公开(公告)号：US20200011482A1

公开(公告)日：2020-01-09

申请号：US16577711

申请日：2019-09-20

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20190170302A1

公开(公告)日：2019-06-06

申请号：US16271339

申请日：2019-02-08

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20200088352A1

公开(公告)日：2020-03-19

申请号：US16375000

申请日：2019-04-04

Applicant: ENTEGRIS, INC.

Inventor： Joseph Robert DESPRES ,  Joseph D. SWEENEY ,  Edward A. STURM

IPC: F17C11/00 ,  B01J20/22

Abstract: Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.

公开(公告)号：US20190277452A1

公开(公告)日：2019-09-12

申请号：US16280520

申请日：2019-02-20

Applicant: ENTEGRIS, INC.

Inventor： Joseph Robert DESPRES ,  Edgar Daniel LA BORDE ,  Robert ZELLER

IPC: F17C11/00 ,  B01J20/22 ,  B01J20/26 ,  B01J20/20 ,  F17C13/04

Abstract: A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.