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公开(公告)号:US20250031378A1
公开(公告)日:2025-01-23
申请号:US18908458
申请日:2024-10-07
Applicant: Kioxia Corporation
Inventor: Go OIKE
IPC: H10B43/40 , H01L23/522 , H01L23/528 , H01L23/532 , H01L27/06 , H10B41/20 , H10B41/23 , H10B41/27 , H10B41/30 , H10B41/70 , H10B43/10 , H10B43/20 , H10B43/27 , H10B43/35 , H10B43/50 , H10B53/20
Abstract: A semiconductor memory includes first to fourth stacked bodies. The first stacked body includes a first conductor, and an alternating stack of first insulators and second conductors above the first conductor in a region. The second stacked body includes a third conductor, and an alternating stack of second insulators and fourth conductors above the third conductor in another region. The third stacked body includes a fifth conductor adjacent to the first conductor via a third insulator in a separation region. The fourth stacked body includes a seventh conductor adjacent to the third conductor via a fifth insulator in the separation region. The fifth conductor is electrically insulated from the seventh conductor.
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公开(公告)号:US20240414914A1
公开(公告)日:2024-12-12
申请号:US18528818
申请日:2023-12-05
Inventor: Kaiwei CAO , Wuqian GENG , Wei FENG , Qiong ZHAN
Abstract: The present disclosure provides a memory block and a manufacture method thereof. The memory block includes a substrate, a memory array, and a well-lead-out region. The memory array is arranged on the substrate and includes a plurality of semiconductor-strip-structure columns. The well-lead-out region includes a plurality of well-connection structures. Each semiconductor-strip-structure column extends to the well-lead-out region. In the well-lead-out region, each semiconductor-strip-structure column includes a stepped structure with a plurality of steps. Each well-connection structure corresponds to a corresponding semiconductor-strip-structure column, for electrically connecting channel semiconductor strips in the corresponding semiconductor-strip-structure column together by using the stepped structure in the corresponding semiconductor-strip-structure column.
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公开(公告)号:US20240155843A1
公开(公告)日:2024-05-09
申请号:US17994401
申请日:2022-11-28
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wang Xiang , CHIA CHING HSU , Shen-De Wang , Yung-Lin Tseng , WEICHANG LIU
CPC classification number: H01L27/1157 , H01L27/11524 , H01L27/11553 , H01L27/1158
Abstract: A semiconductor device includes a substrate having a flash memory region and a logic device region, a logic transistor disposed in the logic device region, and a flash memory transistor disposed in the flash memory region. The flash memory transistor includes a metal select gate having two opposite sidewalls and two memory gates disposed on the two opposite sidewalls of the metal select gate.
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公开(公告)号:US20240074169A1
公开(公告)日:2024-02-29
申请号:US18108953
申请日:2023-02-13
Applicant: SK hynix Inc.
Inventor: In Ku KANG
IPC: H10B41/23
CPC classification number: H10B41/23
Abstract: Provided herein may be a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device may include a gate stacked structure including a plurality of insulating layers and a plurality of conductive layers that are alternately stacked, a vertical structure extending into the gate stacked structure, a floating gate disposed between the vertical structure and the plurality of conductive layers, and a dielectric pattern disposed between the floating gate and the plurality of conductive layers. The floating gate may include a first portion that is adjacent to the vertical structure and a second portion that is adjacent to the dielectric pattern, and the dielectric pattern may contact an upper surface, a lower surface, and a sidewall of the second portion.
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公开(公告)号:US12211940B2
公开(公告)日:2025-01-28
申请号:US18586255
申请日:2024-02-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Kyeong Jeong , Yun Heub Song , Chang Hwan Choi , Hyeon Joo Seul
IPC: H01L29/786 , H01L29/66 , H10B41/20 , H10B41/23 , H10B41/27 , H10B41/60 , H10B41/70 , H10B43/23 , H10B43/27 , H10B51/20 , H10B53/20 , H10B63/00
Abstract: The semiconductor device includes a substrate, a stack structure including gate patterns and interlayer insulating films that are alternately stacked on the substrate, an insulating pillar extending in a thickness direction of the substrate within the stack structure, a polycrystalline metal oxide film extending along a sidewall of the insulating pillar between the insulating pillar and the stack structure, a liner film having a transition metal between the insulating pillar and the polycrystalline metal oxide film, and a tunnel insulating film, a charge storage film, and a blocking insulating film which are disposed in order between the polycrystalline metal oxide film and the gate patterns.
