公开(公告)号：US20180238737A1

公开(公告)日：2018-08-23

申请号：US15962826

申请日：2018-04-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Chi-Hsiang FAN ,  Maurits VAN DER SCHAAR ,  Youping ZHANG

IPC: G01J3/447 ,  G03C7/00

CPC classification number: G01J3/447 ,  G01J2003/283 ,  G01N21/47 ,  G03C7/00 ,  G03F7/70616 ,  G03F7/70633 ,  G03F7/70683

Abstract: A method of measuring n values of a parameter of interest (e.g., overlay) relating to a structure forming process, where n>1. The method includes performing n measurements on each of n+1 targets, each measurement performed with measurement radiation having a different wavelength and/or polarization combination and determining the n values for a parameter of interest from the n measurements of n+1 targets, each of the n values relating to the parameter of interest for a different pair of the layers. Each target includes n+1 layers, each layer including a periodic structure, the targets including at least n biased targets having at least one biased periodic structure formed with a positional bias relative to the other layers, the biased periodic structure being in at least a different one of the layers per biased target. Also disclosed is a substrate having such a target and a patterning device for forming such a target.

公开(公告)号：US08462311B2

公开(公告)日：2013-06-11

申请号：US12591172

申请日：2009-11-12

Applicant: Hsueh-Min Yin ,  Hsin-Chang Huang ,  Jung-Hsiang Lin ,  Shen-Yi Huang

Inventor： Hsueh-Min Yin ,  Hsin-Chang Huang ,  Jung-Hsiang Lin ,  Shen-Yi Huang

IPC: G02F1/1335 ,  G02F1/13 ,  G03G13/01 ,  G03C7/00 ,  H01L21/00

CPC classification number: G02F1/133514 ,  G02F1/1309 ,  H01J9/50 ,  Y02W30/828

Abstract: A display panel has a portion of a color filter or patterned color layer with a thickness of at least half of the cell gap of the display panel, wherein the repair method includes providing a energy light beam to the portion of the color filter or the patterned color layer in the sub-pixel region with a bright point defect to make the portion of the color filter or patterned color layer have porous structure so that bright point is repaired to become a grey point or a dark point.

Abstract translation: 显示面板具有厚度为显示面板的单元间隙的至少一半的滤色器或图案化的彩色层的一部分，其中修复方法包括向滤色器的该部分或图案化的部分提供能量光束 具有亮点缺陷的子像素区域中的彩色层，使得滤色器或图案化着色层的部分具有多孔结构，使得亮点被修复成灰点或暗点。

公开(公告)号：US08241833B2

公开(公告)日：2012-08-14

申请号：US12785019

申请日：2010-05-21

Applicant: Hiromi Kanda ,  Fumiyuki Nishiyama

Inventor： Hiromi Kanda ,  Fumiyuki Nishiyama

IPC: G03C1/00 ,  G03C7/00 ,  G03F7/00

CPC classification number: G03F7/0397 ,  G03F7/0046 ,  G03F7/0048 ,  G03F7/2041 ,  Y10S430/108

Abstract: A positive resist composition comprising (A) resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and capable of decomposing by the action of an acid to increase the solubility in an alkaline developer, (B) a compound capable of generating an acid upon treatment with one of an actinic ray and radiation and (F) a specific surfactant containing a fluorine atom in an amount of from 30 to 60 mass %, and a pattern-forming method using the same.

Abstract translation: 一种正型抗蚀剂组合物，其包含（A）具有单环或多环脂环族烃结构且能够通过酸的作用分解以提高在碱性显影剂中的溶解度的树脂，（B）在用一种处理时能够产生酸的化合物 的光化射线和辐射，以及（F）含有30〜60质量％的氟原子的比表面活性剂和使用其的图案形成方法。

公开(公告)号：US08211612B2

公开(公告)日：2012-07-03

申请号：US11591548

申请日：2006-11-02

Applicant: Kazuhiko Maeda ,  Mitsutaka Otani ,  Haruhiko Komoriya ,  Takeo Komata ,  Shinya Akiba

Inventor： Kazuhiko Maeda ,  Mitsutaka Otani ,  Haruhiko Komoriya ,  Takeo Komata ,  Shinya Akiba

IPC: G03C1/00 ,  G03C7/00 ,  G03F1/00 ,  G03F7/00 ,  C07D307/00 ,  C07D317/00 ,  C07D323/02

CPC classification number: G03F7/2041 ,  G03F7/0046 ,  G03F7/11

Abstract: A method for forming a protective film of a fluorine-containing polymer composition excellent in smoothness and adhesiveness on a photoresist. Moreover, there is provided a means for removing the protective film without impairing the underlying photoresist. A polymer coating composition obtainable by dissolving a fluorine-containing polymer compound in a solvent comprising a fluorinated acetal having a specific structure is applied on a photoresist and dried to form a protective film. A fluorinated acetal having the specific structure is suitable as a solvent for being brought into contact with a fluorine-containing polymer film, peeling the film, and forming a photoresist or a lithographic pattern.

