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公开(公告)号：US09927317B2
公开(公告)日：2018-03-27
申请号：US14795729
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Douglas C. Hansen
Abstract: Devices and corresponding methods are provided to operate a hot cathode ionization pressure gauge (HCIG). A transistor circuit can be configured to pass the electron emission current with low input impedance and to control cathode bias voltage. Emission current and cathode bias voltage can be controlled independently of each other, without a servo settling time. HCIGs can be calibrated with respect to leakage current.
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公开(公告)号：US09903767B2
公开(公告)日：2018-02-27
申请号：US14575628
申请日：2014-12-18
Applicant: Palo Alto Research Center Incorporated
Inventor： Saroj Kumar Sahu , Scott Limb , Francisco E. Torres
Abstract: A thermionic sensor is disclosed. The sensor includes a sensor housing at least partially defining an emission chamber in which at least a partial vacuum is maintained; a cathode disposed in the emission chamber; an anode disposed in the emission chamber and spaced apart from the cathode; and an electrically conductive layer disposed in the emission chamber facing the anode and cathode. The thermionic sensor is configured to output a detection signal when the anode and cathode are at substantially the same temperature.
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3.发明申请公开(公告)号：US20170276129A1
公开(公告)日：2017-09-28
申请号：US15465231
申请日：2017-03-21
Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.
Inventor： Kakeru Takahashi
Abstract: A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuumvessel, based on a vacuummeasurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.
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4.发明申请Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges 审中-公开漏电流检测和离子化测量中的去污设备及方法公开(公告)号：US20170010171A1
公开(公告)日：2017-01-12
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
IPC: G01L21/32
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。
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公开(公告)号：US08947098B2
公开(公告)日：2015-02-03
申请号：US13051430
申请日：2011-03-18
Applicant: Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
Inventor： Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker , Kenneth D. Van Antwerp, Jr.
Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。
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Patent Agency Ranking
6.发明申请DEVICE FOR MEASURING MEAN FREE PATH, VACUUM GAUGE, AND METHOD FOR MEASURING MEAN FREE PATH 有权用于测量平均无路径的设备，真空计和用于测量平均无路径的方法公开(公告)号：US20120235034A1
公开(公告)日：2012-09-20
申请号：US13421762
申请日：2012-03-15
Applicant: Yoshiro Shiokawa , Megumi Nakamura , Qiang Peng
Inventor： Yoshiro Shiokawa , Megumi Nakamura , Qiang Peng
IPC: H01J49/40
CPC classification number: G01L21/32
Abstract: The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector (24a) for detecting the number of first charged particles being charged particles having a first flight distance L1 that is a flight distance of zero or more from the ion source, and a collector (24b) for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.
Abstract translation: 本发明提供了一种用于测量能够直接测量带电粒子的平均自由程，平均自由程的平均自由程的装置，以及用于测量平均自由程的方法。 根据本发明的一个实施例的用于测量平均自由路径的装置包括用于产生离子的离子源，用于检测第一带电粒子的数量的收集器（24a），其是具有作为飞行的第一飞行距离L1的带电粒子 距离离子源的距离为零以上，以及用于检测具有比第一飞行距离长的第二飞行距离的第二带电粒子的数量的收集器（24b）。 设备的控制部分根据第一和第二带电粒子的数量之间的比率计算平均自由程。
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公开(公告)号：US07207224B2
公开(公告)日：2007-04-24
申请号：US11150868
申请日：2005-06-10
Applicant: Paul M. Rutt , Michael D. Borenstein
Inventor： Paul M. Rutt , Michael D. Borenstein
IPC: G01L7/00
Abstract: A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
Abstract translation: 组合式真空计通过处理来自绝对高真空计（例如电离计和/或热损失传感器）的读数，在大气压至超高真空的宽范围压力范围内提供同时的绝对和差压测量， 提供相对于环境压力的差分的差分低真空计（例如，隔膜传感器）和暴露于测量区域外的环境大气的气压绝对压力传感器。 气压绝对压力传感器读数用于将差压真空计读数从未校准差压转换为校准绝对压力。
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公开(公告)号：US20070012116A1
公开(公告)日：2007-01-18
申请号：US11439875
申请日：2006-05-24
Applicant: Paul Arnold , Michael Borenstein , Paul Rutt
Inventor： Paul Arnold , Michael Borenstein , Paul Rutt
IPC: G01L7/00
Abstract: A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide-range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings of (i) an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor) and an absolute or a differential low vacuum gauge (e.g., a diaphragm sensor) exposed, through a common port, to pressures in a measurement region, and (ii) a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading may be used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure or to convert the absolute vacuum gauge reading from absolute pressure to differential pressure.
Abstract translation: 组合式真空计通过处理（i）绝对高真空计（例如，电离计和/或热电偶）的读数，在大气压至超高真空的宽范围压力下提供同时的绝对和差压测量， 损耗传感器）和通过公共端口暴露在测量区域中的压力的绝对或差分低真空计（例如，隔膜传感器），以及（ii）暴露于测量之外的环境大气的气压绝对压力传感器 地区。 气压绝对压力传感器读数可用于将差压真空计读数从未校准差压转换为校准绝对压力，或将绝对真空计读数从绝对压力转换为差压。
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公开(公告)号：US20060278004A1
公开(公告)日：2006-12-14
申请号：US11150868
申请日：2005-06-10
Applicant: Paul Rutt , Michael Borenstein
Inventor： Paul Rutt , Michael Borenstein
IPC: G01L7/00
Abstract: A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
Abstract translation: 组合式真空计通过处理来自绝对高真空计（例如电离计和/或热损失传感器）的读数，在大气压至超高真空的宽范围压力范围内提供同时的绝对和差压测量， 提供相对于环境压力的差分的差分低真空计（例如，隔膜传感器）和暴露于测量区域外的环境大气的气压绝对压力传感器。 气压绝对压力传感器读数用于将差压真空计读数从未校准差压转换为校准绝对压力。
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10.发明授权公开(公告)号：US06756785B2
公开(公告)日：2004-06-29
申请号：US10205014
申请日：2002-07-25
Applicant: Neil T. Peacock , Stacy W. Wade
Inventor： Neil T. Peacock , Stacy W. Wade
IPC: G01L2130
CPC classification number: G01L21/32
Abstract: A method operating a hot cathode ionization pressure gauge during electron bombardment and resistance degas operations by controlling the degas power levels as a function of the gauge pressure. In one embodiment, the degas power level is increased and decreased in steps, and the gauge pressure monitored following each increase and decrease. In another embodiment the rate of change in the gauge pressure is monitored while the degas power level is increased. If it is determined from the monitored rate of change that the gauge pressure may exceed the upper limit, the degas power increases can be stopped or the degas power decreased. These operation are continued until predetermined final degas conditions are met. A display can be activated following the successful completion of the degas operation.
Abstract translation: 通过控制作为表压的函数的脱气功率水平，在电子轰击期间操作热阴极电离压力计的方法和电阻脱气操作。 在一个实施例中，脱气功率水平逐步增加和减小，并且在每次增加和减少之后监测表压。 在另一个实施例中，在排气功率水平增加时监测表压的变化率。 如果从监测的变化率确定表压可能超过上限，则可以停止脱气功率增加或脱气功率降低。 持续进行这些操作，直至满足预定的最终脱气条件。 成功完成脱气操作后，可以激活显示。
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