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公开(公告)号:US20240381653A1
公开(公告)日:2024-11-14
申请号:US18782012
申请日:2024-07-23
Inventor: Chao-I Wu , Yu-Ming Lin , Sai-Hooi Yeong
Abstract: Provided are a memory device and a method of forming the same. The memory device includes a substrate, a layer stack, and a plurality of composite pillar structures. The layer stack is disposed on the substrate. The layer stack includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The composite pillar structures respectively penetrate through the layer stack. Each composite pillar structure includes a dielectric pillar; a pair of conductive pillars penetrating through the dielectric pillar and electrically isolated from each other through a portion of the dielectric pillar; a channel layer covering both sides of the dielectric pillar and the pair of conductive pillars; a ferroelectric layer disposed between the channel layer and the layer stack; and a buffer layer disposed between the channel layer and the ferroelectric layer.
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公开(公告)号:US11737279B2
公开(公告)日:2023-08-22
申请号:US17835134
申请日:2022-06-08
Applicant: KIOXIA CORPORATION
Inventor: Go Oike
IPC: H01L27/11573 , H10B43/40 , H01L23/528 , H01L23/522 , H01L27/06 , H10B41/20 , H10B41/23 , H10B41/27 , H10B41/30 , H10B41/70 , H10B43/20 , H10B43/27 , H10B43/35 , H10B53/20 , H01L23/532
CPC classification number: H10B43/40 , H01L23/528 , H01L23/5226 , H01L27/0688 , H10B41/20 , H10B41/23 , H10B41/27 , H10B41/30 , H10B41/70 , H10B43/20 , H10B43/27 , H10B43/35 , H10B53/20 , H01L23/53228 , H01L23/53257 , H01L23/53271
Abstract: A semiconductor memory includes first to fourth stacked bodies. The first stacked body includes a first conductor, and an alternating stack of first insulators and second conductors above the first conductor in a region. The second stacked body includes a third conductor, and an alternating stack of second insulators and fourth conductors above the third conductor in another region. The third stacked body includes a fifth conductor adjacent to the first conductor via a third insulator in a separation region. The fourth stacked body includes a seventh conductor adjacent to the third conductor via a fifth insulator in the separation region. The fifth conductor is electrically insulated from the seventh conductor.
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公开(公告)号:US20230134659A1
公开(公告)日:2023-05-04
申请号:US18090357
申请日:2022-12-28
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: Liang Chen
Abstract: The present disclosure provides a semiconductor device, a three-dimensional memory and a fabrication method of the semiconductor device. The semiconductor device comprises a substrate, a plurality of gates on a first side of the substrate and extending parallelly in a first horizontal direction, a plurality of first contacts each on a corresponding one of the plurality of gates and extending along the first horizontal direction, and a plurality of second contacts on the first side of the substrate, each second contact extends along the first horizontal direction, and is located between adjacent two first contacts and between two corresponding gates.
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公开(公告)号:US12144181B2
公开(公告)日:2024-11-12
申请号:US18346473
申请日:2023-07-03
Applicant: Kioxia Corporation
Inventor: Go Oike
IPC: H10B43/20 , H01L23/522 , H01L23/528 , H01L27/06 , H10B41/20 , H10B41/23 , H10B41/27 , H10B41/30 , H10B41/70 , H10B43/10 , H10B43/27 , H10B43/35 , H10B43/40 , H10B43/50 , H10B53/20 , H01L23/532
Abstract: A semiconductor memory includes first to fourth stacked bodies. The first stacked body includes a first conductor, and an alternating stack of first insulators and second conductors above the first conductor in a region. The second stacked body includes a third conductor, and an alternating stack of second insulators and fourth conductors above the third conductor in another region. The third stacked body includes a fifth conductor adjacent to the first conductor via a third insulator in a separation region. The fourth stacked body includes a seventh conductor adjacent to the third conductor via a fifth insulator in the separation region. The fifth conductor is electrically insulated from the seventh conductor.
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公开(公告)号:US12096622B2
公开(公告)日:2024-09-17
申请号:US17502140
申请日:2021-10-15
Applicant: Applied Materials, Inc.
Inventor: Armin Saeedi Vahdat , John Hautala , Johannes M. van Meer
IPC: H10B41/20 , B82Y10/00 , B82Y40/00 , H10B41/23 , H10B41/27 , H10B41/41 , H10B43/20 , H10B43/23 , H10B43/27 , H10B43/40
Abstract: A semiconductor manufacturing process and semiconductor device having an airgap to isolate bottom implant portions of a substrate from upper source and drain device structure to reduce bottom current leakage and parasitic capacitance with an improved scalability on n-to-p spacing scaling. The disclosed device can be implanted to fabricate nanosheet FET and other such semiconductor device. The airgap is formed by etching into the substrate, below a trench in a vertical and horizontal direction. The trench is then filled with dielectric and upper device structure formed on either side of the dielectric filler trench.
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