Abstract translation: 形成光致抗蚀剂的平滑性和粘合性优异的含氟聚合物组合物的保护膜的方法。 此外，提供了去除保护膜而不损害下面的光致抗蚀剂的手段。 通过将含氟聚合物化合物溶解在含有特定结构的氟化缩醛的溶剂中而获得的聚合物涂料组合物涂布在光致抗蚀剂上并干燥以形成保护膜。 具有特定结构的氟化缩醛适用作与含氟聚合物膜接触的溶剂，剥离膜，形成光致抗蚀剂或光刻图案。

公开(公告)号：US08133665B2

公开(公告)日：2012-03-13

申请号：US12562149

申请日：2009-09-18

Applicant: Yoichi Hosoya ,  Naoharu Kiyoto ,  Junichiro Hosokawa ,  Masaaki Miki ,  Kouichi Yokota ,  Ryoji Nishimura

Inventor： Yoichi Hosoya ,  Naoharu Kiyoto ,  Junichiro Hosokawa ,  Masaaki Miki ,  Kouichi Yokota ,  Ryoji Nishimura

IPC: G03C7/00 ,  G03C7/46 ,  G03C1/005 ,  G03C3/00 ,  G03C1/494

CPC classification number: G03C1/035 ,  G03C5/02 ,  G03C2001/03558 ,  G03C2001/0357 ,  G03C2001/03594 ,  G03C2007/3025 ,  G03C2200/26

Abstract: Disclosed is a silver halide photographic photosensitive material which includes a support and at least one silver halide photosensitive layer on the support, wherein the average equivalent sphere diameter of the silver halide of the silver halide photosensitive layer is 0.30 μm or less, the silver halide photosensitive layer includes four or more kinds of silver halide grains having mutually different average equivalent sphere diameters, and the thickness between a surface of the support at a side at which the silver halide photosensitive layer is provided and a surface of the silver halide photosensitive layer at a side opposite to the support is 10 μm or less.

Abstract translation: 公开了一种卤化银照相感光材料，其包括载体和支持体上的至少一个卤化银感光层，其中卤化银感光层的卤化银的平均当量球直径为0.30μm或更小，卤化银感光 层包括四种或更多种具有相互不同的平均当量球直径的卤化银颗粒，以及在设置有卤化银感光层的一侧的载体表面与卤化银感光层的表面之间的厚度 与支撑体相对的一侧为10μm以下。

公开(公告)号：US08119739B2

公开(公告)日：2012-02-21

申请号：US12280789

申请日：2007-02-27

Applicant: Hideo Asano ,  Akio Naka ,  Hirokazu Niwa ,  Tomoyuki Kuwamoto ,  Hiroyasu Watabe ,  Yoshiyuki Shiotani

Inventor： Hideo Asano ,  Akio Naka ,  Hirokazu Niwa ,  Tomoyuki Kuwamoto ,  Hiroyasu Watabe ,  Yoshiyuki Shiotani

IPC: C08F269/00 ,  C08F20/26 ,  G03C1/00 ,  G03C7/00

CPC classification number: G02B5/3083 ,  C08F220/26 ,  C08J5/18 ,  C08J2333/06

Abstract: The invention provides a retardation film, composed primarily of an acrylic polymer, with transparency, heat resistance, and large retardation. The retardation film of the present invention is composed primarily of an acrylic polymer. The film has an in-plane retardation of from 130 nm to 500 nm, inclusive, per 100 μm thickness at a wavelength of 589 nm. The film has a total light transmittance of not less than 85%. The retardation film has a glass transition temperature of preferably from 110° C. to 200° C., inclusive. The acrylic polymer, which is the primary component, preferably has a lactone ring structure.

