公开(公告)号：US20240001307A1

公开(公告)日：2024-01-04

申请号：US18367969

申请日：2023-09-13

Applicant: ENTEGRIS, INC.

Inventor： Robert ZELLER

IPC: B01D67/00 ,  B01D71/02

CPC classification number: B01D67/0041 ,  B01D71/022 ,  B01D67/0069 ,  B01D2325/20 ,  B01D2325/02 ,  B01D69/12

Abstract: A composite nanoporous metal membrane, a method of making same, and a method of using same to filter supercritical CO2 are provided. The method of making generally includes a) providing a sintered coarse porous layer; b) applying to an outer face of the coarse porous layer second metal particles; c) sintering to form a structure comprising coarse and intermediate layers; d) applying a suspension of third metal particles; e) drying the suspension of third particles; f) pressing the dried layer of third particles; and g) sintering to form a composite nanoporous metal membrane. The composite nanoporous metal membrane generally includes: a) a sintered coarse layer; b) an intermediate layer comprising first metal particles and second metal particles joined in a sintered structure which is sintered to the coarse layer; and c) a fine layer comprising third metal particles joined in a sintered structure which is sintered to the intermediate layer.

公开(公告)号：US20190277452A1

公开(公告)日：2019-09-12

申请号：US16280520

申请日：2019-02-20

Applicant: ENTEGRIS, INC.

Inventor： Joseph Robert DESPRES ,  Edgar Daniel LA BORDE ,  Robert ZELLER

IPC: F17C11/00 ,  B01J20/22 ,  B01J20/26 ,  B01J20/20 ,  F17C13/04

Abstract: A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.