公开(公告)号：US20180051984A1

公开(公告)日：2018-02-22

申请号：US15784153

申请日：2017-10-15

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Shankar Krishnan ,  Kevin Peterlinz ,  Thaddeus Gerard Dziura ,  Noam Sapiens ,  Stilian Ivanov Pandev

IPC: G01B11/27 ,  H01L21/66 ,  G03F7/20 ,  G03F7/00

CPC classification number: G01B11/272 ,  G01B2210/56 ,  G03F7/0002 ,  G03F7/70141 ,  G03F7/70625 ,  H01L22/12 ,  H01L22/30

Abstract: Methods and systems for evaluating the performance of multiple patterning processes are presented. Patterned structures are measured and one or more parameter values characterizing geometric errors induced by the multiple patterning process are determined. In some examples, a single patterned target and a multiple patterned target are measured, the collected data fit to a combined measurement model, and the value of a structural parameter indicative of a geometric error induced by the multiple patterning process is determined based on the fit. In some other examples, light having a diffraction order different from zero is collected and analyzed to determine the value of a structural parameter that is indicative of a geometric error induced by a multiple patterning process. In some embodiments, a single diffraction order different from zero is collected. In some examples, a metrology target is designed to enhance light diffracted at an order different from zero.

公开(公告)号：US20170016815A1

公开(公告)日：2017-01-19

申请号：US15217549

申请日：2016-07-22

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Lawrence D. Rotter ,  David Y. Wang ,  Andrei Veldman ,  Kevin Peterlinz ,  Gregory Brady ,  Derrick A. Shaughnessy

IPC: G01N21/21 ,  G01B11/06 ,  G01N21/47 ,  G01N21/55

CPC classification number: G01N21/211 ,  G01B11/0616 ,  G01N21/4738 ,  G01N21/55 ,  G01N2021/213 ,  G03F7/70608 ,  G03F7/70625 ,  G03F7/70633

Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.

Abstract translation: 该系统包括被配置为照亮设置在样品台上的样品的表面的可调制照明源，被配置为检测从样品表面发出的照射的检测器，被配置为将来自可调节照明源的照明引导到 所述样品，集合光学器件被配置为将样品的表面的照射引导到所述检测器;以及调制控制系统，其通信地耦合到所述可调节照明源，其中所述调制控制系统被配置为调制所述可调节照明源的驱动电流 选择的调制频率，其适于产生具有选定的相干特征长度的照明。 此外，本发明包括多个光源的输出的时间顺序交错以产生用于多波长时间顺序光学测量的周期性脉冲串。

公开(公告)号：US10215688B2

公开(公告)日：2019-02-26

申请号：US15217549

申请日：2016-07-22

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Lawrence D. Rotter ,  David Y. Wang ,  Andrei Veldman ,  Kevin Peterlinz ,  Gregory Brady ,  Derrick A. Shaughnessy

IPC: G01J4/00 ,  G01N21/55 ,  G01N21/21 ,  G01B11/06 ,  G01N21/47 ,  G03F7/20

Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.

公开(公告)号：US09400246B2

公开(公告)日：2016-07-26

申请号：US13648768

申请日：2012-10-10

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Lawrence D. Rotter ,  David Y. Wang ,  Andrei Veldman ,  Kevin Peterlinz ,  Gregory Brady ,  Derrick Shaughnessy

IPC: G01J4/00 ,  G01N21/55 ,  G01B11/06 ,  G01N21/47 ,  G03F7/20

CPC classification number: G01N21/211 ,  G01B11/0616 ,  G01N21/4738 ,  G01N21/55 ,  G01N2021/213 ,  G03F7/70608 ,  G03F7/70625 ,  G03F7/70633

Abstract: The present invention may include a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.

