公开(公告)号：US08916834B2

公开(公告)日：2014-12-23

申请号：US14305681

申请日：2014-06-16

Applicant: Glenn Lane Family Limited Liability Limited Partnership

Inventor： Glenn E. Lane

IPC: B01J19/08 ,  B03C1/00 ,  H01J27/00

CPC classification number: H01J27/00 ,  H05H1/54

Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.

公开(公告)号：US08658986B1

公开(公告)日：2014-02-25

申请号：US13649652

申请日：2012-10-11

Applicant: Manuel A. Jerez ,  Carlos F. M. Borges

Inventor： Manuel A. Jerez ,  Carlos F. M. Borges

IPC: H01J27/00

CPC classification number: H01J27/00 ,  H01J27/08 ,  H01J37/08 ,  H01J2237/31701

Abstract: The second repeller assembly includes a flat plate and two sleeves through which the legs of a filament pass in electrically insulated manner. The clamp assembly for the filament includes a pair of strap assemblies with three straps each for electrically connecting the clamps and filament to an electrical feed. The straps are in contact with opposite flat sides of a terminal pin.

Abstract translation: 第二推斥器组件包括平板和两个套筒，细丝的腿通过该套筒以电绝缘的方式穿过。 用于灯丝的夹具组件包括一对带组件，其具有三个带子，用于将夹具和灯丝电连接到电源。 带子与端子销的相对的平坦侧面接触。

公开(公告)号：US20110186436A1

公开(公告)日：2011-08-04

申请号：US13078999

申请日：2011-04-03

Applicant: Igor V. Novosselov ,  Peter C. Ariessohn ,  Evan D. Dengler ,  Michelle Hickner

Inventor： Igor V. Novosselov ,  Peter C. Ariessohn ,  Evan D. Dengler ,  Michelle Hickner

IPC: G01N1/28 ,  H01J49/26 ,  H01J27/00 ,  B01D15/08 ,  G01N30/00 ,  G01J3/00 ,  G01J1/58 ,  G01N27/62 ,  G01N27/447 ,  G01N33/00

CPC classification number: B01D15/08 ,  G01J1/58 ,  G01J3/00 ,  G01N1/28 ,  G01N27/447 ,  G01N27/62 ,  G01N30/00 ,  G01N33/00 ,  H01J27/00 ,  H01J49/26 ,  Y02A50/25

Abstract: Devices, apparatus and methods are disclosed for non-contact pneumatic sampling and sampling of surfaces, persons, articles of clothing, buildings, furnishings, vehicles, baggage, packages, mail, and the like, for contaminating aerosols indicative of a hazard or a benefit, where the contaminating aerosols are chemical, radiological, biological, toxic, or infectious in character. In a first device, a central orifice for pulling a suction gas stream is surrounded by a peripheral array of convergingly-directed gas jets, forming a virtual sampling chamber. The gas jets are configured to deliver millisecond pneumatic pulses that erode particles from solid surfaces at a distance. In another aspect of the invention, a suction gas stream is split using an air-to-air concentrator so that a particle-enriched gas flow is directed to a particle trap and any particles immobilized in the particle trap (including any adsorbed vapors associated with the particles) are selectively analyzed to detect trace residues associated with explosives.

Abstract translation: 公开的装置，装置和方法用于表面，人员，衣物，建筑物，家具，车辆，行李，包装，邮件等的非接触式气体取样和取样，用于污染指示危险或益处的气溶胶 污染气溶胶在化学，放射学，生物学，毒性或传染性方面。 在第一装置中，用于拉动吸入气流的中心孔被收敛的气体射流的外围阵列包围，形成虚拟取样室。 气体喷射器被配置为传送毫秒的气动脉冲，其从一定距离的实体表面侵蚀颗粒。 在本发明的另一方面，使用空气 - 空气浓缩器分离吸入气体流，使得富含颗粒的气体流被引导到颗粒捕获器，并且固定在颗粒捕获器中的任何颗粒（包括与 颗粒）被选择性分析以检测与爆炸物相关的痕量残留物。

公开(公告)号：US06869574B2

公开(公告)日：2005-03-22

申请号：US10091539

申请日：2002-03-07

Applicant: Hisao Hojoh ,  Masatoshi Ono ,  Morinobu Endo ,  Tetsuo Uchiyama

Inventor： Hisao Hojoh ,  Masatoshi Ono ,  Morinobu Endo ,  Tetsuo Uchiyama

IPC: H01J27/00 ,  B01J19/08

CPC classification number: H01J37/08 ,  H01J27/00 ,  H01J37/065 ,  H01J37/073 ,  H01J37/3056 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/06316 ,  H01J2237/0807

Abstract: A charged particle generating method in which mode is changeable between an ion generation mode and an electron generation mode. In the ion generation mode, a raw material is supplied to a tip end of a charged particle generating electrode through a raw-material passage formed in the charged particle generating electrode. A first electric field, in which the charged particle generating electrode is positive and the charged particle extract electrode is negative, is generated to emit ions from the raw material at the charged particle generating electrode. In the electron generation mode, supplying the raw material from the raw-material supply section is stopped. A second electric field, in which the charged particle generating electrode is negative and the charged particle extract electrode is positive, is generated to emit electrons from the raw material at the charged particle generating electrode.

