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    Ion Filter
    3.
    发明申请
    Ion Filter 审中-公开

    公开(公告)号：US20180143332A1

    公开(公告)日：2018-05-24

    申请号：US15813777

    申请日：2017-11-15

    Applicant: Plasma-Therm LLC

    Inventor： Leslie Michael Lea ,  Linnell Martinez ,  Michael Morgan ,  Russell Westerman

    IPC: G01T1/28 ,  H01J49/02 ,  H01J3/14

    CPC classification number: G01T1/28 ,  H01J3/14 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/32577 ,  H01J37/32633 ,  H01J37/32871 ,  H01J49/02 ,  H01L21/78

    Abstract: The present invention provides a method for using ion filtering to adjust the number of ions delivered to a substrate. The method comprising a process chamber being provided that is operatively connected to a plasma source. The substrate is provided on a substrate support that is provided within the process chamber. An electrical bias source is provided that is operatively connected to an aperture plate that is provided in the process chamber. The substrate on the substrate support is processed using a plasma generated using the plasma source. A variable bias voltage from the electrical bias source is applied to the aperture plate during the plasma processing of the substrate. The plasma processing of the substrate can further comprise exposing the substrate to a plasma time division multiplex process which alternates between deposition and etching on the substrate.

    Electrostatic Trap
    6.
    发明申请
    Electrostatic Trap 审中-公开

    公开(公告)号：US20170117130A1

    公开(公告)日：2017-04-27

    申请号：US15398101

    申请日：2017-01-04

    Applicant: Thermo Fisher Scientific (Bremen) GmbH

    Inventor： Alexander A. MAKAROV ,  Eduard V. DENISOV ,  Gerhard JUNG ,  Wilko BALSCHUN ,  Stevan R. HORNING

    IPC: H01J49/42 ,  H01J49/28 ,  H01J49/40 ,  H01J49/00

    CPC classification number: H01J49/4245 ,  H01J49/0027 ,  H01J49/02 ,  H01J49/282 ,  H01J49/406 ,  H01J49/425

    Abstract: An electrostatic trap such as an orbitrap is disclosed, with an electrode structure. An electrostatic trapping field of the form U′(r, Φ, z) is generated to trap ions within the trap so that they undergo isochronous oscillations. The trapping field U′(r, Φ, z) is the result of a perturbation W to an ideal field U(r, Φ, z) which, for example, is hyperlogarithmic in the case of an orbitrap. The perturbation W may be introduced in various ways, such as by distorting the geometry of the trap so that it no longer follows an equipotential of the ideal field U(r, Φ, z), or by adding a distortion field (either electric or magnetic). The magnitude of the perturbation is such that at least some of the trapped ions have an absolute phase spread of more than zero but less than 2 π radians over an ion detection period Tm.

    METHOD AND APPARATUS FOR DETERMINING A MOBILITY OF IONS
    8.
    发明申请
    METHOD AND APPARATUS FOR DETERMINING A MOBILITY OF IONS 有权
    用于确定离子的移动性的方法和装置

    公开(公告)号：US20160320341A1

    公开(公告)日：2016-11-03

    申请号：US15178941

    申请日：2016-06-10

    Applicant: Tofwerk AG

    Inventor： Richard Knochenmuss

    IPC: G01N27/62 ,  H01J49/06 ,  H01J49/40

    CPC classification number: G01N27/622 ,  H01J49/02 ,  H01J49/061 ,  H01J49/40

    Abstract: A method and an apparatus for determining a mobility of ions. The method includes the steps of modulating an ion beam with an ion gate which is controlled by a modulation function for generating a modulated ion beam, of guiding the modulated ion beam through a drifting region, of measuring a signal of the modulated ion beam after the modulated ion beam has passed the drifting region and of calculating a correlation of the modulation function and the signal in order to determine the mobility of the ions. The apparatus includes the ion gate, the drifting region through which the modulated ion beam is guidable, a detector by which the signal of the modulated ion beam is measurable after the modulated ion beam has passed the drifting region and a calculation unit by which the correlation of the modulation function and the signal is calculable in order to determine the mobility of the ions. An autocorrelation of the modulation function is a two-valued function.

    Abstract translation: 用于确定离子迁移率的方法和装置。 该方法包括以下步骤：用离子门调制离子束，该离子门由用于产生调制离子束的调制功能控制，该调制离子束将经调制的离子束引导通过漂移区，测量经过调制离子束的信号 调制离子束已经通过漂移区域并且计算调制函数和信号的相关性，以便确定离子的迁移率。 该装置包括离子门，经调制的离子束可引导的漂移区域，经调制的离子束已经通过漂移区域之后可测量调制的离子束的信号的检测器，以及计算单元， 的调制函数和信号是可计算的，以便确定离子的迁移率。 调制函数的自相关是一个二值函数。

    First and second order focusing using field free regions in time-of-flight
    9.
    发明授权
    First and second order focusing using field free regions in time-of-flight 有权
    在飞行时间内使用无地区的一级和二级对焦

    公开(公告)号：US09281175B2

    公开(公告)日：2016-03-08

    申请号：US14367234

    申请日：2012-12-06

    Applicant: DH Technologies Development Pte. Ltd.

    Inventor： Robert E. Haufler ,  William Morgan Loyd

    IPC: H01J49/40 ,  H01J49/00 ,  B01D59/44 ,  H01J49/02

    CPC classification number: H01J49/405 ,  H01J49/0027 ,  H01J49/02 ,  H01J49/406

    Abstract: In some embodiments, a time of flight mass spectrometer can comprise an input orifice for receiving ions, a first ion accelerator stage for accelerating the ions along a first path, at least one ion reflector for receiving said accelerated ions and redirecting said ions along a second path different than the first path, a detector for detecting at least a portion of the ions redirected by said at least one ion reflector, and at least first and second field free drift regions disposed between said first acceleration stage and said detector, wherein said second field free region is disposed in proximity of the detector. In some embodiments, the lengths of the field free drift regions can be selected so as to provide 1st and 2nd order corrections of the time of flight of the ions with respect to variation in their initial positions.

    Abstract translation: 在一些实施例中，飞行时间质谱仪可以包括用于接收离子的输入孔，用于沿着第一路径加速离子的第一离子加速器级，用于接收所述加速离子的至少一个离子反射器，并沿着第二路径重定向所述离子 用于检测由所述至少一个离子反射器重定向的离子的至少一部分的检测器，以及设置在所述第一加速级与所述检测器之间的至少第一和第二场自由漂移区，其中所述第二 无场区设置在检测器附近。 在一些实施例中，可以选择场自由漂移区的长度，以便提供离子相对于其初始位置变化的飞行时间的1次和2次校正。

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