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公开(公告)号：US20230324933A1
公开(公告)日：2023-10-12
申请号：US18132763
申请日：2023-04-10
Applicant: ENTEGRIS, INC.
Inventor： Thines Kumar Perumal , Aravind Vasanthakumar , Subhash Guddati , Montray Leavy , Sanado Barolli , Edward E. Jones
CPC classification number: G05D16/163 , G05D16/103
Abstract: A high pressure fluid storage device with a pressure sensing and regulating system configured for delivery of vaporized solid and liquid precursor materials at a regulated pressure range. At least some components of the pressure regulating system is contained internally within the storage device.
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公开(公告)号：US09764298B2
公开(公告)日：2017-09-19
申请号：US14940278
申请日：2015-11-13
Applicant: Entegris, Inc.
Inventor： Oleg Byl , Edward E. Jones , Chiranjeevi Pydi , Joseph D. Sweeney
CPC classification number: B01J8/0285 , B01J8/0465 , B01J2208/00017 , B01J2208/00389 , B01J2208/00433 , B01J2208/00539 , C01B35/061
Abstract: An apparatus is described, as including a reaction region for contacting a reactant gas with a reactive solid under conditions effective to form an intermediate product, and an opening for allowing an unreacted portion of the gaseous reagent and the intermediate product to exit the reaction region. The apparatus can be beneficially employed to form a final product as a reaction product of the intermediate product and the reactant gas. The reaction of the reactant gas and reactive solid can be conducted in a first reaction zone, with the reaction of the reactant gas and intermediate product conducted in a second reaction zone. In a specific implementation, the reaction of the reactant gas and intermediate product is reversible, and the reactant gas and intermediate product are flowed to the second reaction zone at a controlled rate or in a controlled manner, to suppress back reaction forming the reactive solid.
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公开(公告)号：US20250020283A1
公开(公告)日：2025-01-16
申请号：US18708892
申请日：2022-11-29
Applicant: ENTEGRIS, INC.
Inventor： Thines Kumar Perumal , Aravind Vasanthakumar , Subhash Guddati , Montray Leavy , Sanado Barolli , Edward E. Jones
Abstract: A high pressure fluid storage system with at least one pressure sensing unitary device (PSUD) which can perform the function of a pressure regulator device. The PSUD can be manufactured as a single unitary construction, wherein both the housing body and the internal pressure regulating mechanism are made from a single unit, material, or both. The PSUD does not have any welded components, is not assembled from a plurality of separate components, or both.
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公开(公告)号：US20250003429A1
公开(公告)日：2025-01-02
申请号：US18708576
申请日：2022-11-29
Applicant: ENTEGRIS, INC.
Inventor： Thines Kumar Perumal , Aravind Vasanthakumar , Subhash Guddati , Montray Leavy , Sanado Barolli , Edward E. Jones
IPC: F15B3/00
Abstract: A high pressure fluid storage system with at least one pressure sensing device (PSD) which can perform the function of a pressure regulator device. The PSD can be manufactured via an additive manufacturing process to include a first and a second single unitary constructions, wherein the housing body and the internal pressure regulating mechanism are made together during the process. The PSD can be made without any welded components or bellows.
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公开(公告)号：US20250003057A1
公开(公告)日：2025-01-02
申请号：US18754112
申请日：2024-06-25
Applicant: ENTEGRIS, INC.
Inventor： Weihang Guan , Sanado Barolli , Ying Tang , Edward E. Jones , Kavita R. Murthi , Sharona R. Kay
IPC: C23C14/48 , C23C14/54 , H01L21/265 , H01L21/66
Abstract: A delivery system for delivering a vaporized source precursor in ion implantation, including: an assembly including: a vessel having an interior volume and configured to produce the vaporized source precursor; a first heater to heat the vessel; and a manifold configured to control the output of the vaporized source precursor to an ion implantation device, wherein the assembly is configured to be disposed upstream of the source inlet flange.
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Patent Agency Ranking
公开(公告)号：US20160172164A1
公开(公告)日：2016-06-16
申请号：US14906537
申请日：2014-07-21
Applicant: Entegris, Inc.