Abstract translation: 本发明提供一种延迟膜，其主要由丙烯酸类聚合物组成，具有透明性，耐热性和较大延迟。 本发明的延迟膜主要由丙烯酸类聚合物构成。 该薄膜在波长589nm处每100μm厚度具有130nm至500nm的面内延迟。 该膜具有不小于85％的总透光率。 延迟膜的玻璃化转变温度优选为110℃〜200℃。 作为主要成分的丙烯酸系聚合物优选具有内酯环结构。

公开(公告)号：US07851133B2

公开(公告)日：2010-12-14

申请号：US11081677

申请日：2005-03-17

Applicant: Naonori Makino ,  Toshifumi Inno

Inventor： Naonori Makino ,  Toshifumi Inno

IPC: G03C1/00 ,  G03C1/72 ,  G03C7/00 ,  B41F7/00

CPC classification number: B41C1/1008 ,  B41C1/1016 ,  B41C2201/02 ,  B41C2201/04 ,  B41C2201/06 ,  B41C2201/10 ,  B41C2201/14 ,  B41C2210/04 ,  B41C2210/08 ,  B41C2210/20 ,  B41C2210/22 ,  B41C2210/24

Abstract: A lithographic printing process which comprises the steps of: imagewise scanning with a laser a presensitized lithographic plate which comprises a hydrophilic support and an image-recording layer containing a polymerization initiator, an ethylenically unsaturated polymerizable compound having no adherence to the hydrophilic support, and an ethylenically unsaturated polymerizable compound having adherence to the hydrophilic support and a molecular structure comprising a polyoxyalkylene group to polymerize the ethylenically unsaturated polymerizable compounds within the exposed area; removing the image-recording layer within the unexposed area from the lithographic plate mounted on a cylinder of a printing press; and then printing an image with the lithographic plate mounted on the cylinder of the printing press. A presensitized lithographic plate is also disclosed.

Abstract translation: 一种平版印刷方法，包括以下步骤：用激光成像扫描包含亲水性支持物和含有聚合引发剂的图像记录层，不粘附于亲水性载体的烯键式不饱和可聚合化合物的预定平版印刷版，以及 具有粘附于亲水性载体的烯属不饱和可聚合化合物和包含聚氧化烯基团的分子结构，以在曝光区域内聚合烯属不饱和可聚合化合物; 从安装在印刷机的滚筒上的平版印刷板移除未曝光区域内的图像记录层; 然后用安装在印刷机滚筒上的平版印刷机印刷图像。 还公开了一种预定平版印刷版。

公开(公告)号：US20100167218A1

公开(公告)日：2010-07-01

申请号：US12719227

申请日：2010-03-08

Applicant: Jeffrey C. Hansen

Inventor： Jeffrey C. Hansen

IPC: G03C7/00 ,  G03C1/46

CPC classification number: G03C7/3022 ,  G03C1/29 ,  G03C7/3041 ,  G03C2001/03511 ,  G03C2001/03541 ,  G03C2001/03594 ,  G03C2007/3034

Abstract: Silver halide photographic elements that are color intermediate motion picture films have at least one green sensitive silver halide emulsion that includes a green sensitizing dye that is a cyanine dye having two oxazole groups in the molecule, and another green sensitizing dye having either two imidazole groups in the molecule or one oxazole group and one thiazole group in the molecule. The molar ratio of the first green sensitizing dye to the second green sensitizing dye is from about 4:1 to about 0.3:1. The magenta dye image forming unit has at least one green sensitive silver halide emulsion layer that comprises predominantly cubic silver iodobromide grains having at least 90 mol % bromide and at least 1 mol % iodide, which grains have an average equivalent spherical diameter (ESD) of less than 0.25 μm.

Abstract translation: 作为彩色中间电影胶片的卤化银照相元件具有至少一种绿色感光卤化银乳剂，其包含作为分子中具有两个恶唑基的花青染料的绿色敏化染料，以及另外具有两个咪唑基的绿色增感染料 分子中的一个或一个恶唑基和一个噻唑基。 第一种绿色增感染料与第二种绿色增感染料的摩尔比为约4:1至约0.3:1。 品红染料图像形成单元具有至少一种感绿卤化银乳剂层，其主要包含具有至少90mol％溴化物和至少1mol％碘化物的立方碘碘化银颗粒，该颗粒的平均当量球形直径（ESD）为 小于0.25μm。

