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公开(公告)号:US20240224507A1
公开(公告)日:2024-07-04
申请号:US18541625
申请日:2023-12-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongmin Kim , Taejin Park , Chansic Yoon , Kiseok Lee , Hongjun Lee
IPC: H10B12/00 , H01L29/417 , H01L29/423
CPC classification number: H10B12/34 , H01L29/41741 , H01L29/4236 , H10B12/315
Abstract: A semiconductor device includes an active pattern on a substrate, a gate structure, a conductive filling pattern and a bit line structure on the conductive filling pattern. The gate structure extends through an upper portion of the active pattern, and has an upper surface higher than an upper surface of the active pattern. The conductive filling pattern includes a lower portion on the active pattern and an upper portion thereon. The lower portion contacts an upper sidewall of the gate structure, and the upper portion has a width greater than a width of the lower portion.
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公开(公告)号:US20240172421A1
公开(公告)日:2024-05-23
申请号:US18233357
申请日:2023-08-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongmin KIM , Chansic Yoon , Jihoon Sung
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/0335 , H10B12/315
Abstract: A semiconductor device includes an active pattern on a substrate. A bit line structure is on the active pattern. A spacer structure is on a sidewall of the bit line structure. A lower contact plug directly contacts the spacer structure. The spacer structure includes a first spacer covering an upper sidewall of the lower contact plug and a second spacer covering a lower sidewall of the lower contact plug and a portion of a lower surface of the lower contact plug. The lower contact plug includes an extension portion covered by the first and second spacers and a protrusion portion protruding from the first and second spacers. A bottom surface of the protrusion portion is disposed at a level that is lower than or equal to a level of a bottom surface of the second spacer.
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公开(公告)号:US20240306374A1
公开(公告)日:2024-09-12
申请号:US18414655
申请日:2024-01-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: KEUNNAM KIM , Seungbo Ko , Jongmin Kim , Huijung Kim , Sangjae Park , Taejin Park , Chansic Yoon , Kiseok Lee , Myeongdong Lee
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/0335 , H10B12/315
Abstract: A semiconductor device includes an active pattern array including active patterns, an isolation pattern, gate structures, bit line structures, and lower and upper contact plugs. The isolation pattern covers sidewalls of the active patterns. The gate structures extend through upper portions of the active patterns and the isolation pattern in a first direction, and are spaced apart from each other in a second direction. The bit line structures are on central portions of the active patterns and the isolation pattern, extend in the second direction, and are spaced apart from each other in the first direction. The lower contact plugs are disposed on end portions of the active patterns. The upper contact plugs are disposed on the lower contact plugs. The active pattern array includes active pattern rows including the active patterns spaced apart from each other in the first direction.
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公开(公告)号:US20240032286A1
公开(公告)日:2024-01-25
申请号:US18335186
申请日:2023-06-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Chansic Yoon , Jongmin Kim , Kiseok Lee , Junhyeok Ahn
IPC: H10B12/00 , H01L29/423
CPC classification number: H10B12/488 , H10B12/315 , H10B12/485 , H10B12/482 , H01L29/42356
Abstract: Provided is an integrated circuit device including a substrate that includes an active region defined by a trench isolation, a word line that extends in a first horizontal direction inside the substrate across the active region, a bit line that extends on the word line in a second horizontal direction orthogonal to the first horizontal direction, a direct contact that electrically connects the bit line to the active region, a pad that is on the active region and has a horizontal width that is greater than that of the active region, a buried contact that contacts a sidewall of the pad, and a conductive landing pad that extends on the buried contact in a vertical direction and faces the bit line in the first horizontal direction.
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公开(公告)号:US20210351184A1
公开(公告)日:2021-11-11
申请号:US17384347
申请日:2021-07-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyosub Kim , Keunnam Kim , Dongoh Kim , Bongsoo Kim , Euna Kim , Chansic Yoon , Kiseok Lee , Hyeonok Jung , Sunghee Han , Yoosang Hwang
IPC: H01L27/108 , H01L23/528
Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.
