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公开(公告)号：US20240194465A1
公开(公告)日：2024-06-13
申请号：US18431091
申请日：2024-02-02
Applicant: INFICON AG
Inventor： Urs WÄLCHLI , Stefan KAISER , Bernhard ANDREAUS , Martin WÜEST , Astrid WALDNER , Michael TREFZER
Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.
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公开(公告)号：US09927317B2
公开(公告)日：2018-03-27
申请号：US14795729
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
Abstract: Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.
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公开(公告)号：US08947098B2
公开(公告)日：2015-02-03
申请号：US13051430
申请日：2011-03-18
Applicant: Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
Inventor： Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。
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公开(公告)号：US20140266231A1
公开(公告)日：2014-09-18
申请号：US14216588
申请日：2014-03-17
Inventor： Yoshiaki Haramoto , Yasuyuki Hirano , Hiromichi Yoshida
IPC: G01N27/64
Abstract: An ionized gas detector includes at least a pair of ion detecting electrodes that detect ions of the ionized measuring-subject gas, an electrode-voltage applying unit that applies a given voltage to the ion detecting electrodes, the electrode-voltage applying unit being configured to be capable of reversing its voltage polarity, a charge amplifier circuit having a charge capacitor that accumulates electric charges generated by voltage application by the electrode-voltage applying unit, an ion current calculating unit that calculates the value of an ion current of ions of the measuring-subject gas, based on a time-dependent change of the volume of electric charges accumulated in the charge capacitor of the charge amplifier circuit, and a concentration determining unit that determines the concentration of the measuring-subject gas, based on an ion current value calculated by the ion current calculating unit.
Abstract translation: 一种离子化气体检测器，具有检测离子化的测定对象气体的离子的至少一对离子检测电极，向离子检测电极施加给定电压的电极电压施加部，电极电压施加部， 能够使其电压极性反转的电荷放大电路，具有蓄积由电极施加电压施加电压产生的电荷的电荷电容器的电荷放大电路;离子电流计算部，其计算测定的离子的离子电流值 - 主体气体，基于积累在电荷放大器电路的电荷电容器中的电荷的体积的时间依赖性变化，以及浓度确定单元，其基于离子电流值确定测量对象气体的浓度 由离子电流计算单元计算。
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公开(公告)号：US07564246B2
公开(公告)日：2009-07-21
申请号：US11472742
申请日：2006-06-22
Applicant: In Mook Choi , Sam Yong Woo , Boo Shik Kim
Inventor： In Mook Choi , Sam Yong Woo , Boo Shik Kim
IPC: G01L21/30
CPC classification number: G01L21/30
Abstract: Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.
Abstract translation: 公开了使用碳纳米管的离子计，更具体地，使用碳纳米管的场发射的压力传感器。 在金属层上形成碳纳米管阵列。 第一栅极设置在碳纳米管的阵列上。 第二栅格设置在第一栅格上，以便与第一栅格隔开一定的期望距离。 收集器以与第二格栅隔开一段预定距离的方式设置在第二格栅上。 从碳纳米管发射的电子与要离子化的气体分子碰撞。 电离阳离子由集电极感测，作为电信号输出。
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Patent Agency Ranking
公开(公告)号：US20090072836A1
公开(公告)日：2009-03-19
申请号：US11472742
申请日：2006-06-22
Applicant: In Mook Choi , Sam Yong Woo , Boo Shik Kim
Inventor： In Mook Choi , Sam Yong Woo , Boo Shik Kim
IPC: G01L21/30
CPC classification number: G01L21/30
Abstract: Disclosed is an ion gage using a carbon nano-tube, more specifically a pressure sensor using a field emission of the carbon nano-tube. An array of carbon nano-tubes is formed on a metallic layer. A first grid is disposed on the array of the carbon nano-tubes. A second grid is disposed on the first grid in such a manner as to be spaced apart by a certain desired distance from the first grid. A collector is disposed on the second grid in such a manner as to be spaced apart by a certain desired distance from the second grid. Electrons emitted from the carbon nano-tube are collided with gas molecules to be ionized. The ionized cation is sensed by the collector to be outputted as an electrical signal.
