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    TRANSMITTED LIGHT INTENSITY MEASUREMENT UNIT
    3.
    发明申请
    TRANSMITTED LIGHT INTENSITY MEASUREMENT UNIT 审中-公开

    公开(公告)号：US20180180541A1

    公开(公告)日：2018-06-28

    申请号：US15577091

    申请日：2016-05-27

    申请人： NIPRO CORPORATION ,  HARADA ELECTRONICS INDUSTRY CO., LTD.

    发明人： Yoshihiko SANO ,  Masahide HARADA

    IPC分类号： G01N21/59 ,  G01N33/49

    CPC分类号： G01N21/59 ,  G01N21/05 ,  G01N21/85 ,  G01N33/4915 ,  G01N2021/0364 ,  G01N2201/0612 ,  G01N2201/0621 ,  G01N2201/0639

    摘要： A transmitted light intensity measurement unit for measuring a concentration of fluid flowing through a duct comprises: a light source for supplying light into the duct from a light supply part on a surface of the duct; a light receiving element for receiving the light, which has been passed from the light supply part through the duct wall and the fluid inside the duct, at a light receiving part located on an opposite side in a diametrical direction of the duct relative to the light supply part, and outputs a signal indicating an intensity of the light; and a light-transmissive member disposed on at least one light path among a light pass between the light source and the light supply part and a light pass between the light receiving element and the light receiving part, abutting and closely contacting the duct wall by an elastic deformation of the duct wall.

    Automated process control using optical metrology with a photonic nanojet
    5.
    发明授权
    Automated process control using optical metrology with a photonic nanojet 失效
    使用光子纳米喷射技术进行光学测量的自动过程控制

    公开(公告)号：US07639351B2

    公开(公告)日：2009-12-29

    申请号：US11726076

    申请日：2007-03-20

    申请人： Zhigang Chen ,  Hanyou Chu ,  Shifang Li ,  Manuel Madriaga

    发明人： Zhigang Chen ,  Hanyou Chu ,  Shifang Li ,  Manuel Madriaga

    IPC分类号： G01N21/00

    CPC分类号： G01B11/046 ,  B82Y15/00 ,  B82Y30/00 ,  G01B11/06 ,  G01N2201/0639

    摘要： A fabrication cluster can be controlled using optical metrology. A fabrication process is performed on a wafer using a fabrication cluster. A photonic nanojet, an optical intensity pattern induced at a shadow-side surface of a dielectric microsphere, is generated. An inspection area on the wafer is scanned with the photonic nanojet. A measurement is obtained of the retroreflected light from the dielectric microsphere as the photonic nanojet scans the inspection area. The existence of a structure in the inspection area is determined with the obtained measurement of the retroreflected light. One or more process parameters of the fabrication cluster is adjusted based on the determination of the existence of the structure in the inspection area.

    摘要翻译： 可以使用光学计量来控制制造集群。 使用制造集群在晶片上进行制造工艺。 产生光电纳米喷墨，在电介质微球的阴影侧表面处诱导的光强度图案。 使用光子纳米喷墨扫描晶片上的检查区域。 当光子纳米喷墨扫描检查区域时，获得来自电介质微球的回射光的测量。 通过获得的回射光的测量来确定检查区域中的结构的存在。 基于检查区域中结构的存在的确定来调整制造簇的一个或多个处理参数。

    Capillary flow cell with bulbous ends
    9.
    发明授权
    Capillary flow cell with bulbous ends 失效
    毛细管流通池带球形末端

    公开(公告)号：US06281975B1

    公开(公告)日：2001-08-28

    申请号：US09521071

    申请日：2000-03-07

    申请人： Miner N. Munk

    发明人： Miner N. Munk

    IPC分类号： G01N2100

    CPC分类号： G01N30/74 ,  G01N21/0303 ,  G01N21/05 ,  G01N2021/0346 ,  G01N2030/746 ,  G01N2201/0639

    摘要： A bent capillary flow cell with protruding end bulbs coaxial with centerline of an elongated center cylindrical section of capillary tubing. The bulbs provide a high light throughput entrance window for the cell. Light is piped along the elongated center section by total internal reflection at the outside surface of the cell wall. An external light absorbing band is placed in optical contact with outer surface of the cell wall over a transition cone region between the bulb and center cylindrical section of the cell. Each of the external light absorbing bands extend a short prescribed distance over the cylindrical wall to absorb light rays that would otherwise be light piped within the cell wall and have little exposure to the liquid in the cell.

    摘要翻译： 弯曲的毛细管流动池，突出的端部灯泡与细长的毛细管中心圆柱形部分的中心线同轴。 灯泡为电池提供高光通量入口窗口。 光通过在细胞壁的外表面处的全内反射沿着细长中心部分管道。 外部光吸收带放置成在电池的灯泡和中心圆柱形部分之间的过渡锥形区域上与电池壁的外表面光学接触。 每个外部光吸收带在圆柱形壁上延伸一个短的规定距离，以吸收否则将在细胞壁内轻微管道并且几乎不暴露于细胞中的液体的光线。