Inventor： Joseph D. Sweeney , Edward E. Jones , Oleg Byl , Ying Tang , Joseph R. Despres , Steven E. Bishop
IPC: H01J37/32
CPC classification number: H01J37/32449 , H01J37/3171 , H01J2237/002 , H01J2237/006 , H01J2237/08 , H01J2237/24564 , H01J2237/3365
Abstract: Fluid storage and dispensing systems and methods for remote delivery of fluids are described, for providing fluid from a source vessel at lower voltage to one or more fluid-utilizing tools at higher voltage, so that the fluid crosses the associated voltage gap without arcing, discharge, premature ionization, or other anomalous behavior, and so that when multiple fluid-utilizing tools are supplied by the remote source vessel, fluid is efficiently supplied to each of the multiple tools at suitable pressure level during the independent operation of others of the multiple vessels.
Abstract translation: 描述用于远程输送流体的流体存储和分配系统和方法，用于将来自较低电压的源容器的流体提供给在较高电压下的一个或多个流体利用工具，使得流体跨过相关联的电压间隙而没有电弧，放电 过早电离或其他异常行为，并且当多个流体利用工具由远程源容器供应时，在多个容器的其他人的独立操作期间，以适当的压力水平将流体有效地供给到多个工具中的每一个 。
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公开(公告)号：US10892137B2
公开(公告)日：2021-01-12
申请号：US16564965
申请日：2019-09-09
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. Sweeney , Joseph R. Despres , Ying Tang , Sharad N. Yedave , Edward E. Jones , Oleg Byl
IPC: H01J37/08 , H01J37/317
Abstract: An ion source apparatus for ion implantation is described, including an ion source chamber, and a consumable structure in or associated with the ion source chamber, in which the consumable structure includes a solid dopant source material susceptible to reaction with a reactive gas for release of dopant in gaseous form to the ion source chamber, wherein the solid dopant source material comprises gallium nitride, gallium oxide, either of which may be isotopically enriched with respect to a gallium isotope, or combinations thereof.
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8.发明申请公开(公告)号：US20180180225A1
公开(公告)日：2018-06-28
申请号：US15900033
申请日：2018-02-20
Applicant: Entegris, Inc.
Inventor： Joseph R. Despres , Joseph D. Sweeney , Edward E. Jones , Matthew B. Donatucci , Chiranjeevi Pydi , Edward A. Sturm , Barry Lewis Chambers , Gregory Scott Baumgart
CPC classification number: F17C13/12 , F17C13/04 , F17C2201/0104 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2205/0344 , F17C2205/035 , F17C2205/0382 , F17C2205/0391 , F17C2221/012 , F17C2221/013 , F17C2221/015 , F17C2221/016 , F17C2227/045 , F17C2250/0626 , F17C2270/0518 , Y02E60/321 , Y10T137/7795
Abstract: A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.
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公开(公告)号：US09897257B2
公开(公告)日：2018-02-20
申请号：US14430105
申请日：2013-09-20
Applicant: Entegris, Inc.
Inventor： Joseph R. Despres , Joseph D. Sweeney , Edward E. Jones , Matthew B. Donatucci , Chiranjeevi Pydi , Edward A. Sturm , Barry Lewis Chambers , Gregory Scott Baumgart
CPC classification number: F17C13/12 , F17C13/04 , F17C2201/0104 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2205/0344 , F17C2205/035 , F17C2205/0382 , F17C2205/0391 , F17C2221/012 , F17C2221/013 , F17C2221/015 , F17C2221/016 , F17C2227/045 , F17C2250/0626 , F17C2270/0518 , Y02E60/321 , Y10T137/7795
Abstract: A fluid supply package comprising a pressure-regulated fluid storage and dispensing vessel, a valve head adapted for dispensing of fluid from the vessel, and an anti-pressure spike assembly adapted to combat pressure spiking in flow of fluid at inception of fluid dispensing.
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公开(公告)号：US09685304B2
公开(公告)日：2017-06-20
申请号：US14861844
申请日：2015-09-22
Applicant: Entegris, Inc.
Inventor： Robert Kaim , Joseph D. Sweeney , Oleg Byl , Sharad N. Yedave , Edward E. Jones , Peng Zou , Ying Tang , Barry Lewis Chambers , Richard S. Ray
IPC: H01J37/317 , C01B35/00 , C01B35/06 , H01L21/265
CPC classification number: H01J37/3171 , C01B35/00 , C01B35/061 , C01P2006/88 , H01J2237/006 , H01J2237/08 , H01J2237/31701 , H01L21/265 , Y02P20/134
Abstract: An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of B2F4. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.
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