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公开(公告)号:US12095230B2
公开(公告)日:2024-09-17
申请号:US17611548
申请日:2020-05-14
发明人: Dieter Bimberg , Gunter Larisch
CPC分类号: H01S5/18344 , H01S5/209
摘要: An exemplary embodiment of the present invention relates to a method of fabricating at least one radiation emitter comprising the steps of depositing an etch stop layer on a top side of a substrate; depositing a layer stack on the etch stop layer, said layer stack comprising a first contact layer, a first reflector, an active region, a second reflector, and a second contact layer; locally removing the layer stack and the etch stop layer, and thereby forming at least one mesa, said at least one mesa comprising an unremoved section of the etch stop layer and a layered pillar which forms a vertical cavity laser structure based on the unremoved layer stack inside the at least one mesa; depositing a protection material on the top side of the substrate and thereby embedding the entire mesa in the protection material wherein the backside of the substrate remains unprotected; removing the substrate by applying at least one etching chemical that is capable of etching the substrate but incapable or less capable of etching the etch stop layer and the protection material; and removing the etch stop layer and thereby exposing the first contact layer of the at least one layered pillar.
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公开(公告)号:US20240088625A1
公开(公告)日:2024-03-14
申请号:US18207864
申请日:2023-06-09
申请人: Bandwidth10, LTD.
发明人: Carlos Fernando Rondina Mateus , Christopher Chase , Michael C. Y. Huang , Murat Serbay , Stefano Prandoni , Philip Worland
CPC分类号: H01S5/18302 , H01S5/18344 , H01S5/18386 , H01S5/3416 , H01S5/34306
摘要: An optoelectronic apparatus includes a tunable VCSEL laser with one or more active regions having quantum wells and barriers. The active regions are surrounded by one or more p-n junctions. The one or more active regions can include a selected shape structure. One or more tunnel junctions (TJ) are provided. One or more apertures are provided with the selected shape structure. One or more buried tunnel junctions (BTJ) or oxide confine the apertures, additional TJ's, planar structures and or additional BTJ's 28 created during a regrowth process that is independent of a first growth process. A VCSEL output is determined in response to an application of the VCSEL laser. The VCSEL laser includes an HCG grating and a bottom DBR. A user monitoring device that includes the VCSEL. A cylindrical lens has a cylinder axis. An optical element (DOE) projects the light emitted by the elements to generate a pattern of stripes corresponding to the columns of the grid pattern.
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公开(公告)号:US11876348B2
公开(公告)日:2024-01-16
申请号:US17032673
申请日:2020-09-25
申请人: Apple Inc.
发明人: Mariam Sadaka , Date J. Noorlag
CPC分类号: H01S5/18313 , H01S5/18327 , H01S5/18344 , H01S5/2205 , H01S5/4025 , H01S5/423 , H01S2301/176
摘要: Trenched VCSEL emitter structures are described. In an embodiment, an emitter structure includes a cluster of non-uniformly distributed emitters in which each emitter includes an inside mesa trench and an oxidized portion of an oxide aperture layer extending from the inside mesa trench. An outside moat trench is located adjacent the inside mesa trench and is formed to a depth past the oxide aperture layer.
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公开(公告)号:US20230327405A1
公开(公告)日:2023-10-12
申请号:US18044193
申请日:2020-11-06
CPC分类号: H01S5/2232 , H01S5/3213 , H01S5/02469 , H01S5/18344
摘要: An optical semiconductor device of the present disclosure comprises: a ridge structure formed on a first-conductivity-type semiconductor substrate; a buried layer buried on both side surfaces of the ridge structure; a second-conductivity-type second cladding layer and a second-conductivity-type contact layer laminated on the top of the ridge structure and the surface of the buried layer; a stripe-shaped mesa structure formed of a mesa reaching from the second-conductivity-type contact layer to the first-conductivity-type semiconductor substrate; a heat dissipation layer formed on the surface of the second-conductivity-type contact layer; a mesa protective film covering both side surfaces of the mesa structure and both end portions of the surface of the second-conductivity-type contact layer; and a second-conductivity-type-side electrode electrically connected to the second-conductivity-type contact layer.
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公开(公告)号:US11658464B2
公开(公告)日:2023-05-23
申请号:US16535031
申请日:2019-08-07
CPC分类号: H01S5/18311 , H01S5/026 , H01S5/1003 , H01S5/125 , H01S5/18344 , H01S5/34353 , H01S5/50
摘要: A semiconductor optical amplifier includes a conductive region that is provided on a substrate and allows light transmission, and a nonconductive region that is provided around the conductive region and prohibits light transmission. The conductive region includes a first region including a light-coupling portion to which light from an external light-source unit is coupled, and a second region having a narrower width than the first region and connected to the first region through a connecting portion, the second region including a light-amplifying portion amplifying the light from the light-coupling portion by propagating the light in a predetermined propagating direction along a surface of the substrate, the light-amplifying portion outputting the amplified light in a direction intersecting the surface of the substrate. Seen in a direction perpendicular to the surface of the substrate, the semiconductor optical amplifier includes a portion where a width of the conductive region is continuously reduced from the first region to the second region.
