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公开(公告)号：US20060243034A1
公开(公告)日：2006-11-02
申请号：US11382438
申请日：2006-05-09
申请人： Ami Chand , Kevin Kjoller , Kenneth Babcock , Michael Harris
发明人： Ami Chand , Kevin Kjoller , Kenneth Babcock , Michael Harris
IPC分类号： B23Q17/09
CPC分类号： G01Q70/16 , G01B5/28 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q70/02 , G01Q70/08 , G01Q80/00
摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.
摘要翻译： 一种用于操纵样品表面的方法和装置，包括悬臂，安装在悬臂上的第一尖端和安装在悬臂上的第二尖端，第一和第二尖端构造成组合以形成成像探针并分离 以形成操纵探针。 第一和第二尖端被配置成形成第一位置，其特征在于，所述尖端组合以形成成像尖端，并且所述第一和第二末端被配置成形成第二位置，其特征在于，所述尖端分离以操纵颗粒在 一个样品。 当跨越尖端施加电压时，尖端可被配置成形成第一位置，并且优选地从基本垂直于其的悬臂向下延伸。
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公开(公告)号：US20050145021A1
公开(公告)日：2005-07-07
申请号：US11075019
申请日：2005-03-08
申请人： Ami Chand , Kevin Kjoller , Kenneth Babcock , Michael Harris
发明人： Ami Chand , Kevin Kjoller , Kenneth Babcock , Michael Harris
IPC分类号： G01B11/00 , G01B5/28 , G01B21/30 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/20 , G01Q60/00 , G01Q70/02 , G01Q70/08 , G01Q70/16 , G01Q80/00 , G01Q90/00 , G12B21/20 , G01N13/10
CPC分类号： G01Q70/16 , G01B5/28 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q70/02 , G01Q70/08 , G01Q80/00
摘要： A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.
摘要翻译： 一种用于操纵样品表面的方法和装置，包括悬臂，安装在悬臂上的第一尖端和安装在悬臂上的第二尖端，第一和第二尖端构造成组合以形成成像探针并分离 以形成操纵探针。 第一和第二尖端被配置成形成第一位置，其特征在于，所述尖端组合以形成成像尖端，并且所述第一和第二末端被配置成形成第二位置，其特征在于，所述尖端分离以操纵颗粒在 一个样品。 当跨越尖端施加电压时，尖端可被配置成形成第一位置，并且优选地从基本垂直于其的悬臂向下延伸。
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公开(公告)号：US20060213289A1
公开(公告)日：2006-09-28
申请号：US11089165
申请日：2005-03-24
申请人： Kevin Kjoller , Ami Chand , Nihat Okulan
发明人： Kevin Kjoller , Ami Chand , Nihat Okulan
摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.
摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的基底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。
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公开(公告)号：US08003534B2
公开(公告)日：2011-08-23
申请号：US12980182
申请日：2010-12-28
申请人： Ami Chand
发明人： Ami Chand
IPC分类号： H01L21/44
CPC分类号： B81C1/00873
摘要： An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.
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公开(公告)号：US6016693A
公开(公告)日：2000-01-25
申请号：US20816
申请日：1998-02-09
申请人： Mario B. Viani , Paul Hansma , Ami Chand , Mark A. Wendman , Hal J. Morrett
发明人： Mario B. Viani , Paul Hansma , Ami Chand , Mark A. Wendman , Hal J. Morrett
IPC分类号： G01B7/34
摘要： A sacrificial cantilever is used as a template for making cantilevers of non-standard materials for use in an atomic force microscope. The desired metal is deposited onto the sacrificial cantilever, followed by removal of the sacrificial cantilever.
摘要翻译： 牺牲悬臂用作用于制造用于原子力显微镜的非标准材料的悬臂的模板。 将期望的金属沉积到牺牲悬臂上，随后除去牺牲悬臂。
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公开(公告)号：US08828243B2
公开(公告)日：2014-09-09
申请号：US12874879
申请日：2010-09-02
申请人： Rakesh Poddar , Ami Chand
发明人： Rakesh Poddar , Ami Chand
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , Y10T156/10
摘要： A cantilever-tip assembly for atomic force microscopy (AFM) or other scanning probe microscopy and its method of making based on micro-electromechanical systems (MEMS). Two crystalline silicon wafers and attached oxide and nitride layers are bonded together across an intermediate dielectric layer. A thin cantilever with a tetrahedral silicon probe tip at its distal end are formed in one wafer by anisotropic etching of silicon and a support structure is formed in the other wafer to support the proximal end of the cantilever preferably having an inclined face formed by anisotropic silicon etching. The cantilever may be silicon or silicon nitride.
