Material, particularly for an optical component for use in microlithography, and method for making a blank from the material
    3.
    发明授权
    Material, particularly for an optical component for use in microlithography, and method for making a blank from the material 有权
    材料,特别是用于微光刻中使用的光学部件的材料,以及从该材料制造坯料的方法

    公开(公告)号:US07691766B2

    公开(公告)日:2010-04-06

    申请号:US11788007

    申请日:2007-04-18

    摘要: The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical components for microlithography. According to the invention the material consists of synthetically produced quartz crystallites which form a polycrystalline structure and have a mean grain size in the range between 500 nm and 30 μm. The method according to the invention for making a blank from the material comprises providing granules consisting of synthetically produced quartz crystals having a mean grain size in the range between 500 nm and 30 μm, and sintering the granules to obtain a blank of polycrystalline quartz.

    摘要翻译: 本发明涉及对波长低于250nm,低双折射,高耐化学性和高耐辐射性的UV辐射的吸收低的材料,因此特别可用于制造用于微光刻的光学部件。 根据本发明,该材料由合成产生的石英晶体组成,其形成多晶结构,其平均晶粒尺寸在500nm至30μm的范围内。 根据本发明的用于从该材料制造坯料的方法包括提供由合成产生的平均晶粒尺寸在500nm和30μm之间的石英晶体组成的颗粒,并烧结颗粒以获得多晶石英的坯料。

    Process for preparing polyolefins
    5.
    发明授权
    Process for preparing polyolefins 失效
    聚烯烃的制备方法

    公开(公告)号:US4537938A

    公开(公告)日:1985-08-27

    申请号:US591912

    申请日:1984-03-21

    CPC分类号: C08F10/00 Y10S526/907

    摘要: Provided is an olefin-polymerization catalyst comprising the combination of the following components [I] and [II]:[I] a solid component obtained by intercontacting and reacting the following components (1) through (4):(1) a compound obtained by treating an oxide of an element of Groups II-IV in the Periodic Table with a compound represented by the general formula R.sup.1.sub.m Si(OR.sup.2).sub.n.sup.X.sub.4-m-n wherein R.sup.1 and R.sup.2 are each a hydrocarbon radical having 1 to 24 carbon atoms, a hydrocarbon radical containing oxygen, sulfur or nitrogen, or hydrogen, X is a halogen atom, m is 0.ltoreq.m

    摘要翻译: 本发明提供包含以下组分[I]和[II]的组合的烯烃聚合催化剂:[I]通过使下述组分(1)至(4)中间接触和反应获得的固体组分:(1)获得的化合物 通过用通式R1mSi(OR2)nX4-mn表示的化合物处理元素周期表中II-Ⅳ族元素的氧化物,其中R 1和R 2各自为具有1至24个碳原子的烃基,烃基 含有氧,硫或氮或氢,X是卤素原子,m是0 表示的化合物,其中R 4,R 5和R 6各自为具有1至24个碳原子的烃基,烷氧基,氢或卤素原子,R 7为具有1 至24个碳原子,n为1

    Nontoxic polyethoxysiloxane material or the production of biologically resorbable and/or bioactive articles containing polyethoxysiloxane material, the production thereof, and the use thereof
    7.
    发明授权
    Nontoxic polyethoxysiloxane material or the production of biologically resorbable and/or bioactive articles containing polyethoxysiloxane material, the production thereof, and the use thereof 有权
    无毒的聚乙氧基硅氧烷材料或生产含有聚乙氧基硅氧烷材料的生物可再吸收和/或生物活性制品,其生产及其用途

