公开(公告)号：US11253952B2

公开(公告)日：2022-02-22

申请号：US16408276

申请日：2019-05-09

Applicant: Samsung Display Co., Ltd.

Inventor： Akifumi Sangu ,  Alexander Voronov ,  Hyoung-Joo Kim ,  Eun Sun Choi ,  Emil Aslanov ,  Gyoo Wan Han

IPC: B23K26/064 ,  G02B27/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/073 ,  B23K26/082

Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.

公开(公告)号：US09389197B2

公开(公告)日：2016-07-12

申请号：US14019476

申请日：2013-09-05

Applicant: Samsung Display Co., Ltd.

Inventor： Alexander Voronov ,  Gyoo-Wan Han ,  Ji-Hun Jung

IPC: G01R27/08 ,  G01N27/20 ,  G01N27/02 ,  G01N19/08 ,  G01N21/88 ,  G01N23/18

CPC classification number: G01N27/20 ,  G01N19/08 ,  G01N21/88 ,  G01N23/18 ,  G01N27/02

Abstract: A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.

Abstract translation: 用于检测阻挡膜的缺陷的方法包括制备包括电极和覆盖电极的阻挡膜的器件，允许带电介质接触阻挡膜的表面，并测量电荷流动之间的电流流动的变化 介质和电极。

公开(公告)号：US09347886B2

公开(公告)日：2016-05-24

申请号：US14079522

申请日：2013-11-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Alexander Voronov ,  Dmitry Maslov ,  Gyoo-Wan Han

IPC: H01L21/66 ,  G01N21/64 ,  C23C14/24 ,  C23C14/54 ,  C23C14/56

CPC classification number: G01N21/6489 ,  C23C14/24 ,  C23C14/547 ,  C23C14/568

Abstract: An apparatus for monitoring deposition rate, an apparatus including the same, for depositing an organic layer, a method of monitoring deposition rate, and a method of manufacturing an organic light emitting display apparatus using the same, are provided. The deposition rate monitoring apparatus for measuring deposition rate of a deposition material discharged from a deposition source, includes: a light source for irradiating light having a wavelength within a photoexcitation bandwidth of the deposition material; a first optical system for irradiating the light emitted from the light source toward the discharged deposition material; a second optical system for collecting the light emitted from the deposition material; and a first light sensor for detecting the amount of the light which is emitted from the deposition material and collected in the second optical system.

Abstract translation: 提供了一种用于监测沉积速率的装置，包括其的装置，用于沉积有机层，监测沉积速率的方法，以及制造使用其的有机发光显示装置的方法。 用于测量从沉积源排出的沉积材料的沉积速率的沉积速率监测装置包括：用于照射具有在沉积材料的光激发带宽内的波长的光的光源; 第一光学系统，用于将从光源发射的光朝向排出的沉积材料照射; 用于收集从沉积材料发射的光的第二光学系统; 以及第一光传感器，用于检测从沉积材料发射并收集在第二光学系统中的光量。

公开(公告)号：US20140295601A1

公开(公告)日：2014-10-02

申请号：US14225143

申请日：2014-03-25

Applicant: Samsung Display Co., Ltd.

Inventor： Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L51/00

CPC classification number: H01L51/0013

Abstract: A method of forming an organic light emitting pattern of an organic electro-luminescence display according to an exemplary embodiment of the present invention includes preparing a display substrate in which a region where a first organic light emitting material is to be formed is defined, preparing a temporal transfer substrate (TTS) that is a transfer subject on which the first organic light emitting material is to be transferred, forming the first organic light emitting material on the temporal transfer substrate, applying heat to a portion other than a first region of the temporal transfer substrate to remove the first organic light emitting material formed on the portion other than the first region, disposing the temporal transfer substrate and the display substrate to closely face each other, and applying heat to the temporal transfer substrate to transfer the organic light emitting material on the display substrate.

Abstract translation: 根据本发明的示例性实施例的形成有机电致发光显示器的有机发光图案的方法包括制备其中要形成第一有机发光材料的区域的显示基板，制备 时间转移衬底（TTS），其是要转移第一有机发光材料的转移对象，在时间转移衬底上形成第一有机发光材料，向除了第一有机发光材料的第一区域以外的部分施加热量 转移基板以除去形成在第一区域之外的部分上的第一有机发光材料，将时间转移基板和显示基板彼此紧密相对地设置，并且向时间转移基板施加热量以转移有机发光材料 在显示基板上。

公开(公告)号：US12298256B2

公开(公告)日：2025-05-13

申请号：US18071749

申请日：2022-11-30

Applicant: Samsung Display Co., LTD.

Inventor： Alexander Voronov ,  Jooseob Ahn ,  Hyeonsuk Guak ,  Kihun Kim ,  Jekil Ryu ,  Hyeongmin Ahn

IPC: G01N21/94 ,  G01N21/956 ,  G06T7/521 ,  G06T7/55 ,  G01N21/95

Abstract: An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.

公开(公告)号：US12269115B2

公开(公告)日：2025-04-08

申请号：US16657222

申请日：2019-10-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Hyoung-Joo Kim ,  Alexander Voronov ,  Eun Sun Choi ,  Gyoo Wan Han

IPC: B23K26/06 ,  B23K26/0622 ,  B23K26/352 ,  G02B5/10 ,  G02B17/08 ,  G02B19/00 ,  G02B26/10

Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.

公开(公告)号：US20230194437A1

公开(公告)日：2023-06-22

申请号：US18071749

申请日：2022-11-30

Applicant: Samsung Display Co., LTD.

Inventor： Alexander Voronov ,  Jooseob Ahn ,  Hyeonsuk Guak ,  Kihun Kim ,  Jekil Ryu ,  Hyeongmin Ahn

IPC: G01N21/94 ,  G01N21/956 ,  G06T7/521 ,  G06T7/55

CPC classification number: G01N21/94 ,  G01N21/956 ,  G06T7/521 ,  G06T7/55 ,  G01N2021/9513

Abstract: An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.

公开(公告)号：US10557756B2

公开(公告)日：2020-02-11

申请号：US16154807

申请日：2018-10-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Emil Aslanov ,  Alexander Voronov ,  Gyoo Wan Han

IPC: G01J9/02

Abstract: A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.

公开(公告)号：US09460930B2

公开(公告)日：2016-10-04

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/00 ,  H01L21/268 ,  B23K26/06 ,  H01L21/02

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。

公开(公告)号：US20150017816A1

公开(公告)日：2015-01-15

申请号：US14159386

申请日：2014-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Nang-Lyeom Oh ,  Je-Kil Ryu ,  Alexander Voronov ,  Gyoo-Wan Han

IPC: H01L21/268 ,  H01L21/263

CPC classification number: H01L21/268 ,  B23K26/0648 ,  H01L21/02532 ,  H01L21/02675 ,  H01L21/02691

Abstract: A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.

Abstract translation: 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。