SAMPLE OBSERVATION DEVICE
    11.
    发明申请
    SAMPLE OBSERVATION DEVICE 审中-公开
    样品观察装置

    公开(公告)号:US20160306155A1

    公开(公告)日:2016-10-20

    申请号:US15189354

    申请日:2016-06-22

    Inventor: Yoshimasa SUZUKI

    CPC classification number: G02B21/14 G02B21/24 G02B21/26 G02B21/365 H04N5/2254

    Abstract: A sample observation device includes an illumination optical system and an observation optical system. The illumination optical system includes a light source, a condenser lens, and an aperture member. The observation optical system includes an objective lens and an imaging lens. The aperture member has a light-shielding part or a darkening part, and a transmission part. The transmission part is disposed asymmetrically with respect to an optical axis of the illumination optical system. An image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens. An image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens.

    Abstract translation: 样本观察装置包括照明光学系统和观察光学系统。 照明光学系统包括光源,聚光透镜和光圈构件。 观察光学系统包括物镜和成像透镜。 光圈构件具有遮光部分或变暗部分和透射部分。 透射部相对于照明光学系统的光轴不对称地设置。 透镜部的内缘的图像形成在物镜的光瞳的外缘的内侧。 透镜部的外缘的图像形成在物镜的光瞳的外缘的外侧。

    DATA ACQUISITION APPARATUS
    12.
    发明申请

    公开(公告)号:US20210247619A1

    公开(公告)日:2021-08-12

    申请号:US17149357

    申请日:2021-01-14

    Inventor: Yoshimasa SUZUKI

    Abstract: A data acquisition apparatus includes an illumination device, a first beam splitter, a measurement unit, and a photodetector. A measurement optical path and a reference optical path are positioned between the illumination device and the photodetector. In the first beam splitter, light traveling in a first direction and light traveling in a second direction are generated from incident light. The measurement optical path is positioned in the first direction, the reference optical path is positioned in the second direction, and the measurement unit is disposed on the measurement optical path. In the optical surface of the first beam splitter, an incident position of light emitted from the illumination device changes with time, and the angle formed by light propagating through the measurement optical path and the optical axis of the measurement optical path changes with change in the incident position.

    SAMPLE OBSERVATION APPARATUS
    13.
    发明申请

    公开(公告)号:US20210199944A1

    公开(公告)日:2021-07-01

    申请号:US17149001

    申请日:2021-01-14

    Inventor: Yoshimasa SUZUKI

    Abstract: A sample observation apparatus includes a light source unit, an illumination optical system, an observation optical system, a light detection element, a scanning unit, a holding member, and an image processing device. A light spot is formed by the illumination optical system. The scanning unit moves the light spot and the holding member relative to each other. A pupil of the observation optical system and the light detection element are positioned at a position conjugate to a pupil position of the illumination optical system. The image processing device generates an image of a sample based on a predetermined image and a filter, and the predetermined image is an image based on a signal output from the light detection element. The filter includes a first region and a second region, and a value in the first region is greater than a value in the second region.

    SAMPLE SHAPE MEASURING METHOD AND SAMPLE SHAPE MEASURING APPARATUS

    公开(公告)号:US20180313643A1

    公开(公告)日:2018-11-01

    申请号:US16028936

    申请日:2018-07-06

    Abstract: A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.

    SPECIMEN OBSERVATION APPARATUS AND SPECIMEN OBSERVATION METHOD

    公开(公告)号:US20180045944A1

    公开(公告)日:2018-02-15

    申请号:US15794877

    申请日:2017-10-26

    Inventor: Yoshimasa SUZUKI

    CPC classification number: G02B21/14 C12M41/46 C12Q1/02 G02B21/367

    Abstract: A specimen observation apparatus includes: a light source; an illumination optical system; a stage; an imaging optical system; and a reflection member disposed at a position opposed to the imaging optical system across the stage. The illumination optical system is disposed so as to apply illumination light from the light source to a specimen. The imaging optical system is disposed at a position at which the illumination light that is transmitted through the specimen and thereafter reflected by the reflection member to be transmitted through the specimen again enters, and is configured to form an optical image of the specimen. The optical image is formed in a state in which a position of the specimen and a focus position of the imaging optical system are different from each other.

    SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

    公开(公告)号:US20170184832A1

    公开(公告)日:2017-06-29

    申请号:US15460743

    申请日:2017-03-16

    Inventor: Yoshimasa SUZUKI

    CPC classification number: G02B21/12 G02B5/005 G02B21/02 G02B21/125 G02B21/14

    Abstract: A sample observation device includes an illumination optical system and an observation optical system, and the illumination optical system includes a light source, a condenser lens, and an aperture member, and the observation optical system includes an objective lens and an imaging lens, and the aperture member has a light-shielding part or a darkening part, and a transmission part, and the transmission part is located outside of an outer edge of the light-shielding part or the darkening part, and an image of an inner edge of the transmission part is formed inside of an outer edge of a pupil of the objective lens, and an image of an outer edge of the transmission part is formed outside of the outer edge of the pupil of the objective lens, and the following conditional expression is satisfied. 0.005≦Ratio≦0.9.

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