公开(公告)号：US20230194437A1

公开(公告)日：2023-06-22

申请号：US18071749

申请日：2022-11-30

Applicant: Samsung Display Co., LTD.

Inventor： Alexander Voronov ,  Jooseob Ahn ,  Hyeonsuk Guak ,  Kihun Kim ,  Jekil Ryu ,  Hyeongmin Ahn

IPC: G01N21/94 ,  G01N21/956 ,  G06T7/521 ,  G06T7/55

CPC classification number: G01N21/94 ,  G01N21/956 ,  G06T7/521 ,  G06T7/55 ,  G01N2021/9513

Abstract: An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.