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公开(公告)号：US20060213289A1
公开(公告)日：2006-09-28
申请号：US11089165
申请日：2005-03-24
申请人： Kevin Kjoller , Ami Chand , Nihat Okulan
发明人： Kevin Kjoller , Ami Chand , Nihat Okulan
摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.
摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的基底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。
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2.发明申请Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby 失效制造用于表征扫描探针显微镜探针的尖端形状的结构的方法和由此制造的结构公开(公告)号：US20050252282A1
公开(公告)日：2005-11-17
申请号：US10844200
申请日：2004-05-12
申请人： Ami Chand , Nihat Okulan
发明人： Ami Chand , Nihat Okulan
CPC分类号： G01Q40/02
摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling a bottom surface of the probe tip.
摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针末端的底表面进行成形。
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3.发明授权Probes for use in scanning probe microscopes and methods of fabricating such probes 失效用于扫描探针显微镜的探针和制造这种探针的方法公开(公告)号：US07370515B2
公开(公告)日：2008-05-13
申请号：US10873064
申请日：2004-06-21
申请人： Nihat Okulan , Ami Chand
发明人： Nihat Okulan , Ami Chand
IPC分类号： G01B5/28
CPC分类号： G01Q60/38 , G01Q70/10 , Y10T29/49004 , Y10T29/49007
摘要： Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
摘要翻译： 用于扫描探针显微镜的探针及其制造方法。 每个探针包括具有通过各向异性蚀刻工艺形成的基本上垂直的侧壁的探针尖端和通过不是各向异性的蚀刻工艺形成的探针尖端下方的扩口柱。 使用包含含溴气体和含氧气体的源气体以间歇方式蚀刻探针尖端和探针的扩口柱。 探针尖端可以使用任何合适的标准进行鉴定，供客户在原子力显微镜中使用，无需个人检查。
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4.发明申请Probes for use in scanning probe microscopes and methods of fabricating such probes 失效用于扫描探针显微镜的探针和制造这种探针的方法公开(公告)号：US20050279729A1
公开(公告)日：2005-12-22
申请号：US10873064
申请日：2004-06-21
申请人： Nihat Okulan , Ami Chand
发明人： Nihat Okulan , Ami Chand
CPC分类号： G01Q60/38 , G01Q70/10 , Y10T29/49004 , Y10T29/49007
摘要： Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
摘要翻译： 用于扫描探针显微镜的探针和制造这种探针的方法。 每个探针包括具有通过各向异性蚀刻工艺形成的基本上垂直的侧壁的探针尖端和通过不是各向异性的蚀刻工艺形成的探针尖端下方的扩口柱。 使用包含含溴气体和含氧气体的源气体以间歇方式蚀刻探针尖端和探针的扩口柱。 探针尖端可以使用任何合适的标准进行鉴定，供客户在原子力显微镜中使用，无需个人检查。
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公开(公告)号：US20190383677A1
公开(公告)日：2019-12-19
申请号：US15592796
申请日：2017-05-11
申请人： Nihat Okulan
发明人： Nihat Okulan
摘要： Semiconductor strain gages fabricated on Silicon-on-insulator (SOI) material, and the method of making them. Force sensing elements are uniformly batch-fabricated at wafer level and singulated individually by a wire bonding method. In another method, they are singulated by plucking them off the wafer from their attachment site.
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6.发明授权Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby 失效制造用于表征扫描探针显微镜探针的尖端形状的结构的方法和由此制造的结构公开(公告)号：US07210330B2
公开(公告)日：2007-05-01
申请号：US11466908
申请日：2006-08-24
申请人： Ami Chand , Nihat Okulan
发明人： Ami Chand , Nihat Okulan
IPC分类号： G01B21/30
CPC分类号： G01Q40/02
摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.
摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针尖端的端部或侧面进行成形。
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7.发明申请METHODS OF FABRICATING STRUCTURES FOR CHARACTERIZING TIP SHAPE OF SCANNING PROBE MICROSCOPE PROBES AND STRUCTURES FABRICATED THEREBY 失效用于表征扫描探针显微镜探针和结构的TIP形状的结构方法制造的方法公开(公告)号：US20060277972A1
公开(公告)日：2006-12-14
申请号：US11466908
申请日：2006-08-24
申请人： Ami Chand , Nihat Okulan
发明人： Ami Chand , Nihat Okulan
CPC分类号： G01Q40/02
摘要： A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.
摘要翻译： 用于确定原子力显微镜的探针尖端的形状的表征器以及制造和使用该表征器的方法。 表征器包括微加工的晶体结构，其具有由适合于表征探针尖端的尺寸的宽度分开的相对边缘。 相对的边缘中的至少一个通过超过宽度的三分之一的伸出距离伸出微加工结晶结构的底切区域。 探针尖端扫描在表征器的边缘以进行形状确定。 表征器通过串联深反应离子蚀刻和各向异性蚀刻（100）单晶硅形成。 相对的边缘可以被氧化锐化以用于对探针尖端的端部或侧面进行成形。
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公开(公告)号：US08857247B2
公开(公告)日：2014-10-14
申请号：US12123363
申请日：2008-05-19
申请人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
发明人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.
摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的衬底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。
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公开(公告)号：US20110306853A1
公开(公告)日：2011-12-15
申请号：US13052887
申请日：2011-03-21
CPC分类号： A61B5/151 , A61B5/14514 , A61B5/1468 , A61B5/150022 , A61B5/150167 , A61B5/150175 , A61B5/150251 , A61B5/150282 , A61B5/150984 , A61B5/157 , A61B10/0045 , A61B10/007 , A61B2010/0061 , A61B2010/0077 , A61B2010/008 , A61M5/30 , A61M27/006 , A61M2037/0023 , A61M2037/003 , A61M2037/0046 , A61M2037/0061
摘要： A body fluid sampling or fluid delivery system includes a polymeric support and an array of polymeric microneedles coupled to the support, each of a microneedle having a height of 500 to 2000 μm and a tapering angle of 60 to 90°. A plurality of polymeric microchannels are provided with being associated with a microneedle. The plurality of polymeric microchannels are integrally formed with the array of polymeric microneedles without bonding. At least one polymeric reservoir is coupled to the plurality of microchannels.
摘要翻译： 体液取样或流体递送系统包括聚合物支撑体和耦合到支撑体的聚合物微针阵列，每个微针具有500至2000μm的高度和60至90°的锥角。 多个聚合物微通道被提供有与微针相关联。 多个聚合物微通道与聚合物微针阵列一体地形成而不粘合。 至少一个聚合物储存器联接到多个微通道。
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公开(公告)号：US20080282819A1
公开(公告)日：2008-11-20
申请号：US12123363
申请日：2008-05-19
申请人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
发明人： Kevin J. Kjoller , Ami Chand , Nihat Okulan
摘要： A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.
摘要翻译： 用于仪器的探针组件和制造方法包括在制造期间具有独立于典型对准误差的长度的衬底和悬臂。 在一个实施例中，探针组件包括介于基底和悬臂之间的缓冲部分。 悬臂从缓冲部分延伸，并且缓冲部分的一部分延伸超过基底的边缘。 缓冲部分的部分比悬臂更硬。 生产探针组件的相应方法有利于批量制作而不损害探针性能。
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