公开(公告)号：US08873600B2

公开(公告)日：2014-10-28

申请号：US13174484

申请日：2011-06-30

Applicant: Rui Jiang ,  Joshua Jon Thornes ,  Daniel Jason Riggs ,  Kevin Michael O'Brien

Inventor： Rui Jiang ,  Joshua Jon Thornes ,  Daniel Jason Riggs ,  Kevin Michael O'Brien

IPC: H01S3/22 ,  H01S3/223 ,  H01S3/036

CPC classification number: H01S3/036 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

Abstract: Systems and methods for automatically performing a high accuracy gas refill in a laser chamber of a two chamber gas discharge laser such as an excimer laser are disclosed. Based upon a target pressure and halogen concentration that is either predetermined or entered by a user, and with no further user action, a non-halogen containing gas is added to the chamber to a first pressure, followed by the addition of halogen containing gas to a second pressure which is greater than a target pressure for the chamber, such that the halogen content in the gas at the second pressure is at a desired concentration. The gas in the chamber is bled until the pressure drops to the target pressure. The amount of non-halogen containing gas added is estimated automatically, and the amount of halogen containing gas is measured so that the desired concentration is obtained, taking into account both temperature and any gas remaining in the fill pipes from prior laser operation.

Abstract translation: 公开了用于在诸如准分子激光器的二室气体放电激光器的激光室中自动执行高精度气体补充的系统和方法。 基于用户预定或输入的目标压力和卤素浓度，并且在不再进一步的用户动作的情况下，将不含卤素的气体加入室中至第一压力，随后加入含卤素气体 第二压力大于室的目标压力，使得在第二压力下的气体中的卤素含量处于所需浓度。 室内的气体流出，直到压力下降到目标压力。 自动估算不含卤素气体的量，并测量含卤素气体的量，以便从先前的激光操​​作考虑到温度和填充管中剩余的任何气体，获得所需的浓度。

公开(公告)号：US08811438B2

公开(公告)日：2014-08-19

申请号：US13936734

申请日：2013-07-08

Applicant: Gigaphoton Inc.

Inventor： Yukio Watanabe ,  Hideyuki Hayashi ,  Kouji Kakizaki ,  Michio Shinozaki ,  Hideo Hoshino

IPC: H01S3/04 ,  H01S3/22 ,  H01S3/223 ,  H01S3/03 ,  F25D17/02 ,  H01S3/041

CPC classification number: H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

公开(公告)号：US08787413B2

公开(公告)日：2014-07-22

申请号：US13936819

申请日：2013-07-08

Applicant: Gigaphoton Inc.

Inventor： Yukio Watanabe ,  Hideyuki Hayashi ,  Kouji Kakizaki ,  Michio Shinozaki ,  Hideo Hoshino

IPC: H01S3/04

CPC classification number: H01S3/0407 ,  F25B2400/06 ,  F25D17/02 ,  H01S3/03 ,  H01S3/041 ,  H01S3/22

Abstract: A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

Abstract translation: 一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分 与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂 温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统， 以及连接第二回火的第二管道系统 所述控制部分和每个第二温度控制部分并联。

公开(公告)号：US20140064316A1

公开(公告)日：2014-03-06

申请号：US13546888

申请日：2012-07-11

Applicant: Richard B. MILES ,  Arthur Dogariu ,  James B. Michael

Inventor： Richard B. MILES ,  Arthur Dogariu ,  James B. Michael

IPC: H01S3/097

CPC classification number: H01S3/097 ,  G01N21/1717 ,  G01N21/65 ,  G01N2021/1725 ,  G01N2021/1793 ,  G01N2021/655 ,  H01S3/0014 ,  H01S3/094092 ,  H01S3/22 ,  H01S3/2391

Abstract: Systems and methods for lasing molecular gases, and systems and methods of detecting molecular species are provided. The systems and methods can include the use of an excitation laser tuned to a wavelength associated with oxygen or nitrogen. The lasing can occur in both the forward and reverse directions relative to the excitation laser beam. Reverse lasing can provide a laser beam that propagates back toward the excitation laser source, and can provide a method for remote sampling of molecular species contained in the air. For example, systems and methods of detecting a molecular species of interest can be achieved by using the properties of the backward or forward propagating air laser to indicate a change in a pulse from the source of laser pulses caused by a modulation laser tuned to interact with the molecular species of interest.

