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公开(公告)号：US10801953B2
公开(公告)日：2020-10-13
申请号：US16245695
申请日：2019-01-11
Applicant: KLA-Tencor Corporation
Inventor： David Y. Wang , Alexander Buettner , Stilian Ivanov Pandev , Emanuel Saerchen , Andrei V. Shchegrov , Barry Blasenheim
IPC: G01J3/28 , G01N21/3563 , H01L21/66 , G01N21/21
Abstract: Methods and systems for performing semiconductor measurements based on hyperspectral imaging are presented herein. A hyperspectral imaging system images a wafer over a large field of view with high pixel density over a broad range of wavelengths. Image signals collected from a measurement area are detected at a number of pixels. The detected image signals from each pixel are spectrally analyzed separately. In some embodiments, the illumination and collection optics of a hyperspectral imaging system include fiber optical elements to direct illumination light from the illumination source to the measurement area on the surface of the specimen under measurement and fiber optical elements to image the measurement area. In another aspect, a fiber optics collector includes an image pixel mapper that couples a two dimensional array of collection fiber optical elements into a one dimensional array of pixels at the spectrometer and the hyperspectral detector.
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公开(公告)号：US20200225151A1
公开(公告)日：2020-07-16
申请号：US16245695
申请日：2019-01-11
Applicant: KLA-Tencor Corporation
Inventor： David Y. Wang , Alexander Buettner , Stilian Ivanov Pandev , Emanuel Saerchen , Andrei V. Shchegrov , Barry Blasenheim
IPC: G01N21/3563 , G01J3/28 , H01L21/66 , G01N21/21
Abstract: Methods and systems for performing semiconductor measurements based on hyperspectral imaging are presented herein. A hyperspectral imaging system images a wafer over a large field of view with high pixel density over a broad range of wavelengths. Image signals collected from a measurement area are detected at a number of pixels. The detected image signals from each pixel are spectrally analyzed separately. In some embodiments, the illumination and collection optics of a hyperspectral imaging system include fiber optical elements to direct illumination light from the illumination source to the measurement area on the surface of the specimen under measurement and fiber optical elements to image the measurement area. In another aspect, a fiber optics collector includes an image pixel mapper that couples a two dimensional array of collection fiber optical elements into a one dimensional array of pixels at the spectrometer and the hyperspectral detector.
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公开(公告)号：US10215693B2
公开(公告)日：2019-02-26
申请号：US15382713
申请日：2016-12-18
Applicant: KLA-Tencor Corporation
Inventor： Shankar Krishnan , David Y. Wang
IPC: G01B11/28 , G01N21/3563 , G01J3/02 , G01J3/28 , G01N21/21 , G01N21/33 , G01N21/47 , G01B11/00 , G01N21/55 , G01N21/31
Abstract: Methods and systems for performing spectroscopic reflectometry measurements of semiconductor structures at infrared wavelengths are presented herein. In some embodiments measurement wavelengths spanning a range from 750 nanometers to 2,600 nanometers, or greater, are employed. In one aspect, reflectometry measurements are performed at oblique angles to reduce the influence of backside reflections on measurement results. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of wavelengths are detected with high signal to noise ratio by a single detector.
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公开(公告)号：US09857292B2
公开(公告)日：2018-01-02
申请号：US15344704
申请日：2016-11-07
Applicant: KLA-Tencor Corporation
Inventor： Lawrence Rotter , Klaus Flock , Muzammil Arain , David Y. Wang
CPC classification number: G01N21/23 , G01N21/211 , G01N21/9501 , G01N2021/213 , G01N2201/068 , G02B5/3083 , G02B5/3091 , G02F1/13363
Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
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公开(公告)号：US20170016815A1
公开(公告)日：2017-01-19
申请号：US15217549
申请日：2016-07-22
Applicant: KLA-Tencor Corporation
Inventor： Andrei V. Shchegrov , Lawrence D. Rotter , David Y. Wang , Andrei Veldman , Kevin Peterlinz , Gregory Brady , Derrick A. Shaughnessy
CPC classification number: G01N21/211 , G01B11/0616 , G01N21/4738 , G01N21/55 , G01N2021/213 , G03F7/70608 , G03F7/70625 , G03F7/70633
Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.