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公开(公告)号:US20180358780A1
公开(公告)日:2018-12-13
申请号:US16106458
申请日:2018-08-21
申请人: EPISTAR CORPORATION
发明人: Tzu-Chieh HSU , Yi-Wen HUANG , Yi-Hung LIN , Chih-Chiang LU
IPC分类号: H01S5/187 , H01S5/343 , H01S5/183 , H01S5/22 , H01S5/042 , H01S5/026 , H01S5/028 , H01S5/022 , H01S5/42
CPC分类号: H01S5/0425 , H01S5/02276 , H01S5/026 , H01S5/0283 , H01S5/0286 , H01S5/0421 , H01S5/18308 , H01S5/18322 , H01S5/18344 , H01S5/1835 , H01S5/18391 , H01S5/18394 , H01S5/187 , H01S5/2213 , H01S5/2214 , H01S5/2216 , H01S5/343 , H01S5/423 , H01S2301/18
摘要: A light-emitting device is provided. The light-emitting device comprises: a substrate; and multiple radiation emitting regions arranged on the substrate, and comprising: a first radiation emitting region capable of emitting coherent light and emits a coherent light when driven by a first current; a second radiation emitting region capable of emitting coherent light and emits an incoherent light when driven by the first current, wherein each of the first radiation emitting region and the second emitting region comprises epitaxial structure comprising a first DBR stack, a light-emitting structure, and a second DBR stack.
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公开(公告)号:US09929538B2
公开(公告)日:2018-03-27
申请号:US13608061
申请日:2012-09-10
申请人: Mitsuhiro Ikuta
发明人: Mitsuhiro Ikuta
CPC分类号: H01S5/18386 , B41J2/471 , B82Y20/00 , H01S5/18311 , H01S5/18344 , H01S5/18391 , H01S5/34326 , H01S2301/166 , H01S2301/176 , H01S2301/18
摘要: A first stepped structure configured to apply a reflectance difference and a second stepped structure configured to change a far field light intensity distribution are provided. A region in which a level difference of the first stepped structure is formed has a predetermined relationship with a region in which a level difference of the second stepped structure is formed.
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公开(公告)号:US09929536B1
公开(公告)日:2018-03-27
申请号:US15624489
申请日:2017-06-15
发明人: Bing-Cheng Lin , Chih Cheng Chen , Hung-Wei Tseng
CPC分类号: H01S5/18344 , H01S5/0425 , H01S5/18313 , H01S5/18333 , H01S5/2063
摘要: A vertical-cavity surface-emitting Laser (VCSEL) has a three-trench structure. By forming a first trench within a mesa around the periphery of an output window of the VCSEL, the overall capacitance is decreased and the time used in the oxidation process for an oxidation layer is shortened. By forming a second trench and a third trench on the periphery of the mesa in a step-like concave manner, the mesa becomes a step-like structure having double mesa-layers. Such that, a larger heat-radiating area can be obtained for decreasing thermal effects, while the metal-gap defects of the metal layer can also be avoided. The implant layer is formed around the periphery of the output window for controlling the optical mode and confining the current path. In addition, an output layer is formed on the output window for controlling the output light.
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公开(公告)号:US20180048119A1
公开(公告)日:2018-02-15
申请号:US15794756
申请日:2017-10-26
申请人: EPISTAR CORPORATION
发明人: Tzu-Chieh HSU , Yi-Wen HUANG , Yi-Hung LIN , Chih-Chiang LU
CPC分类号: H01S5/187 , H01S5/02276 , H01S5/026 , H01S5/0283 , H01S5/0286 , H01S5/0421 , H01S5/0425 , H01S5/18308 , H01S5/18322 , H01S5/18344 , H01S5/1835 , H01S5/18391 , H01S5/18394 , H01S5/2213 , H01S5/2214 , H01S5/2216 , H01S5/343 , H01S5/423 , H01S2301/18
摘要: A light-emitting device is provided. The light-emitting device comprises: an epitaxial structure comprising a first DBR stack, a light-emitting stack and a second DBR stack and a contact layer in sequence; an electrode on the epitaxial structure; a current blocking layer between the contact layer and the electrode; a first opening formed in the current blocking layer; and a second opening formed in the electrode and within the first opening; wherein a part of the electrode fills in the first opening and contacts the contact layer.
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公开(公告)号:US09748739B2
公开(公告)日:2017-08-29
申请号:US15093990
申请日:2016-04-08
发明人: Tsuyoshi Kaneko , Tetsuo Nishida , Yuji Kurachi
CPC分类号: H01S5/18333 , G04F5/145 , H01S5/0425 , H01S5/18311 , H01S5/18313 , H01S5/18344 , H01S5/1835 , H01S5/18352 , H01S5/18361 , H01S5/187 , H01S5/2213 , H01S5/34313 , H03L7/26
摘要: A vertical cavity surface emitting laser includes: a substrate; a first mirror layer; an active layer; a second mirror layer; a current constriction layer; a first area connected to the first mirror layer and including a plurality of oxide layers; and a second area connected to the second mirror layer and including a plurality of oxide layers. The first mirror layer, the active layer, the second mirror layer, the current constriction layer, the first area, and the second area configure a laminated body. The laminated body includes a first portion, a second portion, and a third portion between the first portion and the second portion. When a width of the oxide area is W1 and a width of an upper surface of the first portion is W2, W2/W1≦3.3.
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