公开(公告)号：US20200011482A1

公开(公告)日：2020-01-09

申请号：US16577711

申请日：2019-09-20

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US10247363B2

公开(公告)日：2019-04-02

申请号：US15549875

申请日：2016-02-12

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. Sweeney ,  Edward E. Jones ,  Joseph R. Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Chris Scannell

IPC: G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US09802749B2

公开(公告)日：2017-10-31

申请号：US14688778

申请日：2015-04-16

Applicant: ENTEGRIS, INC

Inventor： Minna Hovinen ,  John R. Kingery ,  Glenn M. Tom ,  Kevin T. O'Dougherty ,  Kirk Mikkelsen ,  Donald D. Ware ,  Peter C. Van Buskirk

IPC: B65D83/00 ,  B01J4/02 ,  G01F23/18

CPC classification number: B65D83/0061 ,  B01J4/02 ,  B01J2219/00065 ,  B01J2219/00067 ,  B01J2219/00069 ,  B01J2219/00164 ,  G01F23/18

Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

公开(公告)号：US10508773B2

公开(公告)日：2019-12-17

申请号：US16271339

申请日：2019-02-08

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. Sweeney ,  Edward Edmiston Jones ,  Joseph Robert Despres ,  Richard S. Ray ,  Peter C. Van Buskirk ,  Edward A. Sturm ,  Christopher Scannell

IPC: G06K19/06 ,  F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20190170302A1

公开(公告)日：2019-06-06

申请号：US16271339

申请日：2019-02-08

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.