Abstract translation: 该系统包括被配置为照亮设置在样品台上的样品的表面的可调制照明源，被配置为检测从样品表面发出的照射的检测器，被配置为将来自可调节照明源的照明引导到 所述样品，集合光学器件被配置为将样品的表面的照射引导到所述检测器;以及调制控制系统，其通信地耦合到所述可调节照明源，其中所述调制控制系统被配置为调制所述可调节照明源的驱动电流 选择的调制频率，其适于产生具有选定的相干特征长度的照明。 此外，本发明包括多个光源的输出的时间顺序交错以产生用于多波长时间顺序光学测量的周期性脉冲串。
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Patent Agency Ranking
公开(公告)号：US09519093B2
公开(公告)日：2016-12-13
申请号：US14466369
申请日：2014-08-22
Applicant: KLA-Tencor Corporation
Inventor： Lawrence Rotter , Klaus Flock , Muzammil Arain , David Y. Wang
IPC: G01J4/00 , G02B5/30 , G01N21/21 , G02F1/13363
CPC classification number: G01N21/23 , G01N21/211 , G01N21/9501 , G01N2021/213 , G01N2201/068 , G02B5/3083 , G02B5/3091 , G02F1/13363
Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。
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公开(公告)号：US20150055123A1
公开(公告)日：2015-02-26
申请号：US14466369
申请日：2014-08-22
Applicant: KLA-Tencor Corporation
Inventor： Lawrence Rotter , Klaus Flock , Muzammil Arain , David Y. Wang
CPC classification number: G01N21/23 , G01N21/211 , G01N21/9501 , G01N2021/213 , G01N2201/068 , G02B5/3083 , G02B5/3091 , G02F1/13363
Abstract: A rotatable compensator configured to transmit non-collimated light over a broad range of wavelengths, including ultraviolet, with a high degree of retardation uniformity across the aperture is presented. In one embodiment, a rotatable compensator includes a stack of four individual plates in optical contact. The two thin plates in the middle of the stack are made from a birefringent material and are arranged to form a compound, zeroth order bi-plate. The remaining two plates are relatively thick and are made from an optically isotropic material. These plates are disposed on either end of the compound, zeroth order bi-plate. The low order plates minimize the sensitivity of retardation across the aperture to non-collimated light. Materials are selected to ensure transmission of ultraviolet light. The optically isotropic end plates minimize coherence effects induced at the optical interfaces of the thin plates.
Abstract translation: 提供了一种可旋转补偿器，其被配置为在宽范围的波长（包括紫外线）上传输非准直光，并且在整个孔径上具有高程度的延迟均匀性。 在一个实施例中，可旋转补偿器包括光学接触的四个单独板的堆叠。 堆叠中间的两个薄板由双折射材料制成并且被布置成形成复合物，零级双板。 剩余的两个板相对较厚并且由光学各向同性材料制成。 这些板设置在化合物的任一端，为零级双板。 低阶平板将通过光圈的延迟的灵敏度最小化为非准直光。 选择材料以确保紫外线的透射。 光学各向同性的端板最小化在薄板的光学界面处引起的相干效应。
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18.发明申请公开(公告)号：US20140375981A1
公开(公告)日：2014-12-25
申请号：US14043783
申请日：2013-10-01
Applicant: KLA-Tencor Corporation
Inventor： David Y. Wang , Klaus Flock , Lawrence Rotter , Shankar Krishnan , Johannes D. de Veer , Catalin Filip , Gregory Brady , Muzammil Arain , Andrei Shchegrov
IPC: G01N21/88
CPC classification number: G01N21/211 , G01B2210/56 , G01N21/9501 , G01N21/956 , G01N2021/214 , G01N2021/8848 , G01N2201/06113 , G01N2201/0636
Abstract: An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
Abstract translation: 一种装置包括（i）用于提供在从深紫外波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和朝向基于输出光束产生输出信号或图像的检测器的偏振状态来引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。
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公开(公告)号：US10969328B2
公开(公告)日：2021-04-06
申请号：US16284950
申请日：2019-02-25
Applicant: KLA-Tencor Corporation
Inventor： Andrei V. Shchegrov , Lawrence D. Rotter , David Y. Wang , Andrei Veldman , Kevin Peterlinz , Gregory Brady , Derrick A. Shaughnessy
Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.
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公开(公告)号：US09921104B2
公开(公告)日：2018-03-20
申请号：US15344825
申请日：2016-11-07
Applicant: KLA-Tencor Corporation
Inventor： Shankar Krishnan , Alexander Buettner , Kerstin Purrucker , David Y. Wang
CPC classification number: G01J3/189 , G01J3/0289 , G01J3/10 , G01J3/2803 , G01N21/255 , G01N21/27 , G01N33/00 , G01N2033/0095
Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
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