摘要翻译： 用于原子力显微镜（AFM）或其他扫描探针显微镜的悬臂尖组件及其基于微机电系统（MEMS）的制造方法。 两个晶体硅晶片和附着的氧化物和氮化物层通过中间介电层结合在一起。 通过硅的各向异性蚀刻在其一个晶片中形成具有四面体硅探针尖端的薄悬臂梁，并且在另一个晶片中形成支撑结构以支撑悬臂的近端，优选地具有由各向异性硅形成的倾斜面 蚀刻。 悬臂可以是硅或氮化硅。
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公开(公告)号：US20120060244A1
公开(公告)日：2012-03-08
申请号：US12874879
申请日：2010-09-02
申请人： Rakesh Poddar , Ami Chand
发明人： Rakesh Poddar , Ami Chand
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q70/10 , Y10T156/10
摘要： A cantilever-tip assembly for atomic force microscopy (AFM) or other scanning probe microscopy and its method of making based on micro-electromechanical systems (MEMS). Two crystalline silicon wafers and attached oxide and nitride layers are bonded together across an intermediate dielectric layer. A thin cantilever with a tetrahedral silicon probe tip at its distal end are formed in one wafer by anisotropic etching of silicon and a support structure is formed in the other wafer to support the proximal end of the cantilever preferably having an inclined face formed by anisotropic silicon etching. The cantilever may be silicon or silicon nitride.
摘要翻译： 用于原子力显微镜（AFM）或其他扫描探针显微镜的悬臂尖组件及其基于微机电系统（MEMS）的制造方法。 两个晶体硅晶片和附着的氧化物和氮化物层通过中间介电层结合在一起。 通过硅的各向异性蚀刻在其一个晶片中形成具有四面体硅探针尖端的薄悬臂梁，并且在另一个晶片中形成支撑结构以支撑悬臂的近端，优选地具有由各向异性硅形成的倾斜面 蚀刻。 悬臂可以是硅或氮化硅。
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8.发明授权Probes for use in scanning probe microscopes and methods of fabricating such probes 失效用于扫描探针显微镜的探针和制造这种探针的方法公开(公告)号：US07370515B2
公开(公告)日：2008-05-13
申请号：US10873064
申请日：2004-06-21
申请人： Nihat Okulan , Ami Chand
发明人： Nihat Okulan , Ami Chand
IPC分类号： G01B5/28
CPC分类号： G01Q60/38 , G01Q70/10 , Y10T29/49004 , Y10T29/49007
摘要： Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
摘要翻译： 用于扫描探针显微镜的探针及其制造方法。 每个探针包括具有通过各向异性蚀刻工艺形成的基本上垂直的侧壁的探针尖端和通过不是各向异性的蚀刻工艺形成的探针尖端下方的扩口柱。 使用包含含溴气体和含氧气体的源气体以间歇方式蚀刻探针尖端和探针的扩口柱。 探针尖端可以使用任何合适的标准进行鉴定，供客户在原子力显微镜中使用，无需个人检查。
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9.发明申请Probes for use in scanning probe microscopes and methods of fabricating such probes 失效用于扫描探针显微镜的探针和制造这种探针的方法公开(公告)号：US20050279729A1
公开(公告)日：2005-12-22
申请号：US10873064
申请日：2004-06-21
申请人： Nihat Okulan , Ami Chand
发明人： Nihat Okulan , Ami Chand
CPC分类号： G01Q60/38 , G01Q70/10 , Y10T29/49004 , Y10T29/49007
摘要： Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
摘要翻译： 用于扫描探针显微镜的探针和制造这种探针的方法。 每个探针包括具有通过各向异性蚀刻工艺形成的基本上垂直的侧壁的探针尖端和通过不是各向异性的蚀刻工艺形成的探针尖端下方的扩口柱。 使用包含含溴气体和含氧气体的源气体以间歇方式蚀刻探针尖端和探针的扩口柱。 探针尖端可以使用任何合适的标准进行鉴定，供客户在原子力显微镜中使用，无需个人检查。
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公开(公告)号：US08857247B2
公开(公告)日：2014-10-14
申请号：US12123363
申请日：2008-05-19
申请人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
发明人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.
摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的衬底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。
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