公开(公告)号：US20250046589A1

公开(公告)日：2025-02-06

申请号：US18926803

申请日：2024-10-25

Applicant: INFICON AG

Inventor： Urs WÄLCHLI ,  Stefan KAISER ,  Bernhard ANDREAUS ,  Martin WÜEST ,  Astrid WALDNER ,  Michael TREFZER

IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

Abstract: A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.

公开(公告)号：US12154771B2

公开(公告)日：2024-11-26

申请号：US18431091

申请日：2024-02-02

Applicant: INFICON AG

Inventor： Urs Wälchli ,  Stefan Kaiser ,  Bernhard Andreaus ,  Martin Wüest ,  Astrid Waldner ,  Michael Trefzer

IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

公开(公告)号：US6025723A

公开(公告)日：2000-02-15

申请号：US917932

申请日：1997-08-27

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32 ,  H05B31/26 ,  H05H15/00

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

公开(公告)号：US20240194465A1

公开(公告)日：2024-06-13

申请号：US18431091

申请日：2024-02-02

Applicant: INFICON AG

Inventor： Urs WÄLCHLI ,  Stefan KAISER ,  Bernhard ANDREAUS ,  Martin WÜEST ,  Astrid WALDNER ,  Michael TREFZER

IPC: H01J41/10 ,  G01L21/30

CPC classification number: H01J41/10 ,  G01L21/30

Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

公开(公告)号：US20050028602A1

公开(公告)日：2005-02-10

申请号：US10910104

申请日：2004-08-03

Applicant: Raffaele Correale

Inventor： Raffaele Correale

IPC: G01L21/34 ,  H01J41/06 ,  H01J41/10 ,  H01J1/62

CPC classification number: B82Y10/00 ,  H01J41/06

Abstract: An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

Abstract translation: 用于测量残留在容器（10）中的气态材料的残余压力的电离真空计更具体地在真空泵的操作之后包括通过利用纳米管技术制成的电子发射阴极（31），栅格（13; 33; 133; 133'），用于加速由阴极发射的电子;以及板（15; 35），其收集气体的离子和/或电离的正分子。 用电流计测量板电流可以确定容器内残余压力的值。

公开(公告)号：US6046456A

公开(公告)日：2000-04-04

申请号：US276985

申请日：1999-03-26

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

公开(公告)号：US5808308A

公开(公告)日：1998-09-15

申请号：US863818

申请日：1997-05-27

Applicant: David H. Holkeboer

Inventor： David H. Holkeboer

IPC: H01J41/10 ,  H01J49/10 ,  H01J49/12 ,  H01J39/34

CPC classification number: H01J49/10 ,  H01J41/10

Abstract: A dual beam ion source comprises an ion volume in an ion chamber, an ion collector, and two identical ion accelerators. One ion accelerator accelerates a first, "test" ion stream from the ion volume in a first direction and directs it to the ion collector where it can be directly measured. The second ion accelerator accelerates a second, "utilizable" ion stream from the ion volume in a second direction. By directly measuring the ion current (caused by the first, "test" ion stream) at the ion collector, either or both the total ion pressure of the gas within the ion volume, and the magnitude of the second, "utilizable" ion stream, can be calculated.

Abstract translation: 双束离子源包括离子室中的离子体积，离子收集器和两个相同的离子加速器。 一个离子加速器从第一方向从离子体积加速第一个“测试”离子流，并将其引导到离子收集器，直接测量离子收集器。 第二离子加速器在第二方向从离子体积加速第二个“可利用的”离子流。 通过直接测量离子收集器处的离子电流（由第一个“测试”离子流引起的离子流），离子体积内的气体的总离子压力和第二个“可利用的”离子流的大小 ，可以计算。