Abstract translation: 一种带电粒子产生方法，其中模式可在离子产生模式和电子生成模式之间变化。 在离子产生模式中，通过形成在带电粒子产生电极中的原料通道将原料供给到带电粒子产生电极的末端。 产生其中带电粒子产生电极为正的并且带电粒子提取电极为负的第一电场，以从带电粒子产生电极的原料发射离子。 在电子生成模式中，停止从原料供给部供给原料。 产生其中带电粒子产生电极为负并且带电粒子提取电极为正的第二电场，以从带电粒子产生电极的原料发射电子。

公开(公告)号：US20180087148A1

公开(公告)日：2018-03-29

申请号：US15809216

申请日：2017-11-10

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Christopher J. Leavitt ,  John A. Frontiero ,  Timothy J. Miller ,  Svetlana B. Radovanov

IPC: C23C14/56 ,  C23C14/14 ,  C23C14/48 ,  H01J37/317

CPC classification number: C23C14/564 ,  C23C14/14 ,  C23C14/48 ,  H01J27/00 ,  H01J37/3171 ,  H01J37/3178 ,  H01J37/32412

Abstract: A method of processing a workpiece is disclosed, where the plasma chamber is first coated using a conditioning gas and optionally, a co-gas. The conditioning gas, which is disposed within a conditioning gas container may comprise a hydride of the desired dopant species and a filler gas, where the filler gas is a hydride of a Group 4 or Group 5 element. The remainder of the conditioning gas container may comprise hydrogen gas. Following this conditioning process, a feedgas, which comprises fluorine and the desired dopant species, is introduced to the plasma chamber and ionized. Ions are then extracted from the plasma chamber and accelerated toward the workpiece, where they are implanted without being first mass analyzed. In some embodiments, the desired dopant species may be boron.

公开(公告)号：US09588004B2

公开(公告)日：2017-03-07

申请号：US14536102

申请日：2014-11-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H05B31/26 ,  H01J37/04 ,  H01J41/02 ,  H01J41/06 ,  H01J41/00 ,  H01J37/08 ,  H01J27/00 ,  H01J27/02

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

公开(公告)号：US07619224B2

公开(公告)日：2009-11-17

申请号：US11940495

申请日：2007-11-15

Applicant: Chiping Chen ,  Thomas M. Bemis ,  Ronak J. Bhatt ,  Jing Zhou

Inventor： Chiping Chen ,  Thomas M. Bemis ,  Ronak J. Bhatt ,  Jing Zhou

IPC: H01J49/10 ,  H01J1/50

CPC classification number: G21K5/04 ,  H01J25/60 ,  H01J27/00 ,  H01J37/08 ,  H01J2237/061 ,  H01J2237/063 ,  H01J2237/31701 ,  H05H15/00

Abstract: A high-brightness, space-charge-dominated circular charged-particle beam system includes a flat circular emitter that emits charge particles to form a space-charge-dominated circular charged-particle beam. The space-charge-dominated circular charged-particle beam is emitted from the flat circular emitter with a uniform density and having a current emission being space-charge-limited, obeying the Child-Langmuir law. A diode includes at least one electrode at the flat circular emitter and at least one additional electrode that accelerates the charged particles. A beam tunnel is coupled electrically to at least one of the additional electrodes. An applied axisymmetric magnetic field focuses the space-charge-dominated circular charged-particle beam. A depressed collector collects the space-charge-dominated circular charged-particle beam.

Abstract translation: 高亮度，空间电荷主导的圆形带电粒子束系统包括平坦的圆形发射体，其发射电荷粒子以形成空间电荷主导的圆形带电粒子束。 空间电荷主导的圆形带电粒子束从平坦的圆形发射器以均匀的密度发射，并且具有受空间电荷限制的电流发射，符合Child-Langmuir定律。 二极管包括在平坦的圆形发射器处的至少一个电极和加速带电粒子的至少一个附加电极。 光束通道电耦合到附加电极中的至少一个。 应用轴对称磁场聚焦空间电荷主导的圆形带电粒子束。 凹陷式收集器收集以空间电荷为主的圆形带电粒子束。

公开(公告)号：US20080173827A1

公开(公告)日：2008-07-24

申请号：US11940495

申请日：2007-11-15

Applicant: Chiping Chen ,  Thomas M. Bemis ,  Ronak J. Bhatt ,  Jing Zhou

Inventor： Chiping Chen ,  Thomas M. Bemis ,  Ronak J. Bhatt ,  Jing Zhou

IPC: H01J1/50

CPC classification number: G21K5/04 ,  H01J25/60 ,  H01J27/00 ,  H01J37/08 ,  H01J2237/061 ,  H01J2237/063 ,  H01J2237/31701 ,  H05H15/00

