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公开(公告)号:CN102800662B
公开(公告)日:2015-04-01
申请号:CN201210170061.3
申请日:2012-05-28
Applicant: 株式会社东芝
IPC: H01L25/065 , H01L23/488 , H01L21/60
CPC classification number: H01L24/81 , H01L21/50 , H01L23/3128 , H01L23/49811 , H01L24/13 , H01L24/16 , H01L24/73 , H01L25/0657 , H01L25/50 , H01L2224/10135 , H01L2224/10165 , H01L2224/13025 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/14151 , H01L2224/14155 , H01L2224/14156 , H01L2224/14177 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73257 , H01L2224/81139 , H01L2224/8114 , H01L2224/81141 , H01L2224/81191 , H01L2224/81193 , H01L2224/81201 , H01L2224/81203 , H01L2224/83104 , H01L2224/83815 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06527 , H01L2225/06541 , H01L2225/06565 , H01L2924/15311 , H01L2924/3511 , H01L2924/00014 , H01L2924/00012 , H01L2924/01083 , H01L2924/01029 , H01L2924/01047 , H01L2924/00
Abstract: 本发明提供层叠型半导体装置及其制造方法。实施方式的层叠型半导体装置具备:具有第1凸起电极的第1半导体芯片;具有第2凸起电极的第2半导体芯片。一边将凸起电极彼此连接,一边层叠第1及第2半导体芯片。在第1及第2半导体芯片的至少一方,设置阻挡用突起和粘接用突起。阻挡用突起与第1及第2半导体芯片的另一方以非粘接状态接触。粘接用突起与第1及第2半导体芯片粘接。
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公开(公告)号:CN106531648A
公开(公告)日:2017-03-22
申请号:CN201610240001.2
申请日:2016-04-18
Applicant: 株式会社东芝
Abstract: 本发明的实施方式提供一种能够使积层所得的半导体芯片间的连接可靠性提升的半导体装置的制造方法及安装装置。根据实施方式,在间隙运算部(7D),基于接合头(2)的Z坐标(Z1、Z2)及半导体芯片(P2)的芯片厚度(T),运算半导体芯片(P1、P2)间的Z轴方向的间隙(G),且在间隙(G)为规格范围内的情形时,使安装装置持续运转,在间隙(G)为规格范围以外的情形时,使安装装置报警停止。
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公开(公告)号:CN102683330B
公开(公告)日:2015-06-10
申请号:CN201210043825.2
申请日:2012-02-23
Applicant: 株式会社东芝
IPC: H01L25/065 , H01L23/31 , H01L23/29 , H01L21/98
CPC classification number: H01L21/563 , H01L23/3135 , H01L24/13 , H01L24/16 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/92 , H01L25/0657 , H01L25/50 , H01L2224/13025 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/1412 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/32145 , H01L2224/32225 , H01L2224/45144 , H01L2224/48227 , H01L2224/73204 , H01L2224/73207 , H01L2224/73265 , H01L2224/81444 , H01L2224/92125 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06565 , H01L2225/06568 , H01L2924/01014 , H01L2924/01019 , H01L2924/01028 , H01L2924/01079 , H01L2924/10253 , H01L2924/12042 , H01L2924/15311 , H01L2924/15313 , H01L2924/181 , H01L2924/00 , H01L2924/00012
Abstract: 本发明提供半导体装置以及半导体装置的制造方法。半导体装置具备:布线基板,在该布线基板上搭载的半导体芯片叠层体,在半导体芯片叠层体的各半导体芯片之间的间隙填充的底部填充层,包括覆盖·形成于所述半导体芯片叠层体的外侧的模塑树脂的密封层。底部填充层包括包含胺系的固化剂的树脂材料的固化物,该固化物具有65℃以上且100℃以下的Tg。
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公开(公告)号:CN102800662A
公开(公告)日:2012-11-28
申请号:CN201210170061.3
申请日:2012-05-28
Applicant: 株式会社东芝
IPC: H01L25/065 , H01L23/488 , H01L21/60
CPC classification number: H01L24/81 , H01L21/50 , H01L23/3128 , H01L23/49811 , H01L24/13 , H01L24/16 , H01L24/73 , H01L25/0657 , H01L25/50 , H01L2224/10135 , H01L2224/10165 , H01L2224/13025 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/14151 , H01L2224/14155 , H01L2224/14156 , H01L2224/14177 , H01L2224/16145 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/48227 , H01L2224/73204 , H01L2224/73253 , H01L2224/73257 , H01L2224/81139 , H01L2224/8114 , H01L2224/81141 , H01L2224/81191 , H01L2224/81193 , H01L2224/81201 , H01L2224/81203 , H01L2224/83104 , H01L2224/83815 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06527 , H01L2225/06541 , H01L2225/06565 , H01L2924/15311 , H01L2924/3511 , H01L2924/00014 , H01L2924/00012 , H01L2924/01083 , H01L2924/01029 , H01L2924/01047 , H01L2924/00
Abstract: 本发明提供层叠型半导体装置及其制造方法。实施方式的层叠型半导体装置具备:具有第1凸起电极的第1半导体芯片;具有第2凸起电极的第2半导体芯片。一边将凸起电极彼此连接,一边层叠第1及第2半导体芯片。在第1及第2半导体芯片的至少一方,设置阻挡用突起和粘接用突起。阻挡用突起与第1及第2半导体芯片的另一方以非粘接状态接触。粘接用突起与第1及第2半导体芯片粘接。
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公开(公告)号:CN102683330A
公开(公告)日:2012-09-19
申请号:CN201210043825.2
申请日:2012-02-23
Applicant: 株式会社东芝
IPC: H01L25/065 , H01L23/31 , H01L23/29 , H01L21/98
CPC classification number: H01L21/563 , H01L23/3135 , H01L24/13 , H01L24/16 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/92 , H01L25/0657 , H01L25/50 , H01L2224/13025 , H01L2224/13111 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/1412 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/32145 , H01L2224/32225 , H01L2224/45144 , H01L2224/48227 , H01L2224/73204 , H01L2224/73207 , H01L2224/73265 , H01L2224/81444 , H01L2224/92125 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06565 , H01L2225/06568 , H01L2924/01014 , H01L2924/01019 , H01L2924/01028 , H01L2924/01079 , H01L2924/10253 , H01L2924/12042 , H01L2924/15311 , H01L2924/15313 , H01L2924/181 , H01L2924/00 , H01L2924/00012
Abstract: 本发明提供半导体装置以及半导体装置的制造方法。半导体装置具备:布线基板,在该布线基板上搭载的半导体芯片叠层体,在半导体芯片叠层体的各半导体芯片之间的间隙填充的底部填充层,包括覆盖·形成于所述半导体芯片叠层体的外侧的模塑树脂的密封层。底部填充层包括包含胺系的固化剂的树脂材料的固化物,该固化物具有65℃以上且100℃以下的Tg。
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