Abstract translation: 公开了使用碳纳米管的离子计，更具体地，使用碳纳米管的场发射的压力传感器。 在金属层上形成碳纳米管阵列。 第一栅极设置在碳纳米管的阵列上。 第二栅格设置在第一栅格上，以便与第一栅格隔开一定的期望距离。 收集器以与第二格栅隔开一段预定距离的方式设置在第二格栅上。 从碳纳米管发射的电子与要离子化的气体分子碰撞。 电离阳离子由集电极感测，作为电信号输出。
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7.发明申请Emission spectroscopic processing apparatus and plasma processing method using it 失效发射光谱处理装置及其等离子体处理方法公开(公告)号：US20050155952A1
公开(公告)日：2005-07-21
申请号：US11075803
申请日：2005-03-10
Applicant: Tetsunori Kaji , Shizuaki Kimura , Tatehito Usui , Takashi Fujii
Inventor： Tetsunori Kaji , Shizuaki Kimura , Tatehito Usui , Takashi Fujii
CPC classification number: H01J37/32972 , G01L21/30 , G01N21/73 , H01J37/32935
Abstract: A plasma processing method using a spectroscopic processing unit which includes separating spectrally plasma radiation emitted from a vacuum process chamber into component spectra, converting the component spectra into a time series of analogue electric signals composed of different wavelength components at a predetermined period, adding together analogue signals of the different wavelength components, converting a plurality of added signals into digital quantities on a predetermined-period basis, digitally adding together the plurality of added and converted signals a plural number of times on a plural-signal basis, determining discriminatively an end point of a predetermined plasma process on the basis of a signal resulting from the digital addition step, and terminating the predetermined plasma process.
Abstract translation: 一种使用分光处理单元的等离子体处理方法，其包括将从真空处理室发射的光谱等离子体辐射分离成分量光谱，将分量光谱转换为以预定周期由不同波长分量组成的模拟电信号的时间序列，将模拟 不同波长分量的信号，在预定周期的基础上将多个相加的信号转换为数字量，在多信号的基础上将多个相加和转换的信号多次数字地相加多个，分别确定终点 基于由数字添加步骤产生的信号，并终止预定等离子体处理的预定等离子体处理。
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公开(公告)号：US06890771B2
公开(公告)日：2005-05-10
申请号：US10659394
申请日：2003-09-11
Applicant: Tetsunori Kaji , Shizuaki Kimura , Tatehito Usui , Takashi Fujii
Inventor： Tetsunori Kaji , Shizuaki Kimura , Tatehito Usui , Takashi Fujii
CPC classification number: H01J37/32972 , G01L21/30 , G01N21/73 , H01J37/32935
Abstract: A plasma processing method using a spectroscopic processing unit. The method includes separating spectrally plasma radiation emitted from a vacuum process chamber into component spectra, converting the component spectra into a time series of analogue electric signals composed of different wavelength components at a predetermined period, adding together analogue signals of the different wavelength components, converting a plurality of added signals into digital quantities on a predetermined-period basis, digitally adding together the plurality of added and converted signals a plural number of times on a plural-signal basis, determining discriminatively an end point of a predetermined plasma process on the basis of a signal resulting from the digital addition, and terminating the predetermined plasma process.
Abstract translation: 一种使用光谱处理单元的等离子体处理方法。 该方法包括将从真空处理室发射的光谱等离子体辐射分离为分量光谱，将分量光谱转换为以预定周期由不同波长分量组成的模拟电信号的时间序列，将不同波长分量的模拟信号相加，转换 在预定周期的基础上将多个相加的信号转换为数字量，在多信号的基础上将多个相加和转换的信号多次数字地相加在一起，从而基于判断性地确定预定等离子体处理的终点 由数字加法产生的信号，并终止预定的等离子体处理。
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公开(公告)号：US5889281A
公开(公告)日：1999-03-30
申请号：US891695
申请日：1997-07-11
Applicant: David H. Holkeboer , Robert E. Ellefson
Inventor： David H. Holkeboer , Robert E. Ellefson
CPC classification number: H01J49/0027 , G01L21/30 , H01J41/10 , H01J49/02 , H01J49/42
Abstract: A method for linearizing the sensitivity of a quadrupole mass spectrometric system to allow the sensor to more accurately report partial pressures of a gas in high pressure areas in which the reported data is effected by a number of loss mechanisms. According to the invention, correction factors can be applied empirically or software in a quadrupole mass analyzer system can be equipped with correcting software to expand the useful range of the mass spectrometer.
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公开(公告)号：US4747311A
公开(公告)日：1988-05-31
申请号：US24370
申请日：1987-03-10
Applicant: Hisao Hojoh
Inventor： Hisao Hojoh
CPC classification number: G01L9/0022 , G01L21/00 , G01L21/30 , G01L21/32
Abstract: Regarding a gas pressure gage for measuring a gas pressure in a vacuum chamber of a semiconductor element manufacturing apparatus, or the like, the present invention has made it possible to attain a small-sized and unitary gas pressure gage and to implement a thorough measurement of gas pressure from the atmospheric pressure to a high vacuum of about 10.sup.-10 Torr, by mounting both a mechanical vibrator type pressure gage and an ionization type pressure gage on a flange provided for fitting a chamber and by providing a control circuit for making the former gage operate in a low-vacuum region and the latter in a high-vacuum region.
Abstract translation: 关于用于测量半导体元件制造装置的真空室中的气体压力的气体压力计等，本发明使得可以获得小型和单一的气体压力计，并且实现对 通过将机械振动器式压力计和电离型压力计安装在用于装配室的凸缘上，并且通过提供用于制造前者的控制回路，从大气压到大约10-10托的高真空的气体压力 量规在低真空区域中操作，后者在高真空区域中操作。
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