Abstract: A high-brightness, space-charge-dominated circular charged-particle beam system includes a flat circular emitter that emits charge particles to form a space-charge-dominated circular charged-particle beam. The space-charge-dominated circular charged-particle beam is emitted from the flat circular emitter with a uniform density and having a current emission being space-charge-limited, obeying the Child-Langmuir law. A diode includes at least one electrode at the flat circular emitter and at least one additional electrode that accelerates the charged particles. A beam tunnel is coupled electrically to at least one of the additional electrodes. An applied axisymmetric magnetic field focuses the space-charge-dominated circular charged-particle beam. A depressed collector collects the space-charge-dominated circular charged-particle beam.

Abstract translation: 高亮度，空间电荷主导的圆形带电粒子束系统包括平坦的圆形发射体，其发射电荷粒子以形成空间电荷主导的圆形带电粒子束。 空间电荷主导的圆形带电粒子束从平坦的圆形发射器以均匀的密度发射，并且具有限制空间电荷的电流发射，符合Child-Langmuir定律。 二极管包括在平坦的圆形发射器处的至少一个电极和加速带电粒子的至少一个附加电极。 光束通道电耦合到附加电极中的至少一个。 应用轴对称磁场聚焦空间电荷主导的圆形带电粒子束。 凹陷式收集器收集以空间电荷为主的圆形带电粒子束。

公开(公告)号：US20020053642A1

公开(公告)日：2002-05-09

申请号：US10032664

申请日：2001-10-19

Inventor： Donald W. Berrian

IPC: H01J027/00

CPC classification number: H01J27/00 ,  H01J27/022 ,  H01J37/08 ,  H01J2237/31701

Abstract: An apparatus and a method are disclosed for rapidly controlling the rate of ion generation in an ion source. The ion source includes an ion chamber, filament-cathode, a mirror electrode, and a grid. The ion source is operable to generate an ion beam from the ionization of ion precursor gas present in the ion chamber by electrons emitted from the filament. The rate of ion generation is controlled by modifying the potential of the grid relative to the filament to control the number of electrons available for ionization between the grid and the mirror electrode. An alternative embodiment for rapidly controlling the rate of ion generation in an ion source is also disclosed. In the alternative embodiment, the ion source comprises an ion chamber having mutually opposed sides and configured to receive ion precursor gas; a filament-cathode located on one side of said ion chamber and operable to emit electrons for the ionization of the precursor gas for the generation of the ion beam; and a mirror electrode having a potential associated therewith and located on the other side of said ion chamber. The mirror electrode is connected to a circuit to vary its potential relative to said filament so as to vary the number of the electrons available in the ion chamber for ionization.

Abstract translation: 公开了用于快速控制离子源中的离子产生速率的装置和方法。 离子源包括离子室，灯丝阴极，反射镜电极和栅极。 离子源可操作以通过从灯丝发射的电子从离子室中存在的离子前体气体的离子化产生离子束。 通过改变网格相对于灯丝的电位来控制离子产生的速率，以控制可用于电网和镜电极之间电离的电子数。 还公开了用于快速控制离子源中的离子产生速率的替代实施方案。 在替代实施例中，离子源包括具有彼此相对的侧面并被配置为接收离子前体气体的离子室; 位于所述离子室一侧的灯丝阴极，可操作地发射用于离子束离子化的前体气体的电子; 以及具有与之相关联并位于所述离子室的另一侧上的电位的镜电极。 镜电极连接到电路以改变其相对于所述灯丝的电位，以便改变用于电离的离子室中可用的电子数。

公开(公告)号：US20170247791A1

公开(公告)日：2017-08-31

申请号：US15592823

申请日：2017-05-11

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Christopher J. Leavitt ,  John A. Frontiero ,  Timothy J. Miller ,  Svetlana B. Radovanov

IPC: C23C14/56 ,  C23C14/14 ,  H01J37/317 ,  C23C14/48

CPC classification number: C23C14/564 ,  C23C14/14 ,  C23C14/48 ,  H01J27/00 ,  H01J37/3171 ,  H01J37/3178 ,  H01J37/32412

Abstract: A method of processing a workpiece is disclosed, where the plasma chamber is first coated using a conditioning gas and optionally, a co-gas. The conditioning gas, which is disposed within a conditioning gas container may comprise a hydride of the desired dopant species and a filler gas, where the filler gas is a hydride of a Group 4 or Group 5 element. The remainder of the conditioning gas container may comprise hydrogen gas. Following this conditioning process, a feedgas, which comprises fluorine and the desired dopant species, is introduced to the plasma chamber and ionized. Ions are then extracted from the plasma chamber and accelerated toward the workpiece, where they are implanted without being first mass analyzed. In some embodiments, the desired dopant species may be boron.