Raw material gas supply method
    3.
    发明授权
    Raw material gas supply method 有权
    原料气供应方式

    公开(公告)号:US09563209B2

    公开(公告)日:2017-02-07

    申请号:US14168549

    申请日:2014-01-30

    摘要: A raw material gas supply method for use in a film forming apparatus which forms a film on a substrate, includes supplying a carrier gas to a gas phase zone defined inside a raw material container accommodating a liquid or solid raw material, vaporizing the raw material, supplying a raw material gas containing the vaporized raw material from the raw material container to the film forming apparatus via a raw material gas supply path, measuring a flow rate of the vaporized raw material flowing through the raw material gas supply path, comparing the flow rate of the vaporized raw material obtained by the flow rate measurement unit with a predetermined target value, and controlling an internal pressure of the raw material container to be increased when the flow rate is higher than the predetermined target value, and to be decreased when the is lower than the predetermined target value.

    摘要翻译: 一种在用于在基板上形成膜的成膜装置中使用的原料气体供给方法,包括将载气供给到容纳液体或固体原料的原料容器内的气相区域,使原料蒸发, 通过原料气体供给路径将原料容器内的原料气体从原料容器供给到成膜装置,测定流过原料气体供给路径的气化原料的流量,比较流量 的流量测量单元获得的蒸发的原料具有预定目标值,并且当流量高于预定目标值时,控制原料容器的内部压力增加,并且当其为 低于预定目标值。

    PILOT VALVE
    4.
    发明申请
    PILOT VALVE 审中-公开
    导阀

    公开(公告)号:US20170016553A1

    公开(公告)日:2017-01-19

    申请号:US15124405

    申请日:2015-03-12

    IPC分类号: F16K31/128

    摘要: A pilot valve that includes a pilot valve body including a chamber, a first fluid inlet and a second fluid inlet for providing fluid to the chamber, and a fluid outlet for receiving fluid from the chamber. The pilot valve further includes a separating element and a valve rod, the valve rod is arranged to control fluid flow from the first or second fluid inlet to the fluid outlet via the chamber. The separating element is connected to, and movable with the valve rod, and has a first fluid contacting area configured to be in fluid communication with the first fluid inlet, and a second fluid contacting area configured to be in fluid communication with the second fluid inlet and arranged on an opposite side to the first fluid contacting area. The pilot valve is at least partly controlled by a difference between a first force and a second forces acting on the first and second fluid contacting areas of the separating element.

    摘要翻译: 一种先导阀,包括先导阀体,其包括腔室,第一流体入口和用于向腔室提供流体的第二流体入口以及用于从腔室接收流体的流体出口。 先导阀还包括分离元件和阀杆,阀杆被布置成控制经由腔室从第一或第二流体入口到流体出口的流体流动。 分离元件连接到阀杆上并且可与阀杆一起移动,并且具有被配置为与第一流体入口流体连通的第一流体接触区域和被配置为与第二流体入口流体连通的第二流体接触区域 并且布置在与第一流体接触区域相反的一侧。 导向阀至少部分地由作用在分离元件的第一和第二流体接触区域上的第一力和第二力之间的差异控制。

    Multiflex coupling
    5.
    发明授权
    Multiflex coupling 有权
    多联轴器

    公开(公告)号:US09280161B2

    公开(公告)日:2016-03-08

    申请号:US13794517

    申请日:2013-03-11

    申请人: Kim Ngoc Vu

    发明人: Kim Ngoc Vu

    IPC分类号: G05D7/06 H02N2/04

    摘要: A compact, easily manufactured, axisymmetric mechanism can be configured to change the magnitude of a short-movement linear motion, or also reverse the movement direction, of an actuator for control of movable elements. The mechanism is bidirectional and reversible, functioning symmetrically, and does not contain any gears nor lead screw threads. It is constantly loaded, so that force change is achieved without mechanical backlash, introducing hysteresis. The movement conversion is generally proportional and suitable for use in actuating a fluid control valve intended for modulating the control of fluids.

    摘要翻译: 可以将紧凑的,容易制造的轴对称机构配置成改变用于控制可移动元件的致动器的短运动线性运动的大小或者也可以反转运动方向。 机构是双向和可逆的,对称运行,不包含任何齿轮和导螺纹。 它是恒定负载的,所以实现力的变化没有机械反冲,引入滞后。 运动转换通常是成比例的并且适用于致动用于调节流体控制的流体控制阀。

    Flow reduction for bleed air systems
    6.
    发明授权
    Flow reduction for bleed air systems 有权
    排气系统的流量减少

    公开(公告)号:US09272787B2

    公开(公告)日:2016-03-01

    申请号:US13862109

    申请日:2013-04-12

    IPC分类号: G05D16/02 B64D13/00 G05D7/06

    摘要: A valve control system includes a valve connected to regulate flow of a medium provided to an output and a sensor connected to monitor a feedback value associated with the medium. A controller modulates the valve based on a comparison of a reference value to the feedback value provided by the sensor. The controller detects saturation of the valve if the error between the monitored feedback value and reference value exceeds a threshold. In response to detected saturation, the controller reduces the reference value to a value less than the monitored feedback value.

