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公开(公告)号:CN102272907B
公开(公告)日:2014-05-14
申请号:CN200980153949.2
申请日:2009-11-09
申请人: 豪锐恩科技私人有限公司
IPC分类号: H01L21/50 , H01L21/68 , H01L21/98 , B23K1/19 , H01L21/683 , B23K101/40
CPC分类号: B23K1/0016 , B23K1/203 , B23K2101/40 , H01L21/683 , H01L21/6838 , H01L21/68707 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/75 , H01L24/81 , H01L24/83 , H01L2221/68354 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/1308 , H01L2224/13082 , H01L2224/131 , H01L2224/13111 , H01L2224/13139 , H01L2224/16225 , H01L2224/16245 , H01L2224/2919 , H01L2224/73204 , H01L2224/7515 , H01L2224/7525 , H01L2224/75251 , H01L2224/755 , H01L2224/75501 , H01L2224/7565 , H01L2224/757 , H01L2224/75701 , H01L2224/75702 , H01L2224/75704 , H01L2224/75705 , H01L2224/75744 , H01L2224/75745 , H01L2224/75753 , H01L2224/75802 , H01L2224/75804 , H01L2224/75822 , H01L2224/75824 , H01L2224/81024 , H01L2224/81048 , H01L2224/81121 , H01L2224/8115 , H01L2224/8116 , H01L2224/8117 , H01L2224/8118 , H01L2224/81191 , H01L2224/81204 , H01L2224/81815 , H01L2224/83192 , H01L2224/8385 , H01L2924/00013 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01072 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/3511 , H01L2924/381 , H01L2924/3841 , Y10T29/41 , H01L2224/13099 , H01L2924/00 , H01L2224/29099 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: 一种用于制造倒装芯片半导体封装的方法,该方法包括处理半导体器件(例如半导体芯片)以及处理器件载体(例如衬底)。半导体器件包括在其表面上形成的凸块结构。衬底包括在其表面上形成的焊接焊盘。半导体芯片被加热至芯片处理温度。芯片处理温度使凸块结构上的焊料部分熔化。衬底被加热至衬底处理温度,其中,所述衬底处理温度可以不同于芯片处理温度。半导体芯片在空间上关于衬底进行对准,从而相应地使凸块结构关于焊接焊盘进行对准。半导体芯片朝向衬底移动,从而使凸块结构邻接焊接焊盘,从而在它们之间形成焊接。还公开了执行上述方法的系统。
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公开(公告)号:CN102272907A
公开(公告)日:2011-12-07
申请号:CN200980153949.2
申请日:2009-11-09
申请人: 豪锐恩科技私人有限公司
IPC分类号: H01L21/50 , H01L21/68 , H01L21/98 , B23K1/19 , H01L21/683 , B23K101/40
CPC分类号: B23K1/0016 , B23K1/203 , B23K2101/40 , H01L21/683 , H01L21/6838 , H01L21/68707 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/75 , H01L24/81 , H01L24/83 , H01L2221/68354 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/1308 , H01L2224/13082 , H01L2224/131 , H01L2224/13111 , H01L2224/13139 , H01L2224/16225 , H01L2224/16245 , H01L2224/2919 , H01L2224/73204 , H01L2224/7515 , H01L2224/7525 , H01L2224/75251 , H01L2224/755 , H01L2224/75501 , H01L2224/7565 , H01L2224/757 , H01L2224/75701 , H01L2224/75702 , H01L2224/75704 , H01L2224/75705 , H01L2224/75744 , H01L2224/75745 , H01L2224/75753 , H01L2224/75802 , H01L2224/75804 , H01L2224/75822 , H01L2224/75824 , H01L2224/81024 , H01L2224/81048 , H01L2224/81121 , H01L2224/8115 , H01L2224/8116 , H01L2224/8117 , H01L2224/8118 , H01L2224/81191 , H01L2224/81204 , H01L2224/81815 , H01L2224/83192 , H01L2224/8385 , H01L2924/00013 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01072 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/3511 , H01L2924/381 , H01L2924/3841 , Y10T29/41 , H01L2224/13099 , H01L2924/00 , H01L2224/29099 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: 一种用于制造倒装芯片半导体封装的方法,该方法包括处理半导体器件(例如半导体芯片)以及处理器件载体(例如衬底)。半导体器件包括在其表面上形成的凸块结构。衬底包括在其表面上形成的焊接焊盘。半导体芯片被加热至芯片处理温度。芯片处理温度使凸块结构上的焊料部分熔化。衬底被加热至衬底处理温度,其中,所述衬底处理温度可以不同于芯片处理温度。半导体芯片在空间上关于衬底进行对准,从而相应地使凸块结构关于焊接焊盘进行对准。半导体芯片朝向衬底移动,从而使凸块结构邻接焊接焊盘,从而在它们之间形成焊接。还公开了执行上述方法的系统。
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