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    Smart package
    11.
    发明授权
    Smart package 有权

    公开(公告)号：US10508773B2

    公开(公告)日：2019-12-17

    申请号：US16271339

    申请日：2019-02-08

    Applicant: ENTEGRIS, INC.

    Inventor： Joseph D. Sweeney ,  Edward Edmiston Jones ,  Joseph Robert Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Christopher Scannell

    IPC: G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

    Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

    CARBON MATERIALS FOR CARBON IMPLANTATION
    17.
    发明申请
    CARBON MATERIALS FOR CARBON IMPLANTATION 审中-公开
    用于碳化物的碳材料

    公开(公告)号：US20170069499A1

    公开(公告)日：2017-03-09

    申请号：US15354076

    申请日：2016-11-17

    Applicant: Entegris, Inc.

    Inventor： Joseph D. Sweeney ,  Oleg Byl ,  Robert Kaim

    IPC: H01L21/265 ,  C23C14/48 ,  C23C14/06 ,  H01J37/317

    CPC classification number: H01L21/265 ,  C23C14/06 ,  C23C14/0605 ,  C23C14/48 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/31701 ,  H01L21/2236

    Abstract: A method of implanting carbon ions into a target substrate, including: ionizing a carbon containing dopant material to produce a plasma having ions; optionally co-flowing an additional gas or series of gases with the carbon-containing dopant material; and implanting the ions into the target substrate. The carbon-containing dopant material is of the formula CwFxOyHz wherein if w=1, then x>0 and y and z can take any value, and wherein if w>1 then x or y is >0, and z can take any value. Such method significantly improves the efficiency of an ion implanter tool, in relation to the use of carbon source gases such as carbon monoxide or carbon dioxide.

    Abstract translation: 一种将碳离子注入目标衬底的方法，包括：使含碳的掺杂剂材料电离以产生具有离子的等离子体; 任选地将另外的气体或一系列气体与含碳掺杂剂材料共流动; 并将离子注入目标衬底。 含碳掺杂剂材料为CwFxOyHz，其中如果w = 1，则x> 0，y和z可以取任何值，并且其中如果w> 1，则x或y> 0，并且z可以取任何值 。 相对于碳源气体如一氧化碳或二氧化碳的使用，这种方法显着地提高了离子注入机工具的效率。

    PREPARATION OF HIGH PRESSURE BF3/H2 MIXTURES
    19.
    发明申请
    PREPARATION OF HIGH PRESSURE BF3/H2 MIXTURES 审中-公开
    高压BF3 / H2混合物的制备

    公开(公告)号：US20160085246A1

    公开(公告)日：2016-03-24

    申请号：US14891352

    申请日：2014-05-15

    Applicant: Entegris, Inc.

    Inventor： Oleg Byl ,  Joseph D. Sweeney

    IPC: G05D11/13 ,  F25J3/02

    CPC classification number: G05D11/133 ,  F17C2221/03 ,  F17C2223/035 ,  F17C2225/035 ,  F17C2227/04 ,  F17C2270/0518 ,  F25J3/0252 ,  G05D11/134 ,  G05D11/135 ,  G05D11/139 ,  Y02E60/324

    Abstract: Methods are described for filling gas mixture supply vessels with constituent gases to achieve precision compositions of the gas mixture, wherein the gas mixture comprises at least two constituent gases. Cascading fill techniques may be employed, involving flowing of gases from single source vessels to multiple target vessels, or from multiple source vessels to a single target vessel. The methods may be employed to form dopant gas mixtures, e.g., of boron trifluoride and hydrogen, for ion implantation applications.

    Abstract translation: 描述了用于将气体混合物供应容器与构成气体填充以实现气体混合物的精密组成的方法，其中气体混合物包括至少两种构成气体。 可以采用级联填充技术，包括将气体从单一源血管流动到多个靶血管，或从多个源血管流到单个靶血管。 可以采用这些方法来形成用于离子注入应用的掺杂剂气体混合物，例如三氟化硼和氢气。

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