    摘要翻译: 阀控制系统包括连接到调节提供给输出的介质的流动的阀和连接到监视与介质相关联的反馈值的传感器。 控制器基于参考值与传感器提供的反馈值的比较来调节阀。 如果监控的反馈值和参考值之间的误差超过阈值,控制器将检测阀的饱和度。 响应于检测到的饱和度,控制器将参考值减小到小于监视反馈值的值。

    Control pilot valve apparatus
    7.
    发明授权
    Control pilot valve apparatus 有权
    控制先导阀装置

    公开(公告)号:US09249896B2

    公开(公告)日:2016-02-02

    申请号:US14195094

    申请日:2014-03-03

    申请人: CLA-VAL CO.

    发明人: Robert Folk

    摘要: A system for hydraulically managing fluid pressure between selected set points includes a pilot control system operably coupled to a main valve. The pilot control system includes at least one fluid conduit, a variable orifice assembly, and a control pilot valve apparatus. Fluid is passed through a fixed orifice and into a first chamber of the control pilot valve apparatus. Fluid is passed through the variable orifice of the variable orifice assembly and into a second chamber of the control pilot valve apparatus. The main valve is hydraulically opened or closed in response to a pressure differential between the first and second chambers of the control pilot valve apparatus so as to manage fluid pressure downstream of the main valve between the selected upper and lower set points.

    摘要翻译: 用于在选定的设定点之间液压管理流体压力的系统包括可操作地连接到主阀的先导控制系统。 先导控制系统包括至少一个流体导管,可变孔组件和控制先导阀装置。 流体通过固定孔并进入控制先导阀装置的第一腔室。 流体通过可变孔组件的可变孔并进入控制先导阀装置的第二腔。 响应于控制先导阀装置的第一和第二腔室之间的压力差,主阀门被液压地打开或关闭,以便控制在所选择的上限和下限设定点之间的主阀下游的流体压力。

    PILOT OPERATED FLUID REGULATORS HAVING A RESET APPARATUS AND RELATED METHODS
    8.
    发明申请
    PILOT OPERATED FLUID REGULATORS HAVING A RESET APPARATUS AND RELATED METHODS 有权
    具有复位装置的PILOT操作的流体调节器及相关方法

    公开(公告)号:US20160018830A1

    公开(公告)日:2016-01-21

    申请号:US14867955

    申请日:2015-09-28

    IPC分类号: G05D16/20 F16K31/12 G05D16/16

    摘要: Fluid regulator systems having reset apparatus and methods are described herein. A fluid regulator system includes a fluid regulator including a loading chamber and a supply chamber. The supply chamber is in fluid communication with a supply fluid. The system includes a first fluid control device having a loading inlet and a loading outlet. The loading inlet receives a loading fluid from a loading fluid source and the loading outlet is in fluid communication with the loading chamber. The first fluid control device controls fluid flow between the loading fluid source and the loading chamber. A second fluid control device includes a vent inlet and a vent outlet. The vent inlet is in fluid communication with the loading outlet and the loading chamber and the vent outlet is in fluid communication with a vent. The second fluid control device to control fluid flow between the loading chamber and the vent.

    摘要翻译: 具有复位装置和方法的流体调节器系统在此被描述。 流体调节器系统包括包括装载室和供应室的流体调节器。 供应室与供应流体流体连通。 该系统包括具有装载入口和装载出口的第一流体控制装置。 装载入口从加载流体源接收装载流体,并且装载出口与装载室流体连通。 第一流体控制装置控制装载流体源和装载室之间的流体流动。 第二流体控制装置包括通气口和通风口。 排气口与装载出口流体连通,并且装载室和排气口与排气口流体连通。 第二流体控制装置,用于控制装载室和通气口之间的流体流动。

    Hydraulic valve for use in a control module of an automatic transmission
    10.
    发明授权
    Hydraulic valve for use in a control module of an automatic transmission 有权
    用于自动变速器控制模块的液压阀

    公开(公告)号:US09086170B2

    公开(公告)日:2015-07-21

    申请号:US13377628

    申请日:2010-06-22

    摘要: A hydraulic valve assembly (10) adapted to be mounted to a transmission control module (15) and having a valve body (12), a valve bore (16), and at least one pressure supply port (26) as well as at least one pressure control port (28) that establish fluid communication between a source of pressurized fluid and a component to be controlled by the valve assembly. A valve member (18) is supported in the valve bore (16) and is selectively movable between predetermined positions to direct the pressurized fluid between the pressure supply port (26) and the pressure control port (28). In addition, the hydraulic valve assembly (10) includes a biasing mechanism (80, 180, 280, 380) that is responsive to the flow of hydraulic fluid through the valve body to generate a biasing force acting on the valve body (12) in a direction toward the pressure supply port (26).

    摘要翻译: 一种液压阀组件(10),其适于安装到变速器控制模块(15)上并且具有阀体(12),阀孔(16)和至少一个压力供给口(26)以及至少 一个压力控制端口(28),其建立加压流体源和要由阀组件控制的部件之间的流体连通。 阀构件(18)被支撑在阀孔(16)中,并且可选择性地在预定位置之间移动以将加压流体引导到压力供给口(26)和压力控制口(28)之间。 此外,液压阀组件(10)包括偏压机构(80,180,280,380),该偏置机构响应于通过阀体的液压流体的流动,以产生作用在阀体(12)上的偏压力 朝向压力供给口(26)的方向。