Abstract translation: 提供了用于激发分子气体的系统和方法，以及检测分子种类的系统和方法。 该系统和方法可以包括使用调谐到与氧气或氮气相关联的波长的激发激光器。 激光可以相对于激发激光束在正向和反向方向上发生。 反向激光可以提供向激发激光源传播的激光束，并且可以提供用于远程采样包含在空气中的分子物质的方法。 例如，可以通过使用反向或正向传播的空气激光器的特性来表示检测感兴趣的分子种类的系统和方法，以指示由调制的激光脉冲源引起的脉冲的变化，所述调制激光器被调谐以与 感兴趣的分子物种。

公开(公告)号：US20130000773A1

公开(公告)日：2013-01-03

申请号：US13174484

申请日：2011-06-30

Applicant: Rui Jiang ,  Joshua Jon Thornes ,  Daniel Jason Riggs ,  Kevin Michael O'Brien

Inventor： Rui Jiang ,  Joshua Jon Thornes ,  Daniel Jason Riggs ,  Kevin Michael O'Brien

IPC: B65B31/04

CPC classification number: H01S3/036 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

Abstract: Systems and methods for automatically performing a high accuracy gas refill in a laser chamber of a two chamber gas discharge laser such as an excimer laser are disclosed. Based upon a target pressure and halogen concentration that is either predetermined or entered by a user, and with no further user action, a non-halogen containing gas is added to the chamber to a first pressure, followed by the addition of halogen containing gas to a second pressure which is greater than a target pressure for the chamber, such that the halogen content in the gas at the second pressure is at a desired concentration. The gas in the chamber is bled until the pressure drops to the target pressure. The amount of non-halogen containing gas added is estimated automatically, and the amount of halogen containing gas is measured so that the desired concentration is obtained, taking into account both temperature and any gas remaining in the fill pipes from prior laser operation.

Abstract translation: 公开了用于在诸如准分子激光器的二室气体放电激光器的激光室中自动执行高精度气体补充的系统和方法。 基于用户预定或输入的目标压力和卤素浓度，并且在不再进一步的用户动作的情况下，将不含卤素的气体加入室中至第一压力，随后加入含卤素气体 第二压力大于室的目标压力，使得在第二压力下的气体中的卤素含量处于所需浓度。 室内的气体流出，直到压力下降到目标压力。 自动估算不含卤素气体的量，并测量含卤素气体的量，以便从先前的激光操​​作考虑到温度和填充管中剩余的任何气体，获得所需的浓度。

公开(公告)号：US20120229889A1

公开(公告)日：2012-09-13

申请号：US13121319

申请日：2011-03-07

Applicant: Takashi Suganuma ,  Krzysztof Nowak ,  Osamu Wakabayashi

Inventor： Takashi Suganuma ,  Krzysztof Nowak ,  Osamu Wakabayashi

IPC: H01S5/00 ,  H01S3/105

CPC classification number: H01S3/05 ,  B82Y20/00 ,  H01S3/0315 ,  H01S3/08031 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2232 ,  H01S3/2325 ,  H01S3/235 ,  H01S3/2366 ,  H01S3/2375 ,  H01S5/042 ,  H01S5/06 ,  H01S5/14 ,  H01S5/3401

Abstract: A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.

Abstract translation: 根据本公开的一个方面的再生放大器与激光装置组合使用，再生放大器可以包括：构成光谐振器的一对谐振器镜; 设置在所述一对所述谐振器镜之间用于放大从所述激光装置输出的预定波长的激光束的平板放大器; 以及光学系统，被配置为配置多个光路，激光束沿着该光路在所述平板放大器内部往复运动，所述光学系统将所述激光束的光学图像在第一位置处作为所述激光束的光学图像在第二位置 。

公开(公告)号：US07567607B2

公开(公告)日：2009-07-28

申请号：US11346519

申请日：2006-02-01

Applicant: David S. Knowles ,  Daniel J. W. Brown ,  Herve A. Besaucele ,  David W. Myers ,  Alexander I. Ershov ,  William N. Partlo ,  Richard L. Sandstrom ,  Palash P. Das ,  Stuart L. Anderson ,  Igor V. Fomenkov ,  Richard C. Ujazdowski ,  Eckehard D. Onkels ,  Richard M. Ness ,  Scot T. Smith ,  William G. Hulburd ,  Jeffrey Oicles

Inventor： David S. Knowles ,  Daniel J. W. Brown ,  Herve A. Besaucele ,  David W. Myers ,  Alexander I. Ershov ,  William N. Partlo ,  Richard L. Sandstrom ,  Palash P. Das ,  Stuart L. Anderson ,  Igor V. Fomenkov ,  Richard C. Ujazdowski ,  Eckehard D. Onkels ,  Richard M. Ness ,  Scot T. Smith ,  William G. Hulburd ,  Jeffrey Oicles

IPC: H01S3/22 ,  H01S3/223

CPC classification number: G01J1/4257 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the first discharge region containing the lasing gas medium, a line narrowing unit for narrowing a spectral bandwidth of output laser light pulse beam pulses produced in said first discharge region; a second laser unit which may comprise a second discharge chamber which may contain an excimer or molecular fluorine lasing gas medium; a second pair of electrodes defining the second discharge region containing the lasing gas medium; a pulse power system providing electrical pulses to the first pair of electrodes and to the second pair of electrodes producing gas discharges in the lasing gas medium between the respective first and second pair of electrodes, and laser parameter control mechanism modifying a selected parameter of a selected laser output light pulse beam pulse produced by said gas discharge laser system by controlling the timing of the occurrence of the gas discharge between the first pair of electrodes and the occurrence of the gas discharge between the second pair of electrodes.