公开(公告)号：US07598026B2

公开(公告)日：2009-10-06

申请号：US11715385

申请日：2007-03-08

Applicant: Akito Yokozawa ,  Tatsuya Ishizaka ,  Katsuyuki Takada ,  Yoshiro Ochiai ,  Tetsuo Nakamura

Inventor： Akito Yokozawa ,  Tatsuya Ishizaka ,  Katsuyuki Takada ,  Yoshiro Ochiai ,  Tetsuo Nakamura

IPC: G03C7/00 ,  G03C1/46 ,  G03C1/005 ,  G03C1/494

CPC classification number: G03C7/3041 ,  G03C1/08 ,  G03C1/09 ,  G03C1/16 ,  G03C1/20 ,  G03C1/29 ,  G03C1/30 ,  G03C5/04 ,  G03C7/3022 ,  G03C7/407 ,  G03C2001/03517 ,  G03C2001/03535 ,  G03C2001/0476 ,  G03C2001/093 ,  G03C2007/3025 ,  G03C2007/3027 ,  G03C2200/26 ,  G03C2200/39 ,  G03C2200/52 ,  G03C2200/60

Abstract: An image-forming method comprising: employing a silver halide color photographic light-sensitive material, comprising, on a support, at least one silver halide emulsion layer containing a yellow dye-forming coupler, at least one silver halide emulsion layer containing a magenta dye-forming coupler, at least one silver halide emulsion layer containing a cyan dye-forming coupler, at least one color-mix preventing layer and at least one protective layer, wherein the said silver halide emulsion layer containing a yellow dye-forming coupler includes a blue-sensitive silver halide emulsion having a silver chloride content of 90 mole % or more and containing at least one specific blue-sensitive sensitizing dye; and exposing the said silver halide color photographic light-sensitive material to a blue semiconductor laser of a wavelength shorter by 30 nm to 60 nm than the wavelength at which the said blue-sensitive silver halide emulsion has the spectral sensitivity maximum.

Abstract translation: 一种图像形成方法，包括：使用卤化银彩色照相感光材料，其在载体上包含至少一种含有黄色染料形成成色剂的卤化银乳剂层，至少一种含有品红染料的卤化银乳剂层 至少一种含有青色染料形成成色剂的卤化银乳剂层，至少一种防混色剂层和至少一层保护层，其中含有黄色染料形成成色剂的所述卤化银乳剂层包括： 蓝色感光卤化银乳剂，其氯化银含量为90摩尔％以上，并且含有至少一种特定的蓝敏敏敏染料; 并将所述卤化银彩色照相感光材料暴露于比所述感蓝卤化银乳剂具有光谱灵敏度最大值的波长短30nm至60nm的蓝色半导体激光器。

公开(公告)号：US20060073427A1

公开(公告)日：2006-04-06

申请号：US10543618

申请日：2003-02-14

Applicant: Motoi Nishimura

Inventor： Motoi Nishimura

IPC: G03C7/00

CPC classification number: G03C7/3835 ,  G03C7/3805 ,  G03C7/39232 ,  G03C7/39244 ,  G03C7/44

Abstract: The present invention relates to a silver halide photographic material exhibiting superior process stability even when processed at a relatively low replenishing rate. The silver halide photographic material comprising on a support at least one silver halide emulsion layer is characterized in that the silver halide emulsion layer contains at least two image-forming couplers represented by the following formula (M-1) or (M-2), in which the difference in number of carbon atoms of the alkyl group contained in the substituent represented by R2 or R3 is at least 2 between the two couplers; and the photographic material is developed with a color developer solution at a replenishing rate of a color developer replenishing solution of 30 to 100 ml per 1 m2, and the color developer replenishing solution containing a color developing agent in an amount of 5.0 to 20 g/L.

Abstract translation: 本发明涉及即使在相对低的补充速率下处理时也表现出优异的工艺稳定性的卤化银照相材料。 卤化银照相材料在载体上包含至少一个卤化银乳剂层，其特征在于卤化银乳剂层含有至少两个由下式（M-1）或（M-2）表示的成像成色剂， 其中由R 2或R 3 3表示的取代基中所含的烷基的碳原子数之间的差异在两个成色剂之间至少为2; 并且以彩色显影剂溶液显影照相材料，每1m 2的色粉显影剂补充溶液的补充速率为30-100ml，并且含有彩色显影剂的显色剂补充溶液在 用量为5.0〜20g / L。