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公开(公告)号:US12289881B2
公开(公告)日:2025-04-29
申请号:US17948796
申请日:2022-09-20
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongmin Kim , Chansic Yoon , Hyosub Kim , Sohyun Park , Junhyeok Ahn
Abstract: Provided is a semiconductor device including a conductive contact plug on a substrate, the conductive contact plug including a lower portion and an upper portion on the lower portion, the lower portion having a first width, and the upper portion having a second width less than the first width, a bit line structure on the conductive contact plug, the bit line structure including a conductive structure and an insulation structure provided in a vertical direction perpendicular to an upper surface of the substrate, and a first lower spacer, a second lower spacer, and a third lower spacer sequentially provided on a sidewall of the lower portion of the conductive contact plug in a horizontal direction parallel to the upper surface of the substrate, wherein an uppermost surface of the third lower spacer is higher than an upper surface of the first lower spacer and an upper surface of the second lower spacer.
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公开(公告)号:US20230422488A1
公开(公告)日:2023-12-28
申请号:US18192329
申请日:2023-03-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongmin KIM , Sohyun Park , Chansic Yoon , Dongmin Choi , Seungbo Ko , Hyosub Kim , Jingkuk Bae , Woojin Jeong , Eunkyung Cha , Junhyeok Ahn
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/0335 , H10B12/482 , H10B12/315
Abstract: A semiconductor device including a first contact plug structure on a substrate, a lower spacer structure on a sidewall of the first contact plug structure, and a bit line structure on the first contact plug structure and including a conductive structure and an insulation structure stacked in a vertical direction substantially perpendicular to an upper surface of the substrate may be provided. The first contact plug structure may include a conductive pad contacting the upper surface of the substrate, an ohmic contact pattern on the conductive pad, and a conductive filling pattern on the ohmic contact pattern. The conductive filling pattern may include metal, and include a lower portion having a relatively large width and an upper portion having a relatively small width. The lower spacer structure may contact a sidewall of the conductive filling pattern.
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公开(公告)号:US20230209808A1
公开(公告)日:2023-06-29
申请号:US17880723
申请日:2022-08-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ahrang Choi , Chansic Yoon , Hoin Ryu , Junghoon Han
IPC: H01L27/108
CPC classification number: H01L27/10823 , H01L27/10814
Abstract: A semiconductor device includes active regions defined by a device isolation region in a substrate; trenches extending in a first direction to intersect the active regions; buried gate structures buried in the trenches, respectively, and having upper surfaces located on a level lower than a level of upper surfaces of the active regions; a buffer structure covering the active regions, the isolation region, and the buried gate structures; bit line structures extending in a second direction intersecting the first direction on the active regions and connected to the active regions; storage node contacts between the bit line structures, penetrating through the buffer structure and in contact with the active regions; and capacitor structures in contact with an upper surface of the storage node contacts.
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公开(公告)号:US20240244823A1
公开(公告)日:2024-07-18
申请号:US18388336
申请日:2023-11-09
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Gaeun Choi , Wooyoung Choi , Chansic Yoon
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/482
Abstract: A semiconductor device includes: an active pattern on a substrate; a gate structure in an upper portion of the active pattern; a bit line structure on the active pattern; a spacer structure on a sidewall of the bit line structure, the spacer structure including an insulating material; and a lower contact plug on a portion of the active pattern adjacent to the bit line structure, the lower contact plug contacting the spacer structure, wherein the spacer structure includes a layer having at least two curves and a vertex disposed between and contacting the two curves.
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公开(公告)号:US11917815B2
公开(公告)日:2024-02-27
申请号:US18123736
申请日:2023-03-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyosub Kim , Keunnam Kim , Dongoh Kim , Bongsoo Kim , Euna Kim , Chansic Yoon , Kiseok Lee , Hyeonok Jung , Sunghee Han , Yoosang Hwang
IPC: H10B12/00 , H01L27/108 , H01L23/528
CPC classification number: H10B12/315 , H01L23/5283 , H10B12/053 , H10B12/34 , H10B12/482 , H10B12/485 , H10B12/488
Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.
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