    公开(公告)号:US08206675B2

    公开(公告)日:2012-06-26

    申请号:US12602773

    申请日:2008-06-03

    申请人: Axel Thierauf

    发明人: Axel Thierauf

    IPC分类号: C01B15/14

    摘要: The present invention relates to a polyethoxysiloxane (PES) material to be obtained in that (a) a first hydrolysis condensation reaction of a maximum of one group X of one or more different Si compounds of the formula (I) SiX4 (I) in which the groups X are the same or different and represent hydroxy, hydrogen, or ethoxy (EtO), are catalyzed in an acidic fashion at an initial pH value of 0 to ≦7, is conducted in the presence of ethanol (EtOH) or an ethanol-water mixture as a solvent over a time period of 1 to 24 hours at a temperature of 0° C. to 78° C, (b) a second hydrolysis condensation reaction of the material obtained in step (a) is conducted while simultaneously removing the solvent by successive evaporation in a gas diffusion-tight container at a pressure of 100 to 1013 mbar, preferably at a slight negative pressure of 300 mbar to 800 mbar and a temperature of 50-78° C. until a drastic increase in viscosity (at a shear rate of 10 s−1 at 4° C.) to 0.5 to 2 Pa·s until a constant weight is attained and a cyclotetrasiloxane of the general formula ((SiO(OH)0,75(OEt)1,25× 1/64H2O)4 and a molar mass of 4*approx. 114 g=approx. 456 g; (c) said PES material is cooled in a closed container over a time period from a few minutes to a few hours, and (d) the PES material obtained from step (c) is converted into an rPES material by a third hydrolysis condensation reaction.

    摘要翻译: 本发明涉及一种聚乙氧基硅氧烷(PES)材料,其中:(a)最多一个X基团的一种或多种不同的式(I)SiX 4(I)的Si化合物的第一水解缩合反应,其中 基团X相同或不同,代表羟基,氢或乙氧基(EtO),在酸性条件下以0至< 1EE的初始pH值催化; 7在乙醇(EtOH)或 乙醇 - 水混合物作为溶剂,在0℃至78℃的温度下在1至24小时的时间段内进行,(b)在步骤(a)中获得的材料进行第二次水解缩合反应,同时 在气体扩散密封容器中以100至1013毫巴的压力,优选在300毫巴至800毫巴的轻微负压和50-78℃的温度下连续蒸发除去溶剂,直到粘度急剧增加 (在4℃下以10s -1的剪切速率)至0.5〜2Pa·s,直到a 获得恒重,通式为((SiO(OH)0.75(OEt)1,25×1 / 64H 2 O)4和摩尔质量4 *的环四硅氧烷。 114 g =约 456克 (c)所述PES材料在密闭容器中在几分钟至几小时的时间内被冷却,(d)通过第三次水解缩合反应将步骤(c)获得的PES材料转化成rPES材料 。

    Method for making a blank from material, particularly for an optical component for use in microlithography
    8.
    发明授权
    Method for making a blank from material, particularly for an optical component for use in microlithography 有权
    用于从材料制成坯料的方法,特别是用于微光刻中使用的光学部件

    公开(公告)号:US07954341B2

    公开(公告)日:2011-06-07

    申请号:US12713097

    申请日:2010-02-25

    摘要: The invention is concerned with a material which shows low absorption for UV radiation having a wavelength below 250 nm, low birefringence, high chemical resistance and high radiation resistance and which is therefore particularly usable for making optical components for microlithography. According to the invention the material consists of synthetically produced quartz crystallites which form a polycrystalline structure and have a mean grain size in the range between 500 nm and 30 μm. The method according to the invention for making a blank from the material comprises providing granules consisting of synthetically produced quartz crystals having a mean grain size in the range between 500 nm and 30 μm, and sintering the granules to obtain a blank of polycrystalline quartz.

    摘要翻译: 本发明涉及对波长低于250nm,低双折射,高耐化学性和高耐辐射性的UV辐射的吸收低的材料,因此特别可用于制造用于微光刻的光学部件。 根据本发明,该材料由合成产生的石英晶体组成,其形成多晶结构,其平均晶粒尺寸在500nm至30μm的范围内。 根据本发明的用于从该材料制造坯料的方法包括提供由合成产生的平均晶粒尺寸在500nm和30μm之间的石英晶体组成的颗粒,并烧结颗粒以获得多晶石英的坯料。