（i，j）= g（i，j）·G ref ，j）N其中：（i，j）表示视网膜和表中的辐射热仪的坐标; Gref和Gshut分别是校正前后的增益表。 Rac-shut（i，j）和Rac-ref（i，j）是在获取信号时和前一时间的测辐射热计（i，j）的电阻; TCRshut（i，j）和TCRref（i，j）是在获取信号时和前一时间的测辐射热计（i，j）的温度变化系数; N是用于归一化增益表Gshut的标量因子。