Abstract translation: 本发明可以包括被配置为照亮设置在样品台上的样品的表面的可调节照明源，被配置为检测从样品的表面发出的照明的检测器，被配置为将来自可调节照明源的照明引导到 样品的表面，被配置为将样品的表面的照射引导到检测器的收集光学器件，以及通信地耦合到可调节照明源的调制控制系统，其中调制控制系统被配置为调制可调节照明的驱动电流 源，其以适于产生具有选定的相干特征长度的照明的选定调制频率。 此外，本发明包括多个光源的输出的时间顺序交错以产生用于多波长时间顺序光学测量的周期性脉冲串。

公开(公告)号：US09243886B1

公开(公告)日：2016-01-26

申请号：US13924204

申请日：2013-06-21

Applicant: KLA-Tencor Corporation

Inventor： Alexander Kuznetsov ,  Kevin Peterlinz ,  Andrei Shchegrov

IPC: G01B9/02 ,  G01N21/47 ,  G01N21/956

CPC classification number: G01N21/956 ,  G01B2210/56 ,  G01N21/4785 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/95623 ,  G03F7/70625 ,  H01L22/12

Abstract: One or more non-zero diffraction orders are selected, and these selected one or more zero or non-zero diffraction orders are selected for eliminating or obtaining corresponding zero or non-zero diffraction order terms or interference term from measurements from a periodic target using an optical metrology tool. The periodic target has a pitch, and the measurements contain a zero diffraction order and one or more non-zero diffraction order terms. Using the optical metrology tool, an incident beam is directed to positions on the target, and the measurements are obtained from the target in response to the incident beam. The measurements are processed to eliminate or obtain each zero or non-zero diffraction order term or interference term associated with each selected zero or non-zero diffraction order, resulting in a processed metrology signal. The positions are shifted from each other so as to cause the zero or non-zero diffraction order term or interference term corresponding to each selected zero or non-zero diffraction order to be eliminated or obtained.

Abstract translation: 选择一个或多个非零衍射级，并且选择这些选择的一个或多个零或非零衍射级，以从消除或获得来自周期性靶的测量的相应的零或非零衍射级项或干扰项使用 光学计量工具。 周期性目标具有间距，并且测量包含零衍射级和一个或多个非零衍射级项。 使用光学测量工具，入射光束被引导到目标上的位置，并且响应于入射光束从目标获得测量值。 处理测量以消除或获得与每个选定的零或非零衍射级相关联的每个零或非零衍射级项或干涉项，导致处理的度量信号。 这些位置彼此偏移，以便消除或获得与零或非零衍射级相对应的零或非零衍射级项或干涉项。

公开(公告)号：US20130169966A1

公开(公告)日：2013-07-04

申请号：US13648768

申请日：2012-10-10

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Lawrence D. Rotter ,  David Y. Wang ,  Andrei Veldman ,  Kevin Peterlinz ,  Gregory Brady ,  Derrick Shaughnessy

IPC: G01N21/55 ,  G01N21/47

CPC classification number: G01N21/211 ,  G01B11/0616 ,  G01N21/4738 ,  G01N21/55 ,  G01N2021/213 ,  G03F7/70608 ,  G03F7/70625 ,  G03F7/70633

Abstract: The present invention may include a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.

Abstract translation: 本发明可以包括被配置为照亮设置在样品台上的样品的表面的可调节照明源，被配置为检测从样品的表面发出的照明的检测器，被配置为将来自可调节照明源的照明引导到 样品的表面，被配置为将样品的表面的照射引导到检测器的收集光学器件，以及通信地耦合到可调节照明源的调制控制系统，其中调制控制系统被配置为调制可调节照明的驱动电流 源，其以适于产生具有选定的相干特征长度的照明的选定调制频率。 此外，本发明包括多个光源的输出的时间顺序交错以产生用于多波长时间顺序光学测量的周期性脉冲串。

公开(公告)号：US20190195782A1

公开(公告)日：2019-06-27

申请号：US16284950

申请日：2019-02-25

Applicant: KLA-Tencor Corporation

Inventor： Andrei V. Shchegrov ,  Lawrence D. Rotter ,  David Y. Wang ,  Andrei Veldman ,  Kevin Peterlinz ,  Gregory Brady ,  Derrick A. Shaughnessy

IPC: G01N21/21 ,  G03F7/20 ,  G01N21/47 ,  G01B11/06 ,  G01N21/55

CPC classification number: G01N21/211 ,  G01B11/0616 ,  G01N21/4738 ,  G01N21/55 ,  G01N2021/213 ,  G03F7/70608 ,  G03F7/70625 ,  G03F7/70633

Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.

