FLOW CONTROL ARRANGEMENTS WITH FLOW SWITCHES, SEMICONDUCTOR PROCESSING SYSTEMS, AND FLOW CONTROL METHODS

    公开(公告)号:US20240019879A1

    公开(公告)日:2024-01-18

    申请号:US18351150

    申请日:2023-07-12

    发明人: Glenn Holbrook

    IPC分类号: G05D7/06

    CPC分类号: G05D7/0647

    摘要: A flow control arrangement is provided including a housing seating inlet and outlet conduits is provided. An isolation valve is arranged within the housing and is fluidly coupled to the inlet conduit. A first flow switch with a first shutoff trigger is arranged within the housing and fluidly couples the isolation valve to the outlet conduit. A second flow switch with a second shutoff trigger is arranged outside of the housing and is fluidly separated from the first flow switch. A controller operably connects the first and second flow switches to the isolation valve to close the isolation valve when (a) flow rate of a first fluid traversing the first flow switch is greater than the first shutoff trigger, or (b) flow rate of a second fluid traversing the second flow switch is less than the second shutoff trigger. Semiconductor processing systems and flow control methods are also described.