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    Optical mode analysis with design-based care areas
    3.
    发明授权
    Optical mode analysis with design-based care areas 有权

    公开(公告)号：US09702827B1

    公开(公告)日：2017-07-11

    申请号：US14946604

    申请日：2015-11-19

    Applicant: KLA-Tencor Corporation

    Inventor： Bjorn Brauer ,  Ravikumar Sanapala

    IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95

    CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N2201/11

    Abstract: Methods and systems for selecting one or more modes of an inspection subsystem or system for inspection of a specimen are provided. The systems described herein are configured to acquire output for all of the modes to be considered at a location of a known defect on the specimen by aligning output, which is generated at the location with a mode known to generate output in which patterned features on the specimen are resolved to a degree that allows the output to be aligned to design data, with the design data for the specimen to identify the location with substantially high accuracy and then without moving the field of view of the inspection subsystem or system from that location, acquiring the output for all other modes. All of the acquired output can then be used to select mode(s) for inspection of the specimen or another specimen of the same type.

    Data acquisition method using a laser scanner
    7.
    发明授权
    Data acquisition method using a laser scanner 有权
    数据采集​​方法采用激光扫描仪

    公开(公告)号：US08222615B2

    公开(公告)日：2012-07-17

    申请号：US12666035

    申请日：2009-02-13

    Applicant: Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

    Inventor： Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

    IPC: G01J1/58

    CPC classification number: G02B21/26 ,  G01N21/278 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2201/104 ,  G01N2201/11 ,  G02B21/0076

    Abstract: Method has laser scanner for pixel-precise imaging of fluorescent samples having fluorescent dyes. The scanner has sample table, laser and first optical system providing laser beam for exciting the samples, scanner head with deflecting element for scanning sample, first lens, second optical system for forwarding emission beams triggered by the laser beam and deflected by first lens and deflecting element to a detector, position encoder emitting position signals indicating location of the scanner head, electronic element for filtering the detector signals with a time constant and an A/D converter for digitizing the filtered detector signals. The filtered detector signals and the position encoder signals are acquired independently, in parallel and continuously by a computer and are related to a common time base, the A/D conversion being carried out often so that each pixel of an image is always assigned more than one data point.

    Abstract translation: 方法具有用于具有荧光染料的荧光样品的像素精确成像的激光扫描仪。 扫描仪具有样品台，激光和第一光学系统，提供用于激发样品的激光束，扫描头具有用于扫描样品的偏转元件，第一透镜，用于转发由激光束触发并由第一透镜偏转的发射光束的第二光学系统 发送位置信号的位置编码器，用于指示扫描仪头部的位置，用于对时间常数进行检测器信号的滤波的电子元件和用于数字化滤波的检测器信号的A / D转换器。 经滤波的检测器信号和位置编码器信号由计算机并行并连续地获取并且与公共时基相关，经常执行A / D转换，使得图像的每个像素总是被分配多于 一个数据点。

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