Abstract translation: 公开了一种振荡放大器气体放电激光器系统和方法，其可以包括第一激光器单元，该第一激光器单元可以包括可包含受激准分子或分子氟激光气体介质的第一放电区域; 限定含有激光气体介质的第一放电区域的第一对电极，用于使在所述第一放电区域中产生的输出激光脉冲光束脉冲的光谱带宽变窄的线窄化单元; 第二激光单元，其可以包括可包含受激准分子或分子氟激光气体介质的第二放电室; 限定包含所述激光气体介质的所述第二放电区域的第二对电极; 脉冲功率系统，其向所述第一对电极和所述第二对电极提供电脉冲，在所述相应的第一和第二对电极之间的所述激光气体介质中产生气体放电，以及激光参数控制机构修改所选择的所选择的参数 通过控制第一对电极之间的气体放电的发生时间和第二对电极之间的气体放电的发生的时间，由所述气体放电激光系统产生的激光输出光脉冲束脉冲。

公开(公告)号：US07415057B2

公开(公告)日：2008-08-19

申请号：US11061380

申请日：2005-02-18

Applicant: Thomas Hall

Inventor： Thomas Hall

IPC: H01S3/08

CPC classification number: H01S3/08081 ,  H01S3/036 ,  H01S3/08068 ,  H01S3/22

Abstract: An unstable optical resonator for an optically active medium comprising a spherical back mirror and a spherical outcoupling mirror is proposed, and an outcoupling which is asymmetrical in relation to the optical axis takes place therein.

Abstract translation: 提出了一种用于光学活性介质的不稳定光学谐振器，其包括球面后反射镜和球形外耦合反射镜，并且在其中发生相对于光轴不对称的输出耦合。

公开(公告)号：US07346093B2

公开(公告)日：2008-03-18

申请号：US10808157

申请日：2004-03-23

Applicant: Richard L. Sandstrom ,  John Martin Algots ,  Joshua C. Brown ,  Raymond F. Cybulski ,  John Dunlop ,  James K. Howey ,  Richard G. Morton ,  Xiaojiang Pan ,  William N. Partlo ,  Firas F. Putris ,  Tom A. Watson ,  Thomas A. Yager

Inventor： Richard L. Sandstrom ,  John Martin Algots ,  Joshua C. Brown ,  Raymond F. Cybulski ,  John Dunlop ,  James K. Howey ,  Richard G. Morton ,  Xiaojiang Pan ,  William N. Partlo ,  Firas F. Putris ,  Tom A. Watson ,  Thomas A. Yager

IPC: H01S3/08 ,  H01S3/22

CPC classification number: H01S3/02 ,  G01J1/429 ,  G01J9/02 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

Abstract translation: 公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座 从柔性的安装框架开始，挠曲臂将挠性件附接到安装框架。 该装置可以包括具有细长杆的挠曲力机构。 力机构可以预应力挠曲。 镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。 光栅可以使用电磁感应元件或磁敏元件进行主动调谐。 可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

公开(公告)号：US20070201529A1

公开(公告)日：2007-08-30

申请号：US10670689

申请日：2003-09-25

Applicant: David Neumann ,  Thomas Henshaw

Inventor： David Neumann ,  Thomas Henshaw

IPC: H01S3/22 ,  H01S3/223

CPC classification number: H01S3/036 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/094042 ,  H01S3/0941 ,  H01S3/0979 ,  H01S3/22 ,  H01S3/2215

Abstract: An optical oxygen laser has a source of oxygen. A cryoreactor has an input connected to the source of oxygen. An optical pump is coupled to the cryoreactor and excites the oxygen to form an singlet delta oxygen, an excited state of oxygen. An optical resonator cavity receives the excited state oxygen and has a laser output.

Abstract translation: 光学氧激光器具有氧源。 一个低温反应器有一个输入连接到氧气源。 光泵耦合到冷冻反应器并激发氧气以形成单重态的三氧化氮，即氧的激发态。 光谐振腔接收激发态氧并具有激光输出。