公开(公告)号：US20130114085A1

公开(公告)日：2013-05-09

申请号：US13661752

申请日：2012-10-26

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Guorong Vera Zhuang ,  Johannes D. de Veer ,  Kevin Peterlinz ,  Shankar Krishnan

IPC: G01N21/55

CPC classification number: G01N21/55 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/556

Abstract: The present invention may include an illumination source, a detector, a selectably adjustable optical system including a dynamically adjustable illumination pupil of the illumination arm, a dynamically adjustable collection pupil of the collection arm, a dynamically adjustable illumination field stop of the illumination arm, a dynamically adjustable collection field stop of the collection arm, a sensor configured to measure one or more optical characteristics of one or more components of the optical system, and a control system configured to selectably dynamically adjust at least one of the illumination pupil, the collection pupil, the illumination field stop, the collection field stop, and a spectral radiance of the illumination source.

Abstract translation: 本发明可以包括照明源，检测器，可选择地调节的光学系统，其包括照明臂的动态可调节照明光瞳，收集臂的动态可调收集光瞳，照明臂的动态可调照明场停止， 收集臂的可动态调整的收集场停止，被配置为测量所述光学系统的一个或多个部件的一个或多个光学特性的传感器，以及被配置为可选择地动态地调整所述照明瞳孔，所述收集瞳孔 照明场停止，收集场停止以及照明源的光谱。

公开(公告)号：US09778213B2

公开(公告)日：2017-10-03

申请号：US14461416

申请日：2014-08-17

Applicant: KLA-Tencor Corporation

Inventor： Michael S. Bakeman ,  Andrei V. Shchegrov ,  Kevin Peterlinz ,  Thaddeus Gerard Dziura

IPC: G06F17/50 ,  G01N23/223 ,  G01N23/201

CPC classification number: G01N23/223 ,  G01N23/201 ,  G01N2223/6116

Abstract: Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.

公开(公告)号：US09228943B2

公开(公告)日：2016-01-05

申请号：US13661752

申请日：2012-10-26

Applicant: KLA-Tencor Corporation

Inventor： David Y. Wang ,  Guorong Vera Zhuang ,  Johannes D. de Veer ,  Kevin Peterlinz ,  Shankar Krishnan

IPC: G01B11/14 ,  G01N21/55 ,  G01N21/21

CPC classification number: G01N21/55 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/556

Abstract: The present invention may include an illumination source, a detector, a selectably adjustable optical system including a dynamically adjustable illumination pupil of the illumination arm, a dynamically adjustable collection pupil of the collection arm, a dynamically adjustable illumination field stop of the illumination arm, a dynamically adjustable collection field stop of the collection arm, a sensor configured to measure one or more optical characteristics of one or more components of the optical system, and a control system configured to selectably dynamically adjust at least one of the illumination pupil, the collection pupil, the illumination field stop, the collection field stop, and a spectral radiance of the illumination source.

Abstract translation: 本发明可以包括照明源，检测器，可选择地调节的光学系统，其包括照明臂的动态可调节照明光瞳，收集臂的动态可调收集光瞳，照明臂的动态可调照明场停止， 收集臂的可动态调整的收集场停止，被配置为测量所述光学系统的一个或多个部件的一个或多个光学特性的传感器，以及被配置为可选择地动态地调整所述照明瞳孔，所述收集瞳孔 照明场停止，